X-ray photoelectron spectroscopy study of Al/Ta2O5 and Ta2O5Al buried interfaces

Applied Physics Letters

Volumn 70, Issue 3, 1997, Pages 399-401

  Chen, K ^a   Yang, G R ^a   Nielsen, M ^a   Lu, T M ^a   Rymaszewski, E J ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000203566     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118386     Document Type: Article

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