SCOPUS 정보 검색 플랫폼

Materials Science and Engineering R: Reports

Volumn 22, Issue 6, 1998, Pages 269-322

Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications

(4) Chaneliere, C a Autran, J L a Devine, R A B b Balland, B a

a UNIVERSITÉ DE LYON (France)

b ORANGE LABS (France)

Author keywords

Dielectric application; Semiconductor; Tantalum pentoxide

Indexed keywords

ANTIREFLECTION COATINGS; CORROSION RESISTANCE; DENSITY (SPECIFIC GRAVITY); DEPOSITION; ELECTRIC INSULATING COATINGS; LEAKAGE CURRENTS; MICROELECTRONICS; PERMITTIVITY; REFRACTIVE INDEX; SEMICONDUCTING FILMS; THIN FILMS;

TANTALUM PENTOXIDE;

TANTALUM COMPOUNDS;

EID: 0032072478 PISSN: 0927796X EISSN: None Source Type: Journal
DOI: 10.1016/S0927-796X(97)00023-5 Document Type: Review

Times cited : (671)

References (324)

1
- 0028448562
- C. Fiegna, H, Iwai, T. Wada, M. Saito, E. Sangiorgi, B. Ricco, IEEE Trans. Electron Devices ED-41 (1994) 941.
- (1994) IEEE Trans. Electron Devices , vol.ED-41 , pp. 941
- Fiegna, C.¹ Iwai, H.² Wada, T.³ Saito, M.⁴ Sangiorgi, E.⁵ Ricco, B.⁶

2
- 0040839227
- H.R. Huff, R.J. Kriegler, Y. Takeishi (Eds.), The Electrochemical Society, Pennington
- S. Lai, Semiconductor Silicon 1981, in: H.R. Huff, R.J. Kriegler, Y. Takeishi (Eds.), The Electrochemical Society, Pennington, 1981, p. 416.
- (1981) Semiconductor Silicon 1981 , pp. 416
- Lai, S.¹

3
- 80051477229
- S. Asai, IEDM Tech. Dig. (1984) 6.
- (1984) IEDM Tech. Dig. , pp. 6
- Asai, S.¹

4
- 4243988014
- C. Hu, IEDM Tech. Dig. (1985) 368.
- (1985) IEDM Tech. Dig. , pp. 368
- Hu, C.¹

5
- 0040244690
- Tokyo, Japan, August 23-25, 1989, Business Center for Academic Societies Japan, Tokyo
- J. Yugami, T. Mine, S. Iijima, A. Hiraiwa, Ext. Abs. of the 1989 Int. Conf. on Solid State Devices and Materials, Tokyo, Japan, August 23-25, 1989, Business Center for Academic Societies Japan, Tokyo, 1989, p. 173.
- (1989) Ext. Abs. of the 1989 Int. Conf. on Solid State Devices and Materials , pp. 173
- Yugami, J.¹ Mine, T.² Iijima, S.³ Hiraiwa, A.⁴

6
- 0025759752
- Yokohama, Japan, August 25-28, 1991, Business Center for Academic Societies Japan, Tokyo
- T. Morimoto, H.S. Momose, M. Tsuchiaki, Y. Ozawa, K. Yamabe, H. Iwai, Ext. Abs. of the 1991 Int. Conf. on Solid State Devices and Materials, Yokohama, Japan, August 25-28, 1991, Business Center for Academic Societies Japan, Tokyo, 1991, p. 23.
- (1991) Ext. Abs. of the 1991 Int. Conf. on Solid State Devices and Materials , pp. 23
- Morimoto, T.¹ Momose, H.S.² Tsuchiaki, M.³ Ozawa, Y.⁴ Yamabe, K.⁵ Iwai, H.⁶

7
- 0026924108
- N. Rausch, E.P. Burte, Microelectron. Eng. 19 (1992) 725.
- (1992) Microelectron. Eng. , vol.19 , pp. 725
- Rausch, N.¹ Burte, E.P.²

8
- 0030865462
- S.A. Campbell, D.C. Gilmer, X.C. Wang, M.T. Hsieh, H.S. Kim, W.L. Gladfelter, J. Yan, IEEE Trans. Electron Devices ED-44 (1997) 104.
- (1997) IEEE Trans. Electron Devices , vol.ED-44 , pp. 104
- Campbell, S.A.¹ Gilmer, D.C.² Wang, X.C.³ Hsieh, M.T.⁴ Kim, H.S.⁵ Gladfelter, W.L.⁶ Yan, J.⁷

9
- 36549102892
- M. Gurvitch, Appl. Phys. Lett. 51 (1987) 919.
- (1987) Appl. Phys. Lett. , vol.51 , pp. 919
- Gurvitch, M.¹

10
- 0028752010
- R. Khamankar, J. Kim, B. Jiang, C. Sudhama, P. Maniar, R. Moazzami, R. Jones, J. Lee, IEDM Tech. Dig. (1994) 337.
- (1994) IEDM Tech. Dig. , pp. 337
- Khamankar, R.¹ Kim, J.² Jiang, B.³ Sudhama, C.⁴ Maniar, P.⁵ Moazzami, R.⁶ Jones, R.⁷ Lee, J.⁸

11
- 0028449872
- Y.M. Coïc, O. Musseau, J.L. Leray, IEEE Trans. Nucl. Sci. NS-41 (1994) 495.
- (1994) IEEE Trans. Nucl. Sci. , vol.NS-41 , pp. 495
- Coïc, Y.M.¹ Musseau, O.² Leray, J.L.³

12
- 0002638218
- J.L. Autran, P. Paillet, J.L. Leray, R.A.B. Devine, Le Vide: Science, Technique et Applications 275 (1995) 44.
- (1995) Le Vide: Science, Technique et Applications , vol.275 , pp. 44
- Autran, J.L.¹ Paillet, P.² Leray, J.L.³ Devine, R.A.B.⁴

13
- 0030695788
- Y.S. Choi, S.D. Choe, S.H. Kim, C.E. Kim, D.Y. Yang, Mater. Res. Soc. Symp. Proc. 446 (1997) 337.
- (1997) Mater. Res. Soc. Symp. Proc. , vol.446 , pp. 337
- Choi, Y.S.¹ Choe, S.D.² Kim, S.H.³ Kim, C.E.⁴ Yang, D.Y.⁵

14
- 0030715495
- T. Li, P. Zawadzki, R.A. Stall, Y. Zhu, S.B. Desu, Mater. Res. Soc. Symp. Proc. 446 (1997) 315.
- (1997) Mater. Res. Soc. Symp. Proc. , vol.446 , pp. 315
- Li, T.¹ Zawadzki, P.² Stall, R.A.³ Zhu, Y.⁴ Desu, S.B.⁵

15
- 0009087828
- L. Young, Proc. R. Soc. London A 244 (1958) 41.
- (1958) Proc. R. Soc. London A , vol.244 , pp. 41
- Young, L.¹

16
- 0039652890
- L. Young, Proc. R. Soc. London A 258 (1960) 496.
- (1960) Proc. R. Soc. London A , vol.258 , pp. 496
- Young, L.¹

17
- 0006371634
- C.L. Standley, L.I. Maissel, J. Appl. Phys. 35 (1964) 1530.
- (1964) J. Appl. Phys. , vol.35 , pp. 1530
- Standley, C.L.¹ Maissel, L.I.²

18
- 84975341282
- D. Gerstenberg, J. Electrochem. Soc. 113 (1966) 542.
- (1966) J. Electrochem. Soc. , vol.113 , pp. 542
- Gerstenberg, D.¹

19
- 0040839225
- D. Mills, L. Young, F.G.R. Zobel, J. Appl. Phys. 37 (1966) 1821.
- (1966) J. Appl. Phys. , vol.37 , pp. 1821
- Mills, D.¹ Young, L.² Zobel, F.G.R.³

20
- 0000703813
- N.N. Axelrod, N. Schwartz, J. Electrochem. Soc. 116 (1969) 460.
- (1969) J. Electrochem. Soc. , vol.116 , pp. 460
- Axelrod, N.N.¹ Schwartz, N.²

21
- 84967727560
- C.J. Dell'Oca, Y. Young, J. Electrochem. Soc. 117 (1970) 1548.
- (1970) J. Electrochem. Soc. , vol.117 , pp. 1548
- Dell'oca, C.J.¹ Young, Y.²

22
- 0039060692
- G.D. O'Clock Jr., Appl. Phys. Lett. 19 (1971) 403.
- (1971) Appl. Phys. Lett. , vol.19 , pp. 403
- O'Clock G.D., Jr.¹

23
- 0040839224
- P.S. Wilcox, W.D. Westwood, Can. J. Phys. 49 (1971) 1543.
- (1971) Can. J. Phys. , vol.49 , pp. 1543
- Wilcox, P.S.¹ Westwood, W.D.²

24
- 0015328895
- J.P.S. Pringle, J. Electrochem. Soc. 119 (1972) 482.
- (1972) J. Electrochem. Soc. , vol.119 , pp. 482
- Pringle, J.P.S.¹

25
- 0015602579
- J.P.S. Pringle, J. Electrochem. Soc. 120 (1973) 398.
- (1973) J. Electrochem. Soc. , vol.120 , pp. 398
- Pringle, J.P.S.¹

26
- 0015636402
- F.C. Aris, T.J. Lewis, J. Phys. D 6 (1973) 1067.
- (1973) J. Phys. D , vol.6 , pp. 1067
- Aris, F.C.¹ Lewis, T.J.²

27
- 0005954157
- J.H. Thomas III, Appl. Phys. Lett. 22 (1973) 406.
- (1973) Appl. Phys. Lett. , vol.22 , pp. 406
- Thomas J.H. III¹

28
- 0015972664
- M.W. Jones, D.M. Hughes, J. Phys. D 7 (1974) 112.
- (1974) J. Phys. D , vol.7 , pp. 112
- Jones, M.W.¹ Hughes, D.M.²

29
- 0016028121
- J.H. Thomas III, J. Appl. Phys. 45 (1974) 835.
- (1974) J. Appl. Phys. , vol.45 , pp. 835
- Thomas J.H. III¹

30
- 0018014769
- H. Matsumoto, S. Tanaka, T. Yabumoto, Jpn. J. Appl. Phys. 17 (1978) 1543.
- (1978) Jpn. J. Appl. Phys. , vol.17 , pp. 1543
- Matsumoto, H.¹ Tanaka, S.² Yabumoto, T.³

31
- 0017984616
- S.M. Gubanski, D.M. Hughes, Thin Solid Films 52 (1978) 119.
- (1978) Thin Solid Films , vol.52 , pp. 119
- Gubanski, S.M.¹ Hughes, D.M.²

32
- 0018443237
- P.H. Holloway, G.C. Nelson, J. Vac. Sci. Technol. 16 (1979) 793.
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 793
- Holloway, P.H.¹ Nelson, G.C.²

33
- 0022892092
- M. Metikos-Hukovic, M. Ceraj-Ceric, Thin Solid Films 145 (1986) 39.
- (1986) Thin Solid Films , vol.145 , pp. 39
- Metikos-Hukovic, M.¹ Ceraj-Ceric, M.²

34
- 0024750702
- K.C. Kalra, P. Katyal, K.C. Singh, Thin Solid Films 177 (1989) 35.
- (1989) Thin Solid Films , vol.177 , pp. 35
- Kalra, K.C.¹ Katyal, P.² Singh, K.C.³

35
- 0040244689
- A. Resetic, B. Jaric, J. Appl. Electrochem. 20 (1990) 768.
- (1990) J. Appl. Electrochem. , vol.20 , pp. 768
- Resetic, A.¹ Jaric, B.²

36
- 0026172944
- K.C. Kalra, P. Katyal, Thin Solid Films 201 (1991) 203.
- (1991) Thin Solid Films , vol.201 , pp. 203
- Kalra, K.C.¹ Katyal, P.²

37
- 0039060690
- K.C. Kalra, P. Katyal, J. Appl. Electrochem. 21 (1991) 729.
- (1991) J. Appl. Electrochem. , vol.21 , pp. 729
- Kalra, K.C.¹ Katyal, P.²

38
- 85033899858
- Tokyo, Japan, September 17-20, Institute of Electrical Engineering Japan, Tokyo, 1995
- S.D. Khanin, Proc. of the 1995 Int. Symp. on Electrical Insulating Materials, Tokyo, Japan, September 17-20, 1995, Institute of Electrical Engineering Japan, Tokyo, 1995, p. 291.
- (1995) Proc. of the 1995 Int. Symp. on Electrical Insulating Materials , pp. 291
- Khanin, S.D.¹

39
- 21844522516
- K. Shimizu, K. Kobayashi, G.E. Thompson, P. Skeldon, G.C. Wood, Philos. Mag. A 72 (1995) 1409.
- (1995) Philos. Mag. A , vol.72 , pp. 1409
- Shimizu, K.¹ Kobayashi, K.² Thompson, G.E.³ Skeldon, P.⁴ Wood, G.C.⁵

40
- 0031075794
- K. Shimizu, K. Kobayashi, G.E. Thompson, P. Skeldon, G.C. Wood, J. Electrochem. Soc. 144 (1997) 418.
- (1997) J. Electrochem. Soc. , vol.144 , pp. 418
- Shimizu, K.¹ Kobayashi, K.² Thompson, G.E.³ Skeldon, P.⁴ Wood, G.C.⁵

41
- 84918301837
- T.A. Jennings, W. McNeill, R.E. Salomon, J. Electrochem. Soc. 114 (1967) 1134.
- (1967) J. Electrochem. Soc. , vol.114 , pp. 1134
- Jennings, T.A.¹ McNeill, W.² Salomon, R.E.³

42
- 84914249760
- W.L. Lee, G. Olive, D.L. Pulfrey, L. Young, J. Electrochem. Soc. 117 (1970) 1172.
- (1970) J. Electrochem. Soc. , vol.117 , pp. 1172
- Lee, W.L.¹ Olive, G.² Pulfrey, D.L.³ Young, L.⁴

43
- 84975332304
- D. Husted, L. Gruss, T. Mackus, J. Electrochem. Soc. 118 (1971) 1989.
- (1971) J. Electrochem. Soc. , vol.118 , pp. 1989
- Husted, D.¹ Gruss, L.² Mackus, T.³

44
- 84975571908
- D.H. Hensler, J.D. Cuthbert, R.J. Martin, P.K. Tien, Appl. Opt. 10 (1971) 1037.
- (1971) Appl. Opt. , vol.10 , pp. 1037
- Hensler, D.H.¹ Cuthbert, J.D.² Martin, R.J.³ Tien, P.K.⁴

45
- 0040839218
- A. El Arabi, G. Sève, L. Lassabatere, Thin Solid Films 21 (1974) 11.
- (1974) Thin Solid Films , vol.21 , pp. 11
- El Arabi, A.¹ Sève, G.² Lassabatere, L.³

46
- 0040839220
- A.G. Revesz, J. Allison, T. Kirkendall, J. Reynolds, Thin Solid Films 23 (1974) 563.
- (1974) Thin Solid Films , vol.23 , pp. 563
- Revesz, A.G.¹ Allison, J.² Kirkendall, T.³ Reynolds, J.⁴

47
- 0016952914
- A.G. Revesz, J.F. Allison, IEEE Trans. Electron Devices ED-23 (1976) 527.
- (1976) IEEE Trans. Electron Devices , vol.ED-23 , pp. 527
- Revesz, A.G.¹ Allison, J.F.²

48
- 0039652888
- J. Hirvonen, A.G. Revesz, T.D. Kirkendall, Thin Solid Films 33 (1976) 315.
- (1976) Thin Solid Films , vol.33 , pp. 315
- Hirvonen, J.¹ Revesz, A.G.² Kirkendall, T.D.³

49
- 0019487983
- D.J. Smith, L. Young, IEEE Trans. Electron Devices ED-28 (1981) 22.
- (1981) IEEE Trans. Electron Devices , vol.ED-28 , pp. 22
- Smith, D.J.¹ Young, L.²

50
- 85033881760
- PhD Thesis, Université Pierre et Marie Curie, Paris VI, France
- F. Rochet, PhD Thesis, Université Pierre et Marie Curie, Paris VI, France, 1981.
- (1981)
- Rochet, F.¹

51
- 0026624261
- S.W. Park, H.B. Im, Thin Solid Films 207 (1992) 258.
- (1992) Thin Solid Films , vol.207 , pp. 258
- Park, S.W.¹ Im, H.B.²

52
- 0040839221
- Y.H. Hong, H.D. Park, C.B. Jun, D.D. Lee, B.R. Kim, J. Korean Inst. Telem. Electron. 29A (1992) 87.
- (1992) J. Korean Inst. Telem. Electron. , vol.29 A , pp. 87
- Hong, Y.H.¹ Park, H.D.² Jun, C.B.³ Lee, D.D.⁴ Kim, B.R.⁵

53
- 0028728394
- G. Eftekhari, Phys. Status Solidi A 146 (1994) 867.
- (1994) Phys. Status Solidi A , vol.146 , pp. 867
- Eftekhari, G.¹

54
- 84951336812
- F. Vratny, J. Electrochem. Soc. 114 (1967) 505.
- (1967) J. Electrochem. Soc. , vol.114 , pp. 505
- Vratny, F.¹

55
- 0015976948
- W.D. Westwood, R.J. Boynton, S.J. Ingrey, J. Vac. Sci. Technol. 11 (1974) 381.
- (1974) J. Vac. Sci. Technol. , vol.11 , pp. 381
- Westwood, W.D.¹ Boynton, R.J.² Ingrey, S.J.³

56
- 0016114949
- D.M. Hughes, M.W. Jones, J. Phys. D 7 (1974) 2081.
- (1974) J. Phys. D , vol.7 , pp. 2081
- Hughes, D.M.¹ Jones, M.W.²

57
- 0016592735
- E.E. Khawaja, S.G. Tomlin, Thin Solid Films 30 (1975) 361.
- (1975) Thin Solid Films , vol.30 , pp. 361
- Khawaja, E.E.¹ Tomlin, S.G.²

58
- 0017516747
- L.G. Meiners, R.P. Pan, J.R. Sites, J. Vac. Sci. Technol. 14 (1977) 961.
- (1977) J. Vac. Sci. Technol. , vol.14 , pp. 961
- Meiners, L.G.¹ Pan, R.P.² Sites, J.R.³

59
- 0018443063
- W.M. Paulson, F.S. Hickernell, R.L. Davis, J. Vac. Sci. Technol. 16 (1979) 307.
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 307
- Paulson, W.M.¹ Hickernell, F.S.² Davis, R.L.³

60
- 0001539014
- F. Rubio, J.M. Albella, J. Denis, J.M. Martinez-Duart, J. Vac. Sci. Technol. 21 (1982) 1043.
- (1982) J. Vac. Sci. Technol. , vol.21 , pp. 1043
- Rubio, F.¹ Albella, J.M.² Denis, J.³ Martinez-Duart, J.M.⁴

61
- 0020781253
- T.M. Reith, P.J. Ficarola, J. Vac. Sci. Technol. A 1 (1983) 1362.
- (1983) J. Vac. Sci. Technol. A , vol.1 , pp. 1362
- Reith, T.M.¹ Ficarola, P.J.²

62
- 0020830243
- S. Seki, T. Unagami, B. Tsujiyama, J. Vac. Sci. Technol. A 1 (1983) 1825.
- (1983) J. Vac. Sci. Technol. A , vol.1 , pp. 1825
- Seki, S.¹ Unagami, T.² Tsujiyama, B.³

63
- 0020934144
- S. Kimura, Y. Nishioka, A. Shintani, K. Mukai, J. Electrochem. Soc. 130 (1983) 2414.
- (1983) J. Electrochem. Soc. , vol.130 , pp. 2414
- Kimura, S.¹ Nishioka, Y.² Shintani, A.³ Mukai, K.⁴

64
- 0022414937
- S. Seki, T. Unagami, O. Kogure, J. Electrochem. Soc. 132 (1985) 3054.
- (1985) J. Electrochem. Soc. , vol.132 , pp. 3054
- Seki, S.¹ Unagami, T.² Kogure, O.³

65
- 84975598381
- H. Demiryont, J.R. Sites, K. Geib, Appl. Opt. 24 (1985) 490.
- (1985) Appl. Opt. , vol.24 , pp. 490
- Demiryont, H.¹ Sites, J.R.² Geib, K.³

66
- 0022752021
- S. Roberts, J. Ryan, L. Nesbit, J. Electrochem. Soc. 133 (1986) 1405.
- (1986) J. Electrochem. Soc. , vol.133 , pp. 1405
- Roberts, S.¹ Ryan, J.² Nesbit, L.³

67
- 84865248949
- S. Seki, T. Unagami, O. Kogure, B. Tsujiyama, J. Vac. Sci. Technol. A 5 (1987) 1771.
- (1987) J. Vac. Sci. Technol. A , vol.5 , pp. 1771
- Seki, S.¹ Unagami, T.² Kogure, O.³ Tsujiyama, B.⁴

68
- 0023293799
- Y. Nishioka, S. Kimura, H. Shinriki, K. Mukai, J. Electrochem. Soc. 134 (1987) 410.
- (1987) J. Electrochem. Soc. , vol.134 , pp. 410
- Nishioka, Y.¹ Kimura, S.² Shinriki, H.³ Mukai, K.⁴

69
- 0023312461
- U. Teravaninthorn, Y. Miyahara, T. Moriizumi, Jpn. J. Appl. Phys. 26 (1987) 347.
- (1987) Jpn. J. Appl. Phys. , vol.26 , pp. 347
- Teravaninthorn, U.¹ Miyahara, Y.² Moriizumi, T.³

70
- 0024090564
- T. Kato, T. Ito, J. Electrochem. Soc. 135 (1988) 2586.
- (1988) J. Electrochem. Soc. , vol.135 , pp. 2586
- Kato, T.¹ Ito, T.²

71
- 0024055654
- Y.K. Tu, C.C. Lin, W.S. Wang, S.L. Huang, Thin Solid Films 162 (1988) 325.
- (1988) Thin Solid Films , vol.162 , pp. 325
- Tu, Y.K.¹ Lin, C.C.² Wang, W.S.³ Huang, S.L.⁴

72
- 0012491919
- S. Banerjee, B. Shen, I. Chen, J. Bohlman, G. Brown, R. Doering, J. Appl. Phys. 65 (1989) 1140.
- (1989) J. Appl. Phys. , vol.65 , pp. 1140
- Banerjee, S.¹ Shen, B.² Chen, I.³ Bohlman, J.⁴ Brown, G.⁵ Doering, R.⁶

73
- 4243570132
- T. Saito, Y. Ushio, M. Yamada, T. Niwa, Solid State Ionics 40-41 (1990) 499.
- (1990) Solid State Ionics , vol.40-41 , pp. 499
- Saito, T.¹ Ushio, Y.² Yamada, M.³ Niwa, T.⁴

74
- 0026265072
- K. Nomura, H. Ogawa, J. Electrochem. Soc. 138 (1991) 3701.
- (1991) J. Electrochem. Soc. , vol.138 , pp. 3701
- Nomura, K.¹ Ogawa, H.²

75
- 0026820047
- Y. Kuo, J. Electrochem. Soc. 139 (1992) 579.
- (1992) J. Electrochem. Soc. , vol.139 , pp. 579
- Kuo, Y.¹

76
- 0000425531
- S. Oshio, M. Yamamoto, J. Kumata, T. Matsuoka, J. Appl. Phys. 71 (1992) 3471.
- (1992) J. Appl. Phys. , vol.71 , pp. 3471
- Oshio, S.¹ Yamamoto, M.² Kumata, J.³ Matsuoka, T.⁴

77
- 0027624767
- M.J. Duggan, T. Saito, T. Niwa, Solid State Ionics 62 (1993) 15.
- (1993) Solid State Ionics , vol.62 , pp. 15
- Duggan, M.J.¹ Saito, T.² Niwa, T.³

78
- 0039060689
- S.M. Edlou, A. Smajkiewicz, G.A. Al-Jumaily, Appl. Opt. 32 (1993) 5061.
- (1993) Appl. Opt. , vol.32 , pp. 5061
- Edlou, S.M.¹ Smajkiewicz, A.² Al-Jumaily, G.A.³

79
- 0012899350
- X.M. Wu, P.K. Wu, T.M. Lu, E.J. Rymaszewski, Appl. Phys. Lett. 62 (1993) 3264.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 3264
- Wu, X.M.¹ Wu, P.K.² Lu, T.M.³ Rymaszewski, E.J.⁴

80
- 0027883328
- Pocono Manor, CA, USA, October 17-20, 1993, IEEE, New York
- K. Miyairi, Proc. IEEE 1993 Annual Report. Conf. on Electrical Insulation and Dielectric Phenomena, Pocono Manor, CA, USA, October 17-20, 1993, IEEE, New York, 1993, p. 330.
- (1993) Proc. IEEE 1993 Annual Report. Conf. on Electrical Insulation and Dielectric Phenomena , pp. 330
- Miyairi, K.¹

81
- 0028485729
- X.M. Wu, S.R. Soss, E.J. Rymaszewski, T.M. Lu, Mater. Chem. Phys. 38 (1994) 297.
- (1994) Mater. Chem. Phys. , vol.38 , pp. 297
- Wu, X.M.¹ Soss, S.R.² Rymaszewski, E.J.³ Lu, T.M.⁴

82
- 0029544650
- Sinaia, Romania, October 11-14, 1995, IEEE, New York
- T. Dimitrova, E. Atanassova, Proc. of the 1995 Int. Semiconductor Conf., Sinaia, Romania, October 11-14, 1995, IEEE, New York, 1995, p. 279.
- (1995) Proc. of the 1995 Int. Semiconductor Conf. , pp. 279
- Dimitrova, T.¹ Atanassova, E.²

83
- 0029255985
- E. Atanassova, T. Dimitrova, J. Koprinarova, Appl. Surf. Sci. 84 (1995) 193.
- (1995) Appl. Surf. Sci. , vol.84 , pp. 193
- Atanassova, E.¹ Dimitrova, T.² Koprinarova, J.³

84
- 0001650208
- A. Pignolet, G. Mohan Rao, S.B. Krupanidhi, Thin Solid Films 258 (1995) 230.
- (1995) Thin Solid Films , vol.258 , pp. 230
- Pignolet, A.¹ Mohan Rao, G.² Krupanidhi, S.B.³

85
- 0001553223
- P.H. Chang, H.Y. Liu, Thin Solid Films 258 (1995) 56.
- (1995) Thin Solid Films , vol.258 , pp. 56
- Chang, P.H.¹ Liu, H.Y.²

86
- 0029358107
- E. Atanassova, T. Dimitrova, J. Koprinarova, Vacuum 46 (1995) 889.
- (1995) Vacuum , vol.46 , pp. 889
- Atanassova, E.¹ Dimitrova, T.² Koprinarova, J.³

87
- 0000498601
- M. Cevro, G. Carter, Opt. Eng. 34 (1995) 596.
- (1995) Opt. Eng. , vol.34 , pp. 596
- Cevro, M.¹ Carter, G.²

88
- 0039652886
- A.F. Chow, O. Auciello. D.B. Poker, A.I. Kingon, Integr. Ferroelectrics 11 (1995) 35.
- (1995) Integr. Ferroelectrics , vol.11 , pp. 35
- Chow, A.F.¹ Auciello, O.² Poker, D.B.³ Kingon, A.I.⁴

89
- 0030142692
- S. Shibata, Thin Solid Films 277 (1996) 1.
- (1996) Thin Solid Films , vol.277 , pp. 1
- Shibata, S.¹

90
- 0028760930
- Y. Nishimura, U. Hiroki, T. Ochiai, M. Tsuji, Appl. Surf. Sci. 79/80 (1994) 165.
- (1994) Appl. Surf. Sci. , vol.79-80 , pp. 165
- Nishimura, Y.¹ Hiroki, U.² Ochiai, T.³ Tsuji, M.⁴

91
- 0009695677
- Y. Nishimura, H. Ujita, M. Tsuji, Appl. Surf. Sci. 89 (1995) 393.
- (1995) Appl. Surf. Sci. , vol.89 , pp. 393
- Nishimura, Y.¹ Ujita, H.² Tsuji, M.³

92
- 0031069195
- N. Inoue, T. Ozaki, T. Monnaka, S. Kashiwabara, R. Fujimoto, Jpn. J. Appl. Phys. 36 (1997) 704.
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 704
- Inoue, N.¹ Ozaki, T.² Monnaka, T.³ Kashiwabara, S.⁴ Fujimoto, R.⁵

93
- 0031103686
- Z. Mingfei, F. Zhengwen, Y. Haijun, Z. Zhuangjian, Appl. Surf. Sci. 108 (1997) 399.
- (1997) Appl. Surf. Sci. , vol.108 , pp. 399
- Mingfei, Z.¹ Zhengwen, F.² Haijun, Y.³ Zhuangjian, Z.⁴

94
- 0040239348
- J.G. Hwu, M.J. Jeng, W.S. Wang, Y.K. Tu, J. Appl. Phys. 62 (1987) 4277.
- (1987) J. Appl. Phys. , vol.62 , pp. 4277
- Hwu, J.G.¹ Jeng, M.J.² Wang, W.S.³ Tu, Y.K.⁴

95
- 0000486862
- H.O. Sankur, W. Gunnnig, Appl. Opt. 28 (1989) 2806.
- (1989) Appl. Opt. , vol.28 , pp. 2806
- Sankur, H.O.¹ Gunnnig, W.²

96
- 0029359439
- F. Gitmans, Z. Sitar, P. Günter. Vacuum 46 (1995) 939.
- (1995) Vacuum , vol.46 , pp. 939
- Gitmans, F.¹ Sitar, Z.² Günter, P.³

97
- 0030217609
- J. Hudner, P.E. Hellberg, D. Kusche, H. Ohlsén, Thin Solid Films 281-282 (1996) 415.
- (1996) Thin Solid Films , vol.281-282 , pp. 415
- Hudner, J.¹ Hellberg, P.E.² Kusche, D.³ Ohlsén, H.⁴

98
- 85033874721
- in press
- J.V. Grahn, P.E. Hellberg, E. Olsson, J. Appl. Phys., (in press).
- J. Appl. Phys.
- Grahn, J.V.¹ Hellberg, P.E.² Olsson, E.³

99
- 0000955853
- M. Pessa, R. Mäkelä, T. Suntola, Appl. Phys. Lett. 38 (1981) 131.
- (1981) Appl. Phys. Lett. , vol.38 , pp. 131
- Pessa, M.¹ Mäkelä, R.² Suntola, T.³

100
- 0001457892
- H. Kattelus, M. Ylilammi, J. Saarrilahti, J. Antson, S. Lindfors, Thin Solid Films 225 (1993) 296.
- (1993) Thin Solid Films , vol.225 , pp. 296
- Kattelus, H.¹ Ylilammi, M.² Saarrilahti, J.³ Antson, J.⁴ Lindfors, S.⁵

101
- 0027803893
- H. Kattelus, M. Ylilammi, J. Salmi, T. Ranta-Aho, E. Nykänen, I. Suni, Mater. Res. Soc. Symp. Proc. 284 (1993) 511.
- (1993) Mater. Res. Soc. Symp. Proc. , vol.284 , pp. 511
- Kattelus, H.¹ Ylilammi, M.² Salmi, J.³ Ranta-Aho, T.⁴ Nykänen, E.⁵ Suni, I.⁶

102
- 0028547046
- J. Aarik, A. Aidla, K. Kukli, T. Uustare, J. Cryst. Growth 144 (1994) 116.
- (1994) J. Cryst. Growth , vol.144 , pp. 116
- Aarik, J.¹ Aidla, A.² Kukli, K.³ Uustare, T.⁴

103
- 0029310169
- K. Kukli, M. Ritala, M. Leskelä, J. Electrochem. Soc. 142 (1995) 1670.
- (1995) J. Electrochem. Soc. , vol.142 , pp. 1670
- Kukli, K.¹ Ritala, M.² Leskelä, M.³

104
- 0007218713
- H. Siimon, J. Aarik, J. Phys. IV 5 (1995) C5-277.
- (1995) J. Phys. IV , vol.5
- Siimon, H.¹ Aarik, J.²

105
- 0000097220
- K. Kukli, J. Aarik, A. Aidla, O. Kohan, T. Uustare, V. Sammelselg, Thin Solid Films 260 (1995) 135.
- (1995) Thin Solid Films , vol.260 , pp. 135
- Kukli, K.¹ Aarik, J.² Aidla, A.³ Kohan, O.⁴ Uustare, T.⁵ Sammelselg, V.⁶

106
- 0029346044
- M. Ylilammi, J. Electrochem. Soc. 142 (1995) 2474.
- (1995) J. Electrochem. Soc. , vol.142 , pp. 2474
- Ylilammi, M.¹

107
- 0348067304
- K. Kukli, J. Ihanus, M. Ritala, M. Leskela, Appl. Phys. Lett. 68 (1996) 3737.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 3737
- Kukli, K.¹ Ihanus, J.² Ritala, M.³ Leskela, M.⁴

108
- 0030380571
- J. Aarik, K. Kukli, A. Aidla, L. Pung, Appl. Surf. Sci. 103 (1996) 331.
- (1996) Appl. Surf. Sci. , vol.103 , pp. 331
- Aarik, J.¹ Kukli, K.² Aidla, A.³ Pung, L.⁴

109
- 0030737099
- K. Kukli, J. Ihanus, M. Ritala, M. Leskela, J. Electrochem. Soc. 144 (1997) 300.
- (1997) J. Electrochem. Soc. , vol.144 , pp. 300
- Kukli, K.¹ Ihanus, J.² Ritala, M.³ Leskela, M.⁴

110
- 0031546947
- K. Kukli, J. Aarik, A. Aidla, H. Siimon, M. Ritala, M. Leskelä, Appl. Surf. Sci. 112 (1997) 236.
- (1997) Appl. Surf. Sci. , vol.112 , pp. 236
- Kukli, K.¹ Aarik, J.² Aidla, A.³ Siimon, H.⁴ Ritala, M.⁵ Leskelä, M.⁶

111
- 0012757156
- J.J. McNally, G.A. Al-Jumaily, J.R. McNeil, J. Vac. Sci. Technol. A 4 (1986) 437.
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 437
- McNally, J.J.¹ Al-Jumaily, G.A.² McNeil, J.R.³

112
- 0028393345
- P.J. Martin, A. Bendavid, M. Swain, R.P. Netterfield, T.J. Kinder, W.G. Sainty, D. Drage, L. Wielunski, Thin Solid Films 239 (1994) 181.
- (1994) Thin Solid Films , vol.239 , pp. 181
- Martin, P.J.¹ Bendavid, A.² Swain, M.³ Netterfield, R.P.⁴ Kinder, T.J.⁵ Sainty, W.G.⁶ Drage, D.⁷ Wielunski, L.⁸

113
- 0030200333
- P.M. Natishan, E. McCafferty, P.R. Puckett, S. Michel, Corros. Sci. 38 (1996) 1043.
- (1996) Corros. Sci. , vol.38 , pp. 1043
- Natishan, P.M.¹ McCafferty, E.² Puckett, P.R.³ Michel, S.⁴

114
- 0002690703
- Q. Tang, S. Ogura, K. Kikuchi, N. Higashi, Rev. Laser Eng. 24 (1996) 110.
- (1996) Rev. Laser Eng. , vol.24 , pp. 110
- Tang, Q.¹ Ogura, S.² Kikuchi, K.³ Higashi, N.⁴

115
- 34548803499
- T.J. Rehg, J.A. Ochoa-Tapia, A. Knoesen, B.G. Higgins, Appl. Opt. 28 (1989) 5215.
- (1989) Appl. Opt. , vol.28 , pp. 5215
- Rehg, T.J.¹ Ochoa-Tapia, J.A.² Knoesen, A.³ Higgins, B.G.⁴

116
- 0039060638
- M.M. Blouke, M.D. Nelson, M. Serra, A. Knoesen, B.G. Higgins, W.A. Delamere, G. Womack, J.S. Flores, M. Duncan, R. Reed, Proc. SPIE 1656 (1992) 497.
- (1992) Proc. SPIe , vol.1656 , pp. 497
- Blouke, M.M.¹ Nelson, M.D.² Serra, M.³ Knoesen, A.⁴ Higgins, B.G.⁵ Delamere, W.A.⁶ Womack, G.⁷ Flores, J.S.⁸ Duncan, M.⁹ Reed, R.¹⁰

117
- 0027668259
- T. Oishi, T. Nakazawa, A. Katou, Electron. Com. Jpn. 76 (1993) 50.
- (1993) Electron. Com. Jpn. , vol.76 , pp. 50
- Oishi, T.¹ Nakazawa, T.² Katou, A.³

118
- 0027208533
- T. Ohishi, A. Katoh, Br. Ceram. Trans. 92 (1993) 79.
- (1993) Br. Ceram. Trans. , vol.92 , pp. 79
- Ohishi, T.¹ Katoh, A.²

119
- 0030713679
- N. Ozer, C.M. Lampert, J. Sol-Gel Sci. Technol. 8 (1997) 703.
- (1997) J. Sol-gel Sci. Technol. , vol.8 , pp. 703
- Ozer, N.¹ Lampert, C.M.²

120
- 0016126018
- T. Takahashi, H. Itoh, J. Less-Common Met. 38 (1972) 211.
- (1972) J. Less-common Met. , vol.38 , pp. 211
- Takahashi, T.¹ Itoh, H.²

121
- 0015650776
- W.H. Knausenberger, R.N. Tauber, J. Electrochem. Soc. 120 (1973) 927.
- (1973) J. Electrochem. Soc. , vol.120 , pp. 927
- Knausenberger, W.H.¹ Tauber, R.N.²

122
- 0017006618
- E. Kaplan, M. Balog, D. Frohman-Bentchkowsky, J. Electrochem. Soc. 123 (1976) 1570.
- (1976) J. Electrochem. Soc. , vol.123 , pp. 1570
- Kaplan, E.¹ Balog, M.² Frohman-Bentchkowsky, D.³

123
- 0025418031
- S. Zaima, T. Furuta, Y. Yasuda, M. Iida, J. Electrochem. Soc. 137 (1990) 1297.
- (1990) J. Electrochem. Soc. , vol.137 , pp. 1297
- Zaima, S.¹ Furuta, T.² Yasuda, Y.³ Iida, M.⁴

124
- 85033896771
- W. Eccleston, M. Urer (Eds.), Liverpool, England, April 2-5, 1991, Adam Hilger, Bristol
- E.P. Burte, N. Rausch, in: W. Eccleston, M. Urer (Eds.), Proc. of the 7th Biennal European Conf. on Insulating Films on Semiconductors, Liverpool, England, April 2-5, 1991, Adam Hilger, Bristol, 1991, p. 199.
- (1991) Proc. of the 7th Biennal European Conf. on Insulating Films on Semiconductors , pp. 199
- Burte, E.P.¹ Rausch, N.²

125
- 0026122756
- H. Shinriki, M. Nakata, IEEE Trans. Electron Devices ED-38 (1991) 455.
- (1991) IEEE Trans. Electron Devices , vol.ED-38 , pp. 455
- Shinriki, H.¹ Nakata, M.²

126
- 0000787482
- T. Tabuchi, Y. Sawado, K. Uematsu, S. Koshiba, Jpn. J. Appl. Phys. 30 (1991) L1974.
- (1991) Jpn. J. Appl. Phys. , vol.30
- Tabuchi, T.¹ Sawado, Y.² Uematsu, K.³ Koshiba, S.⁴

127
- 0026867932
- K. Tominaga, R. Muhammet, I. Kobayashi, M. Okada, Jpn. J. Appl. Phys. 31 (1992) L585.
- (1992) Jpn. J. Appl. Phys. , vol.31
- Tominaga, K.¹ Muhammet, R.² Kobayashi, I.³ Okada, M.⁴

128
- 36448999505
- G.Q. Lo, D.L. Kwong, S. Lee, Appl. Phys. Lett. 60 (1992) 3286.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 3286
- Lo, G.Q.¹ Kwong, D.L.² Lee, S.³

129
- 84984119555
- H. Treichel, A. Mitwalsky, N.P. Sandler, D. Tribula, W. Kern, A.P. Lane, Adv. Mater. Opt. Electron. 1 (1992) 299.
- (1992) Adv. Mater. Opt. Electron. , vol.1 , pp. 299
- Treichel, H.¹ Mitwalsky, A.² Sandler, N.P.³ Tribula, D.⁴ Kern, W.⁵ Lane, A.P.⁶

130
- 0027609883
- S. Kamiyama, P.Y. Lesaicherre, H. Suzuki, A. Sakai, I. Nishiyama, A. Ishitani, J. Electrochem. Soc. 140 (1993) 1617.
- (1993) J. Electrochem. Soc. , vol.140 , pp. 1617
- Kamiyama, S.¹ Lesaicherre, P.Y.² Suzuki, H.³ Sakai, A.⁴ Nishiyama, I.⁵ Ishitani, A.⁶

131
- 0027872792
- K.W. Kwon, C.S. Kang, T.S. Park, Y.B. Sun, N. Sandler, D. Tribula, Mater. Res. Soc. Symp. Proc. 284 (1993) 505.
- (1993) Mater. Res. Soc. Symp. Proc. , vol.284 , pp. 505
- Kwon, K.W.¹ Kang, C.S.² Park, T.S.³ Sun, Y.B.⁴ Sandler, N.⁵ Tribula, D.⁶

132
- 0028386001
- C.H. An, K. Sugimoto, J. Electrochem. Soc. 139 (1994) 853.
- (1994) J. Electrochem. Soc. , vol.139 , pp. 853
- An, C.H.¹ Sugimoto, K.²

133
- 3342940496
- S.C. Sun, T.F. Chen, IEDM Tech. Dig. (1994) 333.
- (1994) IEDM Tech. Dig. , pp. 333
- Sun, S.C.¹ Chen, T.F.²

134
- 0028397110
- S. Kamiyama, H. Suzuki, P.Y. Lesaicherre, A. Ishitani, IEICE Trans. Electron. E77-C (1994) 379.
- (1994) IEICE Trans. Electron. , vol.E77-C , pp. 379
- Kamiyama, S.¹ Suzuki, H.² Lesaicherre, P.Y.³ Ishitani, A.⁴

135
- 0030243348
- Y. Matsui, K. Torii, M. Hirayama, Y. Fujisaki, S. Iijima, Y. Ohji, IEEE Electron Device Lett. EDL-17 (1996) 431.
- (1996) IEEE Electron Device Lett. , vol.EDL-17 , pp. 431
- Matsui, Y.¹ Torii, K.² Hirayama, M.³ Fujisaki, Y.⁴ Iijima, S.⁵ Ohji, Y.⁶

136
- 0031553457
- J.H. Yun, S.W. Rhee, Thin Solid Films 292 (1997) 324.
- (1997) Thin Solid Films , vol.292 , pp. 324
- Yun, J.H.¹ Rhee, S.W.²

137
- 0030710728
- K.A. McKinley, N.P. Sandler, Mater. Res. Soc. Symp. Proc. 446 (1997) 299.
- (1997) Mater. Res. Soc. Symp. Proc. , vol.446 , pp. 299
- McKinley, K.A.¹ Sandler, N.P.²

138
- 85033882722
- in press
- C. Chaneliere, S. Four, J.L. Autran, R.A.B. Devine, N.P. Sandler, J. Appl. Phys., (in press).
- J. Appl. Phys.,
- Chaneliere, C.¹ Four, S.² Autran, J.L.³ Devine, R.A.B.⁴ Sandler, N.P.⁵

139
- 0026383790
- S.O. Kim, J.O. Byun, H.J. Kim, Thin Solid Films 206 (1991) 102.
- (1991) Thin Solid Films , vol.206 , pp. 102
- Kim, S.O.¹ Byun, J.O.² Kim, H.J.³

140
- 0026992461
- Tsukuba, Japan, August 26-28, 1992, Business Center for Academic Societies Japan, Tokyo
- H.S. Park, Y. K. Baek, J.C. Kim, S.H. Choi, K.H. Oh, Ext. Abs. of the 1992 Int. Conf. on Solid State Devices and Materials, Tsukuba, Japan, August 26-28, 1992, Business Center for Academic Societies Japan, Tokyo, 1992, p. 524.
- (1992) Ext. Abs. of the 1992 Int. Conf. on Solid State Devices and Materials , pp. 524
- Park, H.S.¹ Baek, Y.K.² Kim, J.C.³ Choi, S.H.⁴ Oh, K.H.⁵

141
- 0027201435
- P.A. Murawala, M. Sawai, T. Tatsuta, O. Tsuji, S. Fujita, S. Fujita, Jpn. J. Appl. Phys. 32 (1993) 368.
- (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 368
- Murawala, P.A.¹ Sawai, M.² Tatsuta, T.³ Tsuji, O.⁴ Fujita, S.⁵ Fujita, S.⁶

142
- 0000190653
- I. Kim, S.D. Ahn, B.W. Cho, S.T. Ahn, J.Y. Lee, J.S. Chun, W.J. Lee, Jpn. J. Appl. Phys. 33 (1994) 6691.
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 6691
- Kim, I.¹ Ahn, S.D.² Cho, B.W.³ Ahn, S.T.⁴ Lee, J.Y.⁵ Chun, J.S.⁶ Lee, W.J.⁷

143
- 0001585325
- D. Laviale, J.C. Oberlin, R.A.B. Devine, Appl. Phys. Lett. 65 (1994) 2021.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 2021
- Laviale, D.¹ Oberlin, J.C.² Devine, R.A.B.³

144
- 0028446456
- H.S. Moon, J.S. Lee, S.W. Han, J.W. Park, J.H. Lee, S.K. Yang, H.H. Park, J. Mater. Sci. 29 (1994) 3372.
- (1994) J. Mater. Sci. , vol.29 , pp. 3372
- Moon, H.S.¹ Lee, J.S.² Han, S.W.³ Park, J.W.⁴ Lee, J.H.⁵ Yang, S.K.⁶ Park, H.H.⁷

145
- 36449002199
- S.K. Jeon, S.W. Han, J.W. Park, J. Appl. Phys. 77 (1995) 5978.
- (1995) J. Appl. Phys. , vol.77 , pp. 5978
- Jeon, S.K.¹ Han, S.W.² Park, J.W.³

146
- 0029324493
- A. Nagahori, R. Raj, J. Am. Ceram. Soc. 78 (1995) 1585.
- (1995) J. Am. Ceram. Soc. , vol.78 , pp. 1585
- Nagahori, A.¹ Raj, R.²

147
- 0029403356
- I. Kim, J.S. Kim, B.W. Cho, S.D. Ahn, J.S. Chun, W.J. Lee, J. Mater. Res. 10 (1995) 2864.
- (1995) J. Mater. Res. , vol.10 , pp. 2864
- Kim, I.¹ Kim, J.S.² Cho, B.W.³ Ahn, S.D.⁴ Chun, J.S.⁵ Lee, W.J.⁶

148
- 0000102577
- R.A.B. Devine, L. Vallier, J.L. Autran, P. Paillet, J.L. Leray, Appl. Phys. Lett. 68 (1996) 1775.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1775
- Devine, R.A.B.¹ Vallier, L.² Autran, J.L.³ Paillet, P.⁴ Leray, J.L.⁵

149
- 0000291382
- R.A.B. Devine, Appl. Phys. Lett. 68 (1996) 1924.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1924
- Devine, R.A.B.¹

150
- 0040322495
- F.C. Chiu, J.J. Wang, J.Y. Lee, S.C. Wu, J. Appl. Phys. 81 (1997) 6911.
- (1997) J. Appl. Phys. , vol.81 , pp. 6911
- Chiu, F.C.¹ Wang, J.J.² Lee, J.Y.³ Wu, S.C.⁴

151
- 0022705093
- K. Yamagishi, Y. Tarui, Jpn. J. Appl. Phys. 25 (1986) L306.
- (1986) Jpn. J. Appl. Phys. , vol.25
- Yamagishi, K.¹ Tarui, Y.²

152
- 0026124837
- S. Tanimoto, M. Matsui, M. Aoyagi, K. Kamisako, K. Kuroiwa, Y. Tarui, Jpn. J. Appl. Phys. 30 (1991) L330.
- (1991) Jpn. J. Appl. Phys. , vol.30
- Tanimoto, S.¹ Matsui, M.² Aoyagi, M.³ Kamisako, K.⁴ Kuroiwa, K.⁵ Tarui, Y.⁶

153
- 0040839162
- Y. Imai, A. Watanabe, K. Osato, T. Kameyama, K. Fukuda, Chem. Lett. (1990) 177.
- (1990) Chem. Lett. , pp. 177
- Imai, Y.¹ Watanabe, A.² Osato, K.³ Kameyama, T.⁴ Fukuda, K.⁵

154
- 0027579081
- Y. Nishimura, K. Tokunaga, M. Tsuji, Thin Solid Films 226 (1993) 144.
- (1993) Thin Solid Films , vol.226 , pp. 144
- Nishimura, Y.¹ Tokunaga, K.² Tsuji, M.³

155
- 0027668410
- M. Mukaida, K. Osato, A. Watanabe, Y. Imai, T. Kameyama, K. Fukuda, Thin Solid Films 232 (1993) 180.
- (1993) Thin Solid Films , vol.232 , pp. 180
- Mukaida, M.¹ Osato, K.² Watanabe, A.³ Imai, Y.⁴ Kameyama, T.⁵ Fukuda, K.⁶

156
- 0027678187
- A. Watanabe, M. Mukaida, Y. Imai, K. Osato, T. Kameyama, K. Fukuda, J. Mater. Sci. 28 (1993) 5363.
- (1993) J. Mater. Sci. , vol.28 , pp. 5363
- Watanabe, A.¹ Mukaida, M.² Imai, Y.³ Osato, K.⁴ Kameyama, T.⁵ Fukuda, K.⁶

157
- 0029322957
- Y. Imai, A. Watanabe, M. Mukaida, K. Osato, T. Tsunoda, T. Kameyama, K. Fukuda, Thin Solid Films 261 (1995) 76.
- (1995) Thin Solid Films , vol.261 , pp. 76
- Imai, Y.¹ Watanabe, A.² Mukaida, M.³ Osato, K.⁴ Tsunoda, T.⁵ Kameyama, T.⁶ Fukuda, K.⁷

158
- 0001426056
- A. Watanabe, M. Mukaida, K. Osato, Y. Imai, T. Kameyama, K. Fukuda, J. Mater. Sci. 30 (1995) 4603.
- (1995) J. Mater. Sci. , vol.30 , pp. 4603
- Watanabe, A.¹ Mukaida, M.² Osato, K.³ Imai, Y.⁴ Kameyama, T.⁵ Fukuda, K.⁶

159
- 0030563101
- N. Inoue, S. Kashiwabara, S. Toshima, R. Fujimoto, Appl. Surf. Sci. 96-98 (1996) 656.
- (1996) Appl. Surf. Sci. , vol.96-98 , pp. 656
- Inoue, N.¹ Kashiwabara, S.² Toshima, S.³ Fujimoto, R.⁴

160
- 85033884802
- PhD Thesis, Institut National des Sciences Appliquées de Lyon, France
- B. Semmache, PhD Thesis, Institut National des Sciences Appliquées de Lyon, France, 1994.
- (1994)
- Semmache, B.¹

161
- 0017535897
- W. Kern, R.S. Rosler, J. Vac. Sci. Technol. 14 (1977) 1082.
- (1977) J. Vac. Sci. Technol. , vol.14 , pp. 1082
- Kern, W.¹ Rosler, R.S.²

162
- 0018480470
- A.C. Adams, C.D. Capio, J. Electrochem. Soc. 126 (1979) 1042.
- (1979) J. Electrochem. Soc. , vol.126 , pp. 1042
- Adams, A.C.¹ Capio, C.D.²

163
- 0028539311
- H. Koyama, S. Tanimoto, K. Kuroiwa, Y. Tarui, Jpn. J. Appl. Phys. 33 (1994) 6291.
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 6291
- Koyama, H.¹ Tanimoto, S.² Kuroiwa, K.³ Tarui, Y.⁴

164
- 0026872471
- S.B. Desu, Mater. Chem. Phys. 31 (1992) 341.
- (1992) Mater. Chem. Phys. , vol.31 , pp. 341
- Desu, S.B.¹

165
- 0029535875
- Y. Ohji, Y. Matsui, T. Itoga, M. Hirayama, Y. Sugarawa, K. Torii, H. Miki., M. Nakata, I. Asano, S. Iijima, Y. Kawamoto, IEDM Tech. Dig. (1995) 111.
- (1995) IEDM Tech. Dig. , pp. 111
- Ohji, Y.¹ Matsui, Y.² Itoga, T.³ Hirayama, M.⁴ Sugarawa, Y.⁵ Torii, K.⁶ Miki, H.⁷ Nakata, M.⁸ Asano, I.⁹ Iijima, S.¹⁰ Kawamoto, Y.¹¹

166
- 0030106125
- T. Aoyama, S. Saida, Y. Okayama, M. Fujisaki, K. Imai, T. Arikado, J. Electrochem. Soc. 143 (1996) 977.
- (1996) J. Electrochem. Soc. , vol.143 , pp. 977
- Aoyama, T.¹ Saida, S.² Okayama, Y.³ Fujisaki, M.⁴ Imai, K.⁵ Arikado, T.⁶

167
- 0001262783
- E.P. Burte, N. Rausch, J. Non-Crystal. Solids 187 (1995) 425.
- (1995) J. Non-crystal. Solids , vol.187 , pp. 425
- Burte, E.P.¹ Rausch, N.²

168
- 0028436585
- S. Kamiyama, H. Suzuki, H. Watanabe, A. Sakai, H. Kimura, J. Mizuki, J. Electrochem. Soc. 141 (1994) 1246.
- (1994) J. Electrochem. Soc. , vol.141 , pp. 1246
- Kamiyama, S.¹ Suzuki, H.² Watanabe, H.³ Sakai, A.⁴ Kimura, H.⁵ Mizuki, J.⁶

169
- 0024000206
- M. Matsui, S. Oka, K. Yamagishi, K. Kuroiwa, Y. Tarui, Jpn. J. Appl. Phys. 27 (1988) 506.
- (1988) Jpn. J. Appl. Phys. , vol.27 , pp. 506
- Matsui, M.¹ Oka, S.² Yamagishi, K.³ Kuroiwa, K.⁴ Tarui, Y.⁵

170
- 0027624729
- N. Rausch, E.P. Burte, Microelectron. J. 24 (1993) 421.
- (1993) Microelectron. J. , vol.24 , pp. 421
- Rausch, N.¹ Burte, E.P.²

171
- 0021422501
- G.S. Oehrlein, P.M. d'Heurle, A. Reisman, J. Appl. Phys. 55 (1985) 3715.
- (1985) J. Appl. Phys. , vol.55 , pp. 3715
- Oehrlein, G.S.¹ D'Heurle, P.M.² Reisman, A.³

172
- 0028732660
- S.O. Kim, H.J. Kim, Thin Solid Films 253 (1994) 435.
- (1994) Thin Solid Films , vol.253 , pp. 435
- Kim, S.O.¹ Kim, H.J.²

173
- 85033880615
- ASTM X-ray Powder Data Card, No. 25-0922
- ASTM X-ray Powder Data Card, No. 25-0922.

174
- 85033899919
- ASTM X-ray Powder Data Card, No. 18-1304
- ASTM X-ray Powder Data Card, No. 18-1304.

175
- 0027803892
- W.R. Hitchens, W.C. Krusell, D.M. Dobkin, Mater. Res. Soc. Symp. Proc. 284 (1993) 499.
- (1993) Mater. Res. Soc. Symp. Proc. , vol.284 , pp. 499
- Hitchens, W.R.¹ Krusell, W.C.² Dobkin, D.M.³

176
- 0008571321
- Chiba, Japan, August 29-September 1, 1993, Business Center for Academic Societies Japan, Tokyo
- S. Tanimoto, Y. Shichi, K. Kuroiwa, Y. Tarui, Ext. Abs. of the 1993 Int. Conf. on Solid State Devices and Materials, Chiba, Japan, August 29-September 1, 1993, Business Center for Academic Societies Japan, Tokyo, 1993, p. 859.
- (1993) Ext. Abs. of the 1993 Int. Conf. on Solid State Devices and Materials , pp. 859
- Tanimoto, S.¹ Shichi, Y.² Kuroiwa, K.³ Tarui, Y.⁴

177
- 0009351625
- W.S. Lau, K.K. Khaw, P.W. Qian, N.P. Sandler, P.K. Chu, J. Appl. Phys. 79 (1996) 8841.
- (1996) J. Appl. Phys. , vol.79 , pp. 8841
- Lau, W.S.¹ Khaw, K.K.² Qian, P.W.³ Sandler, N.P.⁴ Chu, P.K.⁵

178
- 0029378704
- R.J. Cava, W.F. Peck Jr., J.J. Krajewski, Nature 377 (1995) 215.
- (1995) Nature , vol.377 , pp. 215
- Cava, R.J.¹ Peck W.F., Jr.² Krajewski, J.J.³

179
- 0030215966
- R.J. Cava, J.J. Krajewski, W.F. Peck, G.L. Roberts, J. Appl. Phys. 80 (1996) 2346.
- (1996) J. Appl. Phys. , vol.80 , pp. 2346
- Cava, R.J.¹ Krajewski, J.J.² Peck, W.F.³ Roberts, G.L.⁴

180
- 0031102831
- R.J. Cava, W.F. Peck Jr., J.J. Krajewski, G.L. Roberts, B.P. Barber, H.M. O'Bryan, P.L. Gammel, Appl. Phys. Lett. 70 (1997) 1396.
- (1997) Appl. Phys. Lett. , vol.70 , pp. 1396
- Cava, R.J.¹ Peck W.F., Jr.² Krajewski, J.J.³ Roberts, G.L.⁴ Barber, B.P.⁵ O'Bryan, H.M.⁶ Gammel, P.L.⁷

181
- 0024719172
- K. Gürtler, K. Bange, W. Wagner, F. Rauch, H. Hantsche, Thin Solid Films 175 (1989) 185.
- (1989) Thin Solid Films , vol.175 , pp. 185
- Gürtler, K.¹ Bange, K.² Wagner, W.³ Rauch, F.⁴ Hantsche, H.⁵

182
- 0029390687
- J.L. Autran, P. Paillet, J.L. Leray, R.A.B. Devine, Sensors and Actuators A 51 (1995) 5.
- (1995) Sensors and Actuators A , vol.51 , pp. 5
- Autran, J.L.¹ Paillet, P.² Leray, J.L.³ Devine, R.A.B.⁴

183
- 0031150211
- R.A.B. Devine, C. Chaneliere, J.L. Autran, B. Balland, P. Paillet, J.L. Leray, Microelectron. Eng. 36 (1997) 61.
- (1997) Microelectron. Eng. , vol.36 , pp. 61
- Devine, R.A.B.¹ Chaneliere, C.² Autran, J.L.³ Balland, B.⁴ Paillet, P.⁵ Leray, J.L.⁶

184
- 0031236156
- J.L. Autran, R.A.B. Devine, C. Chaneliere, B. Balland, IEEE Electron Device Lett. EDL-18 (1997) 447.
- (1997) IEEE Electron Device Lett. , vol.EDL-18 , pp. 447
- Autran, J.L.¹ Devine, R.A.B.² Chaneliere, C.³ Balland, B.⁴

185
- 36549098208
- M. Pichot, A. Durandet, J. Pelletier, Y. Arnal, L. Vallier, Rev. Sci. Instrum. 59 (1988) 1072.
- (1988) Rev. Sci. Instrum. , vol.59 , pp. 1072
- Pichot, M.¹ Durandet, A.² Pelletier, J.³ Arnal, Y.⁴ Vallier, L.⁵

186
- 0024610463
- H. Shinriki, Y. Nishioka, Y. Ohji, K. Mukai, IEEE Trans. Electron Devices ED-36 (1989) 328.
- (1989) IEEE Trans. Electron Devices , vol.ED-36 , pp. 328
- Shinriki, H.¹ Nishioka, Y.² Ohji, Y.³ Mukai, K.⁴

187
- 0040244628
- Y.J. Song, J.W. Park, S.K. Joo, J. Korean Inst. Telem. Electron. 30A (1993) 44.
- (1993) J. Korean Inst. Telem. Electron. , vol.30 A , pp. 44
- Song, Y.J.¹ Park, J.W.² Joo, S.K.³

188
- 0039652828
- C. Hill, P. Ashburn (Eds.), Frontières, Gif-sur-Yvette
- S.C. Sun, T.F. Chen, in: C. Hill, P. Ashburn (Eds.), Proc. of the 24th European Solid State Device Research Conf., Frontières, Gif-sur-Yvette, 1994, p. 41.
- (1994) Proc. of the 24th European Solid State Device Research Conf. , pp. 41
- Sun, S.C.¹ Chen, T.F.²

189
- 0039060635
- J.S. Lee, C.M. Ryu, S.W. Kang, J.H. Lee, Y.H. Lee, J. Korean Inst. Telem. Electron. 32A (1995) 35.
- (1995) J. Korean Inst. Telem. Electron. , vol.32 A , pp. 35
- Lee, J.S.¹ Ryu, C.M.² Kang, S.W.³ Lee, J.H.⁴ Lee, Y.H.⁵

190
- 0039652831
- D.W. Kim, J.W. Lim, S.H. Eom, S.H. Sin, J.H. Choi, W.H. Lee, LH. Choi, Ungyong Mulli 9 (1996) 356.
- (1996) Ungyong Mulli , vol.9 , pp. 356
- Kim, D.W.¹ Lim, J.W.² Eom, S.H.³ Sin, S.H.⁴ Choi, J.H.⁵ Lee, W.H.⁶ Choi, L.H.⁷

191
- 0027678051
- S. Deleonibus, F. Martin, J. du Port de Pontcharra, S. Tedesco, J. Electrochem. Soc. 140 (1993) 2908.
- (1993) J. Electrochem. Soc. , vol.140 , pp. 2908
- Deleonibus, S.¹ Martin, F.² Du Port De Pontcharra, J.³ Tedesco, S.⁴

192
- 0000880380
- K. Ando, A. Ishitani, K. Hamano, Appl. Phys. Lett. 59 (1991) 1081.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 1081
- Ando, K.¹ Ishitani, A.² Hamano, K.³

193
- 0031094327
- B. Semmache, M. Lemiti, C. Chaneliere, C. Dubois, A. Sibai, B. Canut, A. Laugier, Thin Solid Films 296 (1997) 32.
- (1997) Thin Solid Films , vol.296 , pp. 32
- Semmache, B.¹ Lemiti, M.² Chaneliere, C.³ Dubois, C.⁴ Sibai, A.⁵ Canut, B.⁶ Laugier, A.⁷

194
- 0028464205
- F.H.P.M. Habraken, A.E.T. Kuiper, Mater. Sci. Eng. R 12 (1994) 123.
- (1994) Mater. Sci. Eng. R , vol.12 , pp. 123
- Habraken, F.H.P.M.¹ Kuiper, A.E.T.²

195
- 0026883406
- S.W. Park, Y.K. Baek, J.Y. Lee, C.O. Park, H.B. Im, J. Electron. Mater. 21 (1992) 635.
- (1992) J. Electron. Mater. , vol.21 , pp. 635
- Park, S.W.¹ Baek, Y.K.² Lee, J.Y.³ Park, C.O.⁴ Im, H.B.⁵

196
- 0026638496
- S. Tanimoto, M. Matsui, K. Kamisako, K. Kuroiwa, Y. Tarui, J. Electrochem. Soc. 139 (1992) 320.
- (1992) J. Electrochem. Soc. , vol.139 , pp. 320
- Tanimoto, S.¹ Matsui, M.² Kamisako, K.³ Kuroiwa, K.⁴ Tarui, Y.⁵

197
- 0028423997
- A. Muto, F. Yano, Y. Sugarawa, S. Iijima, Jpn. J. Appl. Phys. 33 (1994) 2699.
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 2699
- Muto, A.¹ Yano, F.² Sugarawa, Y.³ Iijima, S.⁴

198
- 0029387934
- I. Kim, J.S. Kim, O.S. Kwon, S.T. Ahn, J.S. Chun, W.J. Lee, J. Electron. Mater. 24 (1995) 1435.
- (1995) J. Electron. Mater. , vol.24 , pp. 1435
- Kim, I.¹ Kim, J.S.² Kwon, O.S.³ Ahn, S.T.⁴ Chun, J.S.⁵ Lee, W.J.⁶

199
- 0027663268
- W.R. Hitchens, W.C. Krusell, D.M. Dobkin, J. Electrochem. Soc. 140 (1993) 2615.
- (1993) J. Electrochem. Soc. , vol.140 , pp. 2615
- Hitchens, W.R.¹ Krusell, W.C.² Dobkin, D.M.³

200
- 0028752475
- H.K. Kang, K.H. Kim, Y.G. Shin, L.S. Park, K.M. Ko, C.G. Kim, K.Y. Oh, S.E. Kim, C.G. Hong, K.W. Kwon, J.Y. Yoo, Y.G. Kim, C.G. Lee, W.S. Paick, D.I. Suh, C.J. Park, S.I. Lee, S.T. Ahn, C.G. Hwang, M.Y. Lee, IEDM Tech. Dig. (1994) 635.
- (1994) IEDM Tech. Dig. , pp. 635
- Kang, H.K.¹ Kim, K.H.² Shin, Y.G.³ Park, L.S.⁴ Ko, K.M.⁵ Kim, C.G.⁶ Oh, K.Y.⁷ Kim, S.E.⁸ Hong, C.G.⁹ Kwon, K.W.¹⁰ Yoo, J.Y.¹¹ Kim, Y.G.¹² Lee, C.G.¹³ Paick, W.S.¹⁴ Suh, D.I.¹⁵ Park, C.J.¹⁶ Lee, S.I.¹⁷ Ahn, S.T.¹⁸ Hwang, C.G.¹⁹ Lee, M.Y.²⁰ more..

201
- 0029252481
- W.S. Lau, T.S. Tan, N.P. Sandler, B.S. Page, Jpn, J. Appl. Phys. 34 (1995) 757.
- (1995) Jpn, J. Appl. Phys. , vol.34 , pp. 757
- Lau, W.S.¹ Tan, T.S.² Sandler, N.P.³ Page, B.S.⁴

202
- 0030182463
- S.C. Sun, T.F. Chen, IEEE Electron Device Lett. EDL-17 (1996) 355.
- (1996) IEEE Electron Device Lett. , vol.EDL-17 , pp. 355
- Sun, S.C.¹ Chen, T.F.²

203
- 84984148205
- H. Treichel, A. Mitwalsky, G. Tempel, G. Zorn, D.A. Bohling, K.R. Coyle, B.S. Felker, M. George, W. Kern, A.P. Lane, N.P. Sandler, Adv. Mater. Opt. Electron. 5 (1995) 163.
- (1995) Adv. Mater. Opt. Electron. , vol.5 , pp. 163
- Treichel, H.¹ Mitwalsky, A.² Tempel, G.³ Zorn, G.⁴ Bohling, D.A.⁵ Coyle, K.R.⁶ Felker, B.S.⁷ George, M.⁸ Kern, W.⁹ Lane, A.P.¹⁰ Sandler, N.P.¹¹

204
- 0031165540
- S.C. Sun, T.F. Chen, IEEE Trans. Electron Devices ED-44 (1997) 1027.
- (1997) IEEE Trans. Electron Devices , vol.ED-44 , pp. 1027
- Sun, S.C.¹ Chen, T.F.²

205
- 0000508487
- C. Isobe, M. Saitoh, Appl. Phys. Lett. 56 (1990) 907.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 907
- Isobe, C.¹ Saitoh, M.²

206
- 0029490411
- H. Kimura, J. Mizuki, S. Kamiyama, H. Suzuki, Mater. Res. Soc. Symp. Proc. 354 (1995) 489.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.354 , pp. 489
- Kimura, H.¹ Mizuki, J.² Kamiyama, S.³ Suzuki, H.⁴

207
- 0030146519
- W.S. Lau, K.K. Khaw, P.W. Qian, N.P. Sandler, P.K. Chu, Jpn. J. Appl. Phys. 35 (1996) 2599.
- (1996) Jpn. J. Appl. Phys. , vol.35 , pp. 2599
- Lau, W.S.¹ Khaw, K.K.² Qian, P.W.³ Sandler, N.P.⁴ Chu, P.K.⁵

208
- 0030397789
- K.A. McKinley, N.P. Sandler, Thin Solid Films 290-291 (1996) 440.
- (1996) Thin Solid Films , vol.290-291 , pp. 440
- McKinley, K.A.¹ Sandler, N.P.²

209
- 85033873966
- Chicago, IL, USA, October 8-13, 1995, The Electrochemical Society, Pennington
- S.C. Sun, T.F. Chen, Ext. Abs. of the Electrochemical Society Fall Meeting, Chicago, IL, USA, October 8-13, 1995, The Electrochemical Society, Pennington, 1995, p. 870.
- (1995) Ext. Abs. of the Electrochemical Society Fall Meeting , pp. 870
- Sun, S.C.¹ Chen, T.F.²

210
- 0000787482
- T. Tabushi, Y. Sawado, K. Uematsu, S. Koshiba, Jpn. J. Appl. Phys. 30 (1991) L1974.
- (1991) Jpn. J. Appl. Phys. , vol.30
- Tabushi, T.¹ Sawado, Y.² Uematsu, K.³ Koshiba, S.⁴

211
- 0025548645
- Sendai, Japan, August 22-24, 1990, Business Center for Academic Societies Japan, Tokyo
- S. Tanimoto, M. Matsui, M. Aoyagi, K. Kamisako, K. Kuroiwa, Y. Tarui, Ext. Abs. of the 1990 Int. Conf. on Solid State Devices and Materials, Sendai, Japan, August 22-24, 1990, Business Center for Academic Societies Japan, Tokyo, 1990, p. 195.
- (1990) Ext. Abs. of the 1990 Int. Conf. on Solid State Devices and Materials , pp. 195
- Tanimoto, S.¹ Matsui, M.² Aoyagi, M.³ Kamisako, K.⁴ Kuroiwa, K.⁵ Tarui, Y.⁶

212
- 36449002425
- H. Kimura, J. Mizuki, S. Kamiyama, H. Suzuki, Appl. Phys. Lett. 66 (1995) 2209.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 2209
- Kimura, H.¹ Mizuki, J.² Kamiyama, S.³ Suzuki, H.⁴

213
- 0031070413
- W.S. Lau, P.W. Qian, N.P. Sandler, K.A. McKinley, P.K. Chu, Jpn. J. Appl. Phys. 36 (1997) 661.
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 661
- Lau, W.S.¹ Qian, P.W.² Sandler, N.P.³ McKinley, K.A.⁴ Chu, P.K.⁵

214
- 0016964450
- A.G. Revesz, J.H. Reynolds, J.F. Allison, J. Electrochem. Soc. 123 (1976) 889.
- (1976) J. Electrochem. Soc. , vol.123 , pp. 889
- Revesz, A.G.¹ Reynolds, J.H.² Allison, J.F.³

215
- 0040839148
- S. Lagergren, A. Magnéli, Acta Chem. Scand. 6 (1952) 444.
- (1952) Acta Chem. Scand. , vol.6 , pp. 444
- Lagergren, S.¹ Magnéli, A.²

216
- 0005184281
- F. Laves, W. Petter, Helv. Phys. Acta 12 (1964) 617.
- (1964) Helv. Phys. Acta , vol.12 , pp. 617
- Laves, F.¹ Petter, W.²

217
- 0003353469
- R. Moser, Schweiz. Mineral. Petrogr. Mitt. 45 (1965) 35.
- (1965) Schweiz. Mineral. Petrogr. Mitt. , vol.45 , pp. 35
- Moser, R.¹

218
- 0001535290
- N.C. Stephenson, R.S. Roth, Acta Crystallogr. Sect. B 27 (1971) 1037.
- (1971) Acta Crystallogr. Sect. B , vol.27 , pp. 1037
- Stephenson, N.C.¹ Roth, R.S.²

219
- 0000339470
- A. Fukumoto, K. Miwa, Phys. Rev. B 55 (1997) 11155.
- (1997) Phys. Rev. B , vol.55 , pp. 11155
- Fukumoto, A.¹ Miwa, K.²

220
- 0026897623
- C.H. An, K. Sugimoto, J. Electrochem. Soc. 139 (1992) 1956.
- (1992) J. Electrochem. Soc. , vol.139 , pp. 1956
- An, C.H.¹ Sugimoto, K.²

221
- 0017534649
- W.A. Pliskin, J. Vac. Sci. Technol. 14 (1977) 1064.
- (1977) J. Vac. Sci. Technol. , vol.14 , pp. 1064
- Pliskin, W.A.¹

222
- 0018916109
- C.E. Morosanu, Thin Solid Films 65 (1980) 171.
- (1980) Thin Solid Films , vol.65 , pp. 171
- Morosanu, C.E.¹

223
- 0040556689
- P.A. Beck, S.M. Taylor, J.P. McVittie, S.T. Ahn, Mater. Res. Soc. Symp. Proc. 182 (1990) 207.
- (1990) Mater. Res. Soc. Symp. Proc. , vol.182 , pp. 207
- Beck, P.A.¹ Taylor, S.M.² McVittie, J.P.³ Ahn, S.T.⁴

224
- 84975402280
- S. Seki, T. Unagami, B. Tsujiyama, J. Electrochem. Soc. 130 (1983) 2505.
- (1983) J. Electrochem. Soc. , vol.130 , pp. 2505
- Seki, S.¹ Unagami, T.² Tsujiyama, B.³

225
- 0029233829
- Austin, TX, USA, May 16-17, 1995, IEEE, New York
- F.X. Jian, S.K. Kurinec, Proc. of the 11th Biennal University/Government/Industry Microelectonics Symp., Austin, TX, USA, May 16-17, 1995, IEEE, New York, 1995, p. 101.
- (1995) Proc. of the 11th Biennal University/Government/Industry Microelectonics Symp. , pp. 101
- Jian, F.X.¹ Kurinec, S.K.²

226
- 0004838740
- S.O. Kim, H.J. Kim, J. Vac. Sci. Technol. B 12 (1994) 3006.
- (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 3006
- Kim, S.O.¹ Kim, H.J.²

227
- 0000339559
- A.S. Grove, B.E. Deal, E.H. Snow, G.T. Sah, Solid-State Electron. 8 (1965) 145.
- (1965) Solid-state Electron. , vol.8 , pp. 145
- Grove, A.S.¹ Deal, B.E.² Snow, E.H.³ Sah, G.T.⁴

228
- 0003610719
- Wiley, New York
- E.H. Nicollian, J.R. Brews, MOS (Metal Oxide Semiconductor) Physics and Technology, Wiley, New York, 1982.
- (1982) MOS (Metal Oxide Semiconductor) Physics and Technology
- Nicollian, E.H.¹ Brews, J.R.²

229
- 40749115744
- G. Barbottin, A. Vapaille (Eds.), Elsevier, Amsterdam
- G. Barbottin, J.J. Simonne, A. Vapaille, Instabilities in Silicon Devices: Silicon Passivation and Related Instabilities, in: G. Barbottin, A. Vapaille (Eds.), Elsevier, Amsterdam, Vol. 1, 1986, p. 215.
- (1986) Instabilities in Silicon Devices: Silicon Passivation and Related Instabilities , vol.1 , pp. 215
- Barbottin, G.¹ Simonne, J.J.² Vapaille, A.³

230
- 0003514835
- G. Barbottin, A. Vapaille (Eds.), Elsevier, Amsterdam
- E. Klausmann, W.R. Fahrner, D. Bräunig, Instabilities in Silicon Devices: Silicon Passivation and Related Instabilities, in: G. Barbottin, A. Vapaille (Eds.), Elsevier, Amsterdam, Vol. 2, 1989, p. 171.
- (1989) Instabilities in Silicon Devices: Silicon Passivation and Related Instabilities , vol.2 , pp. 171
- Klausmann, E.¹ Fahrner, W.R.² Bräunig, D.³

231
- 0003514835
- G. Barbottin, A. Vapaille (Eds.), Elsevier, Amsterdam
- E. Klausmann, W.R. Fahrner, D. Bräunig, Instabilities in Silicon Devices: Silicon Passivation and Related Instabilities, in: G. Barbottin, A. Vapaille (Eds.), Elsevier, Amsterdam, Vol. 2, 1989, p. 249.
- (1989) Instabilities in Silicon Devices: Silicon Passivation and Related Instabilities , vol.2 , pp. 249
- Klausmann, E.¹ Fahrner, W.R.² Bräunig, D.³

232
- 85033885712
- PhD Thesis, Institut National des Sciences Appliquées de Lyon, France
- F. Seigneur, PhD Thesis, Institut National des Sciences Appliquées de Lyon, France, 1995.
- (1995)
- Seigneur, F.¹

233
- 0004005306
- Wiley, New York
- S.M. Sze, Physics of Semiconductor Devices, Wiley, New York, 1969.
- (1969) Physics of Semiconductor Devices
- Sze, S.M.¹

234
- 0012537372
- G. Barbottin, A. Vapaille (Eds.), Elsevier, Amsterdam
- P. Hesto, Instabilities in Silicon Devices: Silicon Passivation and Related Instabilities, in: G. Barbottin, A. Vapaille (Eds.), Elsevier, Amsterdam, Vol. 1, 1986, p. 263.
- (1986) Instabilities in Silicon Devices: Silicon Passivation and Related Instabilities , vol.1 , pp. 263
- Hesto, P.¹

235
- 0023828387
- G.S. Oehrlein, Thin Solid Films 156 (1988) 207.
- (1988) Thin Solid Films , vol.156 , pp. 207
- Oehrlein, G.S.¹

236
- 0025502620
- J.G. Hwu, S.T. Lin, IEE Proc. 137G (1990) 390.
- (1990) IEE Proc. , vol.137 G , pp. 390
- Hwu, J.G.¹ Lin, S.T.²

237
- 36549100079
- Y. Nakagawa, T. Okada, J. Appl. Phys. 68 (1990) 556.
- (1990) J. Appl. Phys. , vol.68 , pp. 556
- Nakagawa, Y.¹ Okada, T.²

238
- 0025486032
- S. Zaima, T. Furuta, Y. Koide, Y. Yasuda, M. Iida, J. Electrochem. Soc. 137 (1990) 2876.
- (1990) J. Electrochem. Soc. , vol.137 , pp. 2876
- Zaima, S.¹ Furuta, T.² Koide, Y.³ Yasuda, Y.⁴ Iida, M.⁵

239
- 0039060627
- Hamamatsu, Japan, September 16-19, 1997, Business Center for Academic Societies Japan, Tokyo
- K. Kishiro, N. Inoue, S.C. Chen, M. Yoshimani, Ext. Abs. of the 1997 Int. Conf. on Solid State Devices and Materials, Hamamatsu, Japan, September 16-19, 1997, Business Center for Academic Societies Japan, Tokyo, 1997, p. 36.
- (1997) Ext. Abs. of the 1997 Int. Conf. on Solid State Devices and Materials , pp. 36
- Kishiro, K.¹ Inoue, N.² Chen, S.C.³ Yoshimani, M.⁴

240
- 4243406729
- V.A. Laléko, N.Y. Ershova, I.I. Dragan, Sov. Phys. Solid State 34 (1992) 1132.
- (1992) Sov. Phys. Solid State , vol.34 , pp. 1132
- Laléko, V.A.¹ Ershova, N.Y.² Dragan, I.I.³

241
- 21344483063
- V.A. Laléko, I.I. Dragan, N.Y. Ershova, Phys. Solid State 36 (1994) 657.
- (1994) Phys. Solid State , vol.36 , pp. 657
- Laléko, V.A.¹ Dragan, I.I.² Ershova, N.Y.³

242
- 25044467968
- V.A. Laléko, I.I. Dragan, N.Y. Ershova, Phys. Status Solidi A 141 (1994) K11.
- (1994) Phys. Status Solidi A , vol.141
- Laléko, V.A.¹ Dragan, I.I.² Ershova, N.Y.³

243
- 0014536251
- N. Klein, J. Electrochem. Soc. 116 (1969) 963.
- (1969) J. Electrochem. Soc. , vol.116 , pp. 963
- Klein, N.¹

244
- 0039060631
- D.V. Kostrov, R.A. Mirzoev, Elektrokhimiya 23 (1987) 595.
- (1987) Elektrokhimiya , vol.23 , pp. 595
- Kostrov, D.V.¹ Mirzoev, R.A.²

245
- 0039652815
- R.A. Mirzoev, Elektrokhimiya 23 (1987) 676.
- (1987) Elektrokhimiya , vol.23 , pp. 676
- Mirzoev, R.A.¹

246
- 0016036630
- G. Sève, L. Lassabatere, Thin Solid Films 21 (1974) 19.
- (1974) Thin Solid Films , vol.21 , pp. 19
- Sève, G.¹ Lassabatere, L.²

247
- 0031192459
- W.S. Lau, L. Zhong, A. Lee, C.H. See, T. Han, N.P. Sandler, T.C. Chong, Appl. Phys. Lett. 71 (1997) 500.
- (1997) Appl. Phys. Lett. , vol.71 , pp. 500
- Lau, W.S.¹ Zhong, L.² Lee, A.³ See, C.H.⁴ Han, T.⁵ Sandler, N.P.⁶ Chong, T.C.⁷

248
- 0000357644
- Y. Nakagawa, Y. Gomi, T. Okada, J. Appl. Phys. 61 (1987) 5012.
- (1987) J. Appl. Phys. , vol.61 , pp. 5012
- Nakagawa, Y.¹ Gomi, Y.² Okada, T.³

249
- 36849101960
- J.R. Yeargan, H.L. Taylor, J. Appl. Phys. 39 (1968) 5600.
- (1968) J. Appl. Phys. , vol.39 , pp. 5600
- Yeargan, J.R.¹ Taylor, H.L.²

250
- 36849100785
- W.E. Flannery, S.R. Pollack, J. Appl. Phys. 37 (1966) 4417.
- (1966) J. Appl. Phys. , vol.37 , pp. 4417
- Flannery, W.E.¹ Pollack, S.R.²

251
- 0141817672
- J.G. Simmons, Phys. Rev. 155 (1967) 657.
- (1967) Phys. Rev. , vol.155 , pp. 657
- Simmons, J.G.¹

252
- 33744773415
- P. Mark, T.E. Hartman, J. Appl. Phys. 39 (1968) 2163.
- (1968) J. Appl. Phys. , vol.39 , pp. 2163
- Mark, P.¹ Hartman, T.E.²

253
- 0016891468
- P.L. Young, J. Appl. Phys. 47 (1976) 235.
- (1976) J. Appl. Phys. , vol.47 , pp. 235
- Young, P.L.¹

254
- 0016891469
- P.L. Young, J. Appl. Phys. 47 (1976) 242.
- (1976) J. Appl. Phys. , vol.47 , pp. 242
- Young, P.L.¹

255
- 0018035054
- R.L. Angle, H.E. Talley, IEEE Trans. Electron Devices ED-25 (1978) 1277.
- (1978) IEEE Trans. Electron Devices , vol.ED-25 , pp. 1277
- Angle, R.L.¹ Talley, H.E.²

256
- 0018922661
- H. Matsumoto, A. Suzuki, T. Yabumoto, Jpn. J. Appl. Phys. 19 (1980) 71.
- (1980) Jpn. J. Appl. Phys. , vol.19 , pp. 71
- Matsumoto, H.¹ Suzuki, A.² Yabumoto, T.³

257
- 0019015579
- V.V. Bryskin, M.N. D'yakonov, S.D. Khanin, Sov. Phys. Solid State 22 (1980) 818.
- (1980) Sov. Phys. Solid State , vol.22 , pp. 818
- Bryskin, V.V.¹ D'yakonov, M.N.² Khanin, S.D.³

258
- 84936892774
- V.V. Bryskin, A.V. Goltsev, S.D. Khanin, A.V. Novotelnova, A.N. Vasilev, Phys. Status Solidi B 161 (1990) 777.
- (1990) Phys. Status Solidi B , vol.161 , pp. 777
- Bryskin, V.V.¹ Goltsev, A.V.² Khanin, S.D.³ Novotelnova, A.V.⁴ Vasilev, A.N.⁵

259
- 0026191513
- V.V. Bryskin, A.V. Goltsev, S.D. Khanin, Philos. Mag. B 64 (1991) 91.
- (1991) Philos. Mag. B , vol.64 , pp. 91
- Bryskin, V.V.¹ Goltsev, A.V.² Khanin, S.D.³

260
- 21344481582
- V.V. Bryskin, S.D. Khanin, Phys. Solid State 35 (1993) 1126.
- (1993) Phys. Solid State , vol.35 , pp. 1126
- Bryskin, V.V.¹ Khanin, S.D.²

261
- 0040839139
- J. Lewiner, D. Morisseau, C. Alquie (Eds.), IEEE, New York
- S.D. Khanin, in: J. Lewiner, D. Morisseau, C. Alquie (Eds.), Proc. of the 8th Int. Symp. on Electrets, IEEE, New York, 1994, p. 423.
- (1994) Proc. of the 8th Int. Symp. on Electrets , pp. 423
- Khanin, S.D.¹

262
- 0030415621
- X. Zhongfu, Z. Hongyan (Eds.), IEEE, New York
- S.D. Khanin, in: X. Zhongfu, Z. Hongyan (Eds.), Proc. of the 9th Int. Symp. on Electrets, IEEE, New York, 1996, p. 93.
- (1996) Proc. of the 9th Int. Symp. on Electrets , pp. 93
- Khanin, S.D.¹

263
- 0028529052
- N. Rausch, E.P. Burte, Microelectron. J. 25 (1994) 533.
- (1994) Microelectron. J. , vol.25 , pp. 533
- Rausch, N.¹ Burte, E.P.²

264
- 0021817707
- S. Seki, T. Unagami, B. Tsujiyama, J. Electrochem. Soc. 132 (1985) 199.
- (1985) J. Electrochem. Soc. , vol.132 , pp. 199
- Seki, S.¹ Unagami, T.² Tsujiyama, B.³

265
- 0024106111
- J.G. Hwu, M.J. Jeng, J. Electrochem. Soc. 135 (1988) 2808.
- (1988) J. Electrochem. Soc. , vol.135 , pp. 2808
- Hwu, J.G.¹ Jeng, M.J.²

266
- 0039060626
- P. Trocellier, Nucl. Instrum. Meth. Phys. Res. B 104 (1995) 571.
- (1995) Nucl. Instrum. Meth. Phys. Res. B , vol.104 , pp. 571
- Trocellier, P.¹

267
- 0016551805
- S.J. Ingrey, W.D. Westwood, Y.C. Cheng, J. Wei, Appl. Opt. 14 (1975) 2194.
- (1975) Appl. Opt. , vol.14 , pp. 2194
- Ingrey, S.J.¹ Westwood, W.D.² Cheng, Y.C.³ Wei, J.⁴

268
- 0017543111
- V.I. Anikin, L.N. Deryugin, A.N. Polovinkin, V.E. Sotin, Sov. Phys. Tech. Phys. 22 (1977) 1256.
- (1977) Sov. Phys. Tech. Phys. , vol.22 , pp. 1256
- Anikin, V.I.¹ Deryugin, L.N.² Polovinkin, A.N.³ Sotin, V.E.⁴

269
- 0346674912
- H. Terui, M. Kobayashi, Appl. Phys. Lett. 32 (1978) 666.
- (1978) Appl. Phys. Lett. , vol.32 , pp. 666
- Terui, H.¹ Kobayashi, M.²

270
- 0028546687
- T. Doumuki, Appl. Phys. Lett. 65 (1994) 2519.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 2519
- Doumuki, T.¹

271
- 0029406005
- A.K. Chu, C.J. Lin, W.H. Cheng, Mater. Chem. Phys. 42 (1995) 214.
- (1995) Mater. Chem. Phys. , vol.42 , pp. 214
- Chu, A.K.¹ Lin, C.J.² Cheng, W.H.³

272
- 85033882306
- E.M. Middlesworth, H. Massoud (Eds.), The Electrochemical Society, Pennington, Proc.
- H. Suzuki, S. Kamiyama, M. Sakao, Y. Takaishi, I. Yamamoto, H. Ono, ULSI Science and Technology/1995, in: E.M. Middlesworth, H. Massoud (Eds.), The Electrochemical Society, Pennington, 1995, Proc. Vol. 95-5, p. 80.
- (1995) ULSI Science and Technology/1995 , vol.95 , Issue.5 , pp. 80
- Suzuki, H.¹ Kamiyama, S.² Sakao, M.³ Takaishi, Y.⁴ Yamamoto, I.⁵ Ono, H.⁶

273
- 85033900210
- Japan annual reviews in electronics
- J. Nishizawa (Ed.), Ohmsha, Tokyo, and North-Holland, Amsterdam
- K. Ohta, Japan Annual Reviews in Electronics, in: J. Nishizawa (Ed.), Computers and Telecommunications: Semiconductor Technologies, Ohmsha, Tokyo, and North-Holland, Amsterdam, 1982, p. 280.
- (1982) Computers and Telecommunications: Semiconductor Technologies , pp. 280
- Ohta, K.¹

274
- 0020101518
- K. Ohta, K. Yamada, K. Shimizu, Y. Tarui, IEEE Trans. Electron Devices 29 (1982) 368.
- (1982) IEEE Trans. Electron Devices , vol.29 , pp. 368
- Ohta, K.¹ Yamada, K.² Shimizu, K.³ Tarui, Y.⁴

275
- 0026103850
- T. Kaga, T. Kure, H. Shinriki, Y. Kawamoto, F. Murai, T. Nishida, Y. Nakagome, D. Hisamoto, T. Kisu, E. Takade, K. Itoh, IEEE Trans. Electron Devices ED-38 (1991) 255.
- (1991) IEEE Trans. Electron Devices , vol.ED-38 , pp. 255
- Kaga, T.¹ Kure, T.² Shinriki, H.³ Kawamoto, Y.⁴ Murai, F.⁵ Nishida, T.⁶ Nakagome, Y.⁷ Hisamoto, D.⁸ Kisu, T.⁹ Takade, E.¹⁰ Itoh, K.¹¹

276
- 0028424837
- M. Ino, N. Inoue, M. Yoshimaru, IEEE Trans. Electron. Devices ED-41 (1994) 703.
- (1994) IEEE Trans. Electron. Devices , vol.ED-41 , pp. 703
- Ino, M.¹ Inoue, N.² Yoshimaru, M.³

277
- 0005588197
- T. Kaga, M. Ohkura, F. Murai, N. Yokoyama, E. Takeda, J. Vac. Sci. Technol. B 13 (1995) 2329.
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 2329
- Kaga, T.¹ Ohkura, M.² Murai, F.³ Yokoyama, N.⁴ Takeda, E.⁵

278
- 0030170226
- K.W. Kwon, C.S. Kang, S.O. Park, H.K. Kang, S.T. Ahn, IEEE Trans. Electron Devices ED-43 (1996) 919.
- (1996) IEEE Trans. Electron Devices , vol.ED-43 , pp. 919
- Kwon, K.W.¹ Kang, C.S.² Park, S.O.³ Kang, H.K.⁴ Ahn, S.T.⁵

279
- 85033903510
- New Orleans, LO, USA, October 10-15, 1993, The Electrochemical Society, Pennington
- P.C. Fazan, V.K. Mathews, G.S. Sandhu, N.P. Sandler, Ext. Abs. of the Electrochemical Society Fall Meeting, New Orleans, LO, USA, October 10-15, 1993, The Electrochemical Society, Pennington, 1993, p. 251.
- (1993) Ext. Abs. of the Electrochemical Society Fall Meeting , pp. 251
- Fazan, P.C.¹ Mathews, V.K.² Sandhu, G.S.³ Sandler, N.P.⁴

280
- 0028744681
- K.W. Kwon, I.S. Park, D.H. Han, E.S. Kim, S.T. Ahn, M.Y. Lee, IEDM Tech. Dig. (1994) 835.
- (1994) IEDM Tech. Dig. , pp. 835
- Kwon, K.W.¹ Park, I.S.² Han, D.H.³ Kim, E.S.⁴ Ahn, S.T.⁵ Lee, M.Y.⁶

281
- 0005020443
- D.E. Kotecki, Semicon. Int. 19 (1996) 109.
- (1996) Semicon. Int. , vol.19 , pp. 109
- Kotecki, D.E.¹

282
- 0031139365
- K. Itoh, Y. Nakagome, S. Kimura, T. Watanabe, IEEE J. Solid-State Circuits SSC-32 (1997) 624.
- (1997) IEEE J. Solid-state Circuits , vol.SSC-32 , pp. 624
- Itoh, K.¹ Nakagome, Y.² Kimura, S.³ Watanabe, T.⁴

283
- 0028735530
- Y. Takaishi, M. Sakao, S. Kamiyama, H. Suzuki, H. Watanabe, IEDM Tech. Dig. (1994) 839.
- (1994) IEDM Tech. Dig. , pp. 839
- Takaishi, Y.¹ Sakao, M.² Kamiyama, S.³ Suzuki, H.⁴ Watanabe, H.⁵

284
- 0027848475
- S. Kamiyama, H. Suzuki, H. Watanabe, A. Sakai, M. Oshida, T. Tatsumi, T. Tanigawa, N. Kasai, A. Ishitani, IEDM Tech. Dig. (1993) 49.
- (1993) IEDM Tech. Dig. , pp. 49
- Kamiyama, S.¹ Suzuki, H.² Watanabe, H.³ Sakai, A.⁴ Oshida, M.⁵ Tatsumi, T.⁶ Tanigawa, T.⁷ Kasai, N.⁸ Ishitani, A.⁹

285
- 0027839369
- K.W. Kwon, S.O. Park, C.S. Kang, Y.N. Kim, S.T. Ahn, M.Y. Lee, IEDM Tech. Dig. (1993) 53.
- (1993) IEDM Tech. Dig. , pp. 53
- Kwon, K.W.¹ Park, S.O.² Kang, C.S.³ Kim, Y.N.⁴ Ahn, S.T.⁵ Lee, M.Y.⁶

286
- 0040244593
- H. Matsuhashi, S. Nishikawa, Oki Tech. Rev. 60 (1994) 65.
- (1994) Oki Tech. Rev. , vol.60 , pp. 65
- Matsuhashi, H.¹ Nishikawa, S.²

287
- 0040839136
- K. Ishibashi, B.K. Patnaik, N.R. Parikh, G.S. Sandhu, P.C. Fazan, J. Vac. Sci. Technol. B 12 (1994) 2822.
- (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 2822
- Ishibashi, K.¹ Patnaik, B.K.² Parikh, N.R.³ Sandhu, G.S.⁴ Fazan, P.C.⁵

288
- 0028403985
- H. Matsuhashi, S. Nishikawa, Jpn. J. Appl. Phys. 33 (1994) 1293.
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 1293
- Matsuhashi, H.¹ Nishikawa, S.²

289
- 0039652803
- J.W. Park, S.R. Jeon, J.S. Lee, J.Y. Lee, Mater. Res. Soc. Symp. Proc. 357 (1995) 204.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.357 , pp. 204
- Park, J.W.¹ Jeon, S.R.² Lee, J.S.³ Lee, J.Y.⁴

290
- 0030170237
- I. Kim, J.S. Chun, W.J. Lee, Mater. Chem. Phys. 44 (1996) 288.
- (1996) Mater. Chem. Phys. , vol.44 , pp. 288
- Kim, I.¹ Chun, J.S.² Lee, W.J.³

291
- 0040839130
- June 18-20
- K.A. McKinley, N.P. Sandler, Proc. VMIC Conf., June 18-20, 1996, p. 128.
- (1996) Proc. VMIC Conf. , pp. 128
- McKinley, K.A.¹ Sandler, N.P.²

292
- 0030421407
- M.B. Lee, H.D. Lee, B.L. Park, U.I. Chung, Y.B. Koh, M.Y. Lee, IEDM Tech. Dig. (1996) 683.
- (1996) IEDM Tech. Dig. , pp. 683
- Lee, M.B.¹ Lee, H.D.² Park, B.L.³ Chung, U.I.⁴ Koh, Y.B.⁵ Lee, M.Y.⁶

293
- 0031150215
- J. Gautier, Microelectron. Eng. 36 (1997) 3.
- (1997) Microelectron. Eng. , vol.36 , pp. 3
- Gautier, J.¹

294
- 0000124733
- B. Maiti, M.Y. Hao, I. Lee, J.C. Lee, Appl. Phys. Lett. 61 (1992) 1790.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 1790
- Maiti, B.¹ Hao, M.Y.² Lee, I.³ Lee, J.C.⁴

295
- 0029324126
- L.K. Han, M. Bhat, D. Wristers, H.H. Wang, D.L. Kwong, Microelectron. Eng. 28 (1995) 89.
- (1995) Microelectron. Eng. , vol.28 , pp. 89
- Han, L.K.¹ Bhat, M.² Wristers, D.³ Wang, H.H.⁴ Kwong, D.L.⁵

296
- 0031150233
- Y. Maneglia, D. Bauza, Y. Morfouli, G. Ghibaudo, Microelectron. Eng. 36 (1997) 153.
- (1997) Microelectron. Eng. , vol.36 , pp. 153
- Maneglia, Y.¹ Bauza, D.² Morfouli, Y.³ Ghibaudo, G.⁴

297
- 0039893585
- P.K. McLarty, W.L. Hill, X.L. Xu, V. Misra, J.J. Wortman, G.S. Harris, Appl. Phys. Lett. 63 (1993) 3619.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 3619
- McLarty, P.K.¹ Hill, W.L.² Xu, X.L.³ Misra, V.⁴ Wortman, J.J.⁵ Harris, G.S.⁶

298
- 0030695785
- G. Lucovsky, Mater. Res. Soc. Symp. Proc. 446 (1997) 67.
- (1997) Mater. Res. Soc. Symp. Proc. , vol.446 , pp. 67
- Lucovsky, G.¹

299
- 0030105752
- H. Shimada, T. Ohmi, EEEE Trans. Electron Devices ED-43 (1996) 431.
- (1996) EEEE Trans. Electron Devices , vol.ED-43 , pp. 431
- Shimada, H.¹ Ohmi, T.²

300
- 0018505797
- T. Kallfass, E. Lueder, Thin Solid Films 61 (1979) 259.
- (1979) Thin Solid Films , vol.61 , pp. 259
- Kallfass, T.¹ Lueder, E.²

301
- 0025238209
- M. Matsui, H. Nagayoshi, G. Muto, S. Tanimoto, K. Kuroiwa, Y. Tarui, Jpn. J. Appl. Phys. 29 (1990) 62.
- (1990) Jpn. J. Appl. Phys. , vol.29 , pp. 62
- Matsui, M.¹ Nagayoshi, H.² Muto, G.³ Tanimoto, S.⁴ Kuroiwa, K.⁵ Tarui, Y.⁶

302
- 0000203566
- K. Chen, G.R. Yang, M. Nielsen, T.M. Lu, E.J. Rymaszewski, Appl. Phys. Lett. 70 (1997) 399.
- (1997) Appl. Phys. Lett. , vol.70 , pp. 399
- Chen, K.¹ Yang, G.R.² Nielsen, M.³ Lu, T.M.⁴ Rymaszewski, E.J.⁵

303
- 0023328860
- K. Nomura, H. Ogawa, A. Abe, J. Electrochem. Soc. 134 (1987) 922.
- (1987) J. Electrochem. Soc. , vol.134 , pp. 922
- Nomura, K.¹ Ogawa, H.² Abe, A.³

304
- 0029481304
- H. Fujikawa, Y. Taga, Mater. Res. Soc. Symp. Proc. 378 (1995) 1025.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.378 , pp. 1025
- Fujikawa, H.¹ Taga, Y.²

305
- 0029323359
- H. Yang, F. Tanoue, S. Hibino, S. Sakakibara, K. Yokoi, T. Hotta, Jpn. J. Appl. Phys. 34 (1995) L757.
- (1995) Jpn. J. Appl. Phys. , vol.34
- Yang, H.¹ Tanoue, F.² Hibino, S.³ Sakakibara, S.⁴ Yokoi, K.⁵ Hotta, T.⁶

306
- 0031169885
- J. Sun, G. Zhong, X. Fan, G. Fu, C. Zhong, J. Non-Cryst. Solids 212 (1997) 192.
- (1997) J. Non-cryst. Solids , vol.212 , pp. 192
- Sun, J.¹ Zhong, G.² Fan, X.³ Fu, G.⁴ Zhong, C.⁵

307
- 0026186562
- Y. Chubachi, K. Aoyama, Jpn. J. Appl. Phys. 30 (1991) 1442.
- (1991) Jpn. J. Appl. Phys. , vol.30 , pp. 1442
- Chubachi, Y.¹ Aoyama, K.²

308
- 0023591014
- U. Teravaninthorn, Y. Miyahara, T. Moriizumi, Jpn. J. Appl. Phys. 26 (1987) 2116.
- (1987) Jpn. J. Appl. Phys. , vol.26 , pp. 2116
- Teravaninthorn, U.¹ Miyahara, Y.² Moriizumi, T.³

309
- 0026995517
- Y.G. Vlasov, A.V. Bratov, Sensors and Actuators B 10 (1992) 1.
- (1992) Sensors and Actuators B , vol.10 , pp. 1
- Vlasov, Y.G.¹ Bratov, A.V.²

310
- 0029545815
- Stockholm, Sweden, June 25-29
- D.H. Kwon, B.W. Cho, C.S. Kim, B.K. Sohn, Proc. of Eurosensors IX, the 8th Int. Conf. on Solid-State Sensors and Actuators, Stockholm, Sweden, June 25-29, Vol. 2, 1995, p. 917.
- (1995) Proc. of Eurosensors IX, the 8th Int. Conf. on Solid-state Sensors and Actuators , vol.2 , pp. 917
- Kwon, D.H.¹ Cho, B.W.² Kim, C.S.³ Sohn, B.K.⁴

311
- 0030134891
- H. Hara, T. Ohta, Sensors and Actuators B 32 (1996) 115.
- (1996) Sensors and Actuators B , vol.32 , pp. 115
- Hara, H.¹ Ohta, T.²

312
- 0042545876
- D.H. Kwon, B.W. Cho, C.S. Kim, B.K. Sohn, Sensors and Actuators B 34 (1996) 441.
- (1996) Sensors and Actuators B , vol.34 , pp. 441
- Kwon, D.H.¹ Cho, B.W.² Kim, C.S.³ Sohn, B.K.⁴

313
- 0040244535
- P. Gimmel, K.D. Schierbaum, W. Gopel, H.H. Van Den Vlekkert, N.F. De Rooij, Sensors and Actuators B 4 (1990) 135.
- (1990) Sensors and Actuators B , vol.4 , pp. 135
- Gimmel, P.¹ Schierbaum, K.D.² Gopel, W.³ Van Den Vlekkert, H.H.⁴ De Rooij, N.F.⁵

314
- 0000318667
- A. Gebbert, M. Alvarez-Icaza, W. Stöcklein, R.D. Schmid, Anal. Chem. 64 (1992) 997.
- (1992) Anal. Chem. , vol.64 , pp. 997
- Gebbert, A.¹ Alvarez-Icaza, M.² Stöcklein, W.³ Schmid, R.D.⁴

315
- 0029927862
- R. Polzius, T. Schneider, F.F. Biert, U. Bilitewski, Biosens. Bioelectron. 11 (1996) 503.
- (1996) Biosens. Bioelectron. , vol.11 , pp. 503
- Polzius, R.¹ Schneider, T.² Biert, F.F.³ Bilitewski, U.⁴

316
- 85033882466
- Leuven, Belgium, September 8-11
- A.S. Poghossian, Proc. of Eurosensors X, the 10th European Conf. on Solid-State Transducers, Leuven, Belgium, September 8-11, Vol. 1, 1996, p. 79.
- (1996) Proc. of Eurosensors X, the 10th European Conf. on Solid-state Transducers , vol.1 , pp. 79
- Poghossian, A.S.¹

317
- 85033885156
- Leuven, Belgium, September 8-11
- H. Voigt, F. Schitthelm, T. Lange, T. Kullick, R. Ferretti, Proc. of Eurosensors X, the 10th European Conf. on Solid-State Transducers, Leuven, Belgium, September 8-11, Vol. 1, 1996, p. 247.
- (1996) Proc. of Eurosensors X, the 10th European Conf. on Solid-state Transducers , vol.1 , pp. 247
- Voigt, H.¹ Schitthelm, F.² Lange, T.³ Kullick, T.⁴ Ferretti, R.⁵

318
- 0016932224
- A.G. Revesz, J.F. Allison, J.H. Reynolds, Comsat Tech. Rev. 6 (1976) 57.
- (1976) Comsat Tech. Rev. , vol.6 , pp. 57
- Revesz, A.G.¹ Allison, J.F.² Reynolds, J.H.³

319
- 0019554316
- F. Rubio, J. Denis, J.M. Albella, J.M. Martinez-Duart, Thin Solid Films 90 (1982) 405.
- (1982) Thin Solid Films , vol.90 , pp. 405
- Rubio, F.¹ Denis, J.² Albella, J.M.³ Martinez-Duart, J.M.⁴

320
- 0025516801
- E. Hacker, H. Lauth, J. Meyer, P. Weissbrodt, R. Wolf, G. Zscherpe, H. Heyer, Thin Solid Films 192 (1990) 27.
- (1990) Thin Solid Films , vol.192 , pp. 27
- Hacker, E.¹ Lauth, H.² Meyer, J.³ Weissbrodt, P.⁴ Wolf, R.⁵ Zscherpe, G.⁶ Heyer, H.⁷

321
- 85033899029
- Palo Alto, CA, USA, November 6-10, 1973, IEEE, New York
- A.G. Revesz, Proc. of the 10th Photovoltaïc Specialists Conference, Palo Alto, CA, USA, November 6-10, 1973, IEEE, New York, 1973, p. 180.
- (1973) Proc. of the 10th Photovoltaïc Specialists Conference , pp. 180
- Revesz, A.G.¹

322
- 0000794591
- E. McCafferty, P.M. Natishan, G.K. Hubler, Nucl. Instrum. Meth. Phys. Res. B 56/57 (1991) 639.
- (1991) Nucl. Instrum. Meth. Phys. Res. B , vol.56-57 , pp. 639
- McCafferty, E.¹ Natishan, P.M.² Hubler, G.K.³

323
- 0028514292
- D.W. Graham, D.P. Stinton, J. Am. Ceram. Soc. 77 (1994) 2298.
- (1994) J. Am. Ceram. Soc. , vol.77 , pp. 2298
- Graham, D.W.¹ Stinton, D.P.²

324
- 0011710122
- R. Chapman, F.M. Monaldo, J. Atm. Ocean. Tech. 12 (1995) 190.
- (1995) J. Atm. Ocean. Tech. , vol.12 , pp. 190
- Chapman, R.¹ Monaldo, F.M.²

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