Measurement of surface profile of microstructure

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue II, 1999, Pages 863-869

  Zhou, Mingbao ^a   Bai, Linbo ^a   Li, Zhan ^a   Yao, Hanmin ^a  

^a INSTITUTE OF OPTICS AND ELECTRONICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DATA REDUCTION; IMAGE QUALITY; INTERFEROMETERS; MICROSTRUCTURE; PHASE SHIFT;

DUAL-PATH TWO-WAVELENGTH PHASE-SHIFTING INTERFEROMETRY;

INTEGRATED OPTOELECTRONICS;

EID: 0032680114     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.341284     Document Type: Conference Paper

References (17)