A new pulsed laser deposition method using an aperture plate

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 2, 1997, Pages 704-709

  Inoue, Narumi ^a   Ozaki, Tatsuya ^a   Monnaka, Toshiaki ^a   Kashiwabara, Shigeru ^a   Fujimoto, Ryozo ^b  

^a NATIONAL DEFENSE ACADEMY   (Japan)

^b NIPPON BUNRI UNIVERSITY   (Japan)

Author keywords

Droplets; Laser ablation; Off axis method; Pulsed laser deposition (PLD)

Indexed keywords

APERTURE PLATES;

DEPOSITION; LASER ABLATION; OXIDES; PRESSURE EFFECTS; PULSED LASER APPLICATIONS; SUBSTRATES; TANTALUM COMPOUNDS; TARGETS;

THIN FILMS;

EID: 0031069195     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.704     Document Type: Article

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