SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 546, Issue , 2013, Pages 85-93

Atomic layer deposition of dielectrics for carbon-based electronics

(2) Kim, J a Jandhyala, S a

a The University of Texas at Dallas (United States)

Author keywords

Atomic layer deposition; Carbon electronics; Carbon nanotubes; Dielectrics; Graphene; Non covalent functionalization

Indexed keywords

ATOMS; CARBON NANOTUBE FIELD EFFECT TRANSISTORS; CARBON NANOTUBES; DEPOSITION; DIELECTRIC MATERIALS; FIELD EFFECT TRANSISTORS; GATE DIELECTRICS; GRAPHENE; GRAPHENE TRANSISTORS; INTERFACES (MATERIALS); NANOTUBES; PHYSICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON; SEMICONDUCTOR MATERIALS; VAPOR DEPOSITION; WETTING; YARN;

CARBON-BASED ELECTRONICS; DIELECTRIC INTEGRATION; ELECTRONIC MATERIALS; HIGH CURRENT DENSITIES; HIGH-QUALITY INTERFACE; INTRINSIC PROPERTY; NON-COVALENT FUNCTIONALIZATION; PHYSICAL ASSEMBLIES;

ATOMIC LAYER DEPOSITION;

EID: 84885301672 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2013.03.078 Document Type: Conference Paper

Times cited : (18)

References (97)

1
- 0031696792
- G.E. Moore, Proc. IEEE 86 (1) (1998) 82.
- (1998) Proc. IEEE , vol.86 , Issue.1 , pp. 82
- Moore, G.E.¹

2
- 0016116644
- R.H. Dennard, F.H. Gaensslen, V.L. Rideout, E. Bassous, A.R. LeBlanc, IEEE J. Solid State Circuits 9 (5) (1974) 256.
- (1974) IEEE J. Solid State Circuits , vol.9 , Issue.5 , pp. 256
- Dennard, R.H.¹ Gaensslen, F.H.² Rideout, V.L.³ Bassous, E.⁴ Leblanc, A.R.⁵

3
- 67650983084
- S. Guha, V. Narayanan, Annu. Rev. Mater. Res. 39 (1) (2009) 181.
- (2009) Annu. Rev. Mater. Res. , vol.39 , Issue.1 , pp. 181
- Guha, S.¹ Narayanan, V.²

4
- 81555220119
- I. Ferain, C.A. Colinge, J.P. Colinge, Nature 479 (7373) (2011) 310.
- (2011) Nature , vol.479 , Issue.7373 , pp. 310
- Ferain, I.¹ Colinge, C.A.² Colinge, J.P.³

5
- 84879421726
- I.T.R.S
- I.T.R.S., Emerging research materials, http://www.itrs.net/Links/ 2011ITRS/2011Chapters/2011ERM.pdf 2011.
- (2011) Emerging Research Materials

6
- 84856241232
- S.O. Koswatta, A. Valdes-Garcia, M.B. Steiner, L. Yu-Ming, P. Avouris, IEEE Trans. Microwave Theory Tech. 59 (10) (2011) 2739.
- (2011) IEEE Trans. Microwave Theory Tech. , vol.59 , Issue.10 , pp. 2739
- Koswatta, S.O.¹ Valdes-Garcia, A.² Steiner, M.B.³ Yu-Ming, L.⁴ Avouris, P.⁵

7
- 79957456506
- J. Chauhan, J. Guo, Nano Res. 4 (6) (2011) 571.
- (2011) Nano Res. , vol.4 , Issue.6 , pp. 571
- Chauhan, J.¹ Guo, J.²

8
- 79952961488
- H. Xu, Z. Zhang, Z. Wang, S. Wang, X. Liang, L.-M. Peng, ACS Nano 5 (3) (2011) 2340.
- (2011) ACS Nano , vol.5 , Issue.3 , pp. 2340
- Xu, H.¹ Zhang, Z.² Wang, Z.³ Wang, S.⁴ Liang, X.⁵ Peng, L.-M.⁶

9
- 3142671577
- P.J. Burke, Solid-State Electron. 48 (10-11) (2004) 1981.
- (2004) Solid-State Electron. , vol.48 , Issue.10-11 , pp. 1981
- Burke, P.J.¹

10
- 2342527945
- S.D. Li, Z. Yu, S.F. Yen, W.C. Tang, P.J. Burke, Nano Lett. 4 (4) (2004) 753.
- (2004) Nano Lett. , vol.4 , Issue.4 , pp. 753
- Li, S.D.¹ Yu, Z.² Yen, S.F.³ Tang, W.C.⁴ Burke, P.J.⁵

11
- 28344442095
- S. Rosenblatt, H. Lin, V. Sazonova, S. Tiwari, P.L. McEuen, Appl. Phys. Lett. 87 (15) (2004) 153111.
- (2004) Appl. Phys. Lett. , vol.87 , Issue.15 , pp. 153111
- Rosenblatt, S.¹ Lin, H.² Sazonova, V.³ Tiwari, S.⁴ McEuen, P.L.⁵

12
- 40449128459
- C. Kocabas, H.-s. Kim, T. Banks, J.A. Rogers, A.A. Pesetski, J.E. Baumgardner, S.V. Krishnaswamy, H. Zhang, Proc. Natl. Acad. Sci. U. S. A. 105 (5) (2008) 1405.
- (2008) Proc. Natl. Acad. Sci. U. S. A. , vol.105 , Issue.5 , pp. 1405
- Kocabas, C.¹ Kim, H.-S.² Banks, T.³ Rogers, J.A.⁴ Pesetski, A.A.⁵ Baumgardner, J.E.⁶ Krishnaswamy, S.V.⁷ Zhang, H.⁸

13
- 18144425545
- E. Artukovic, M. Kaempgen, D.S. Hecht, S. Roth, G. Grüner, Nano Lett. 5 (4) (2005) 757.
- (2005) Nano Lett. , vol.5 , Issue.4 , pp. 757
- Artukovic, E.¹ Kaempgen, M.² Hecht, D.S.³ Roth, S.⁴ Grüner, G.⁵

14
- 76249106631
- Y.-M. Lin, C. Dimitrakopoulos, K.A. Jenkins, D.B. Farmer, H.-Y. Chiu, A. Grill, P. Avouris, Science 327 (5966) (2010) 662.
- (2010) Science , vol.327 , Issue.5966 , pp. 662
- Lin, Y.-M.¹ Dimitrakopoulos, C.² Jenkins, K.A.³ Farmer, D.B.⁴ Chiu, H.-Y.⁵ Grill, A.⁶ Avouris, P.⁷

15
- 81555207231
- K. Kim, J.-Y. Choi, T. Kim, S.-H. Cho, H.-J. Chung, Nature 479 (7373) (2011) 338.
- (2011) Nature , vol.479 , Issue.7373 , pp. 338
- Kim, K.¹ Choi, J.-Y.² Kim, T.³ Cho, S.-H.⁴ Chung, H.-J.⁵

16
- 84872104025
- San Francisco, CA, U.S.A
- J. Lee, H.-J. Chung, J. Lee, H. Shin, J. Heo, H. Yang, S.-H. Lee, S. Seo, J. Shin, U.i. Chung, I. Yoo, K. Kim, 2010 IEEE Int. Electron Devices Meet. Tech. Dig., San Francisco, CA, U.S.A., 2010, p. 568.
- (2010) 2010 IEEE Int. Electron Devices Meet. Tech. Dig. , pp. 568
- Lee, J.¹ Chung, H.-J.² Lee, J.³ Shin, H.⁴ Heo, J.⁵ Yang, H.⁶ Lee, S.-H.⁷ Seo, S.⁸ Shin, J.⁹ Chung, U.I.¹⁰ Yoo, I.¹¹ Kim, K.¹²

17
- 79953766791
- F. Schwierz, Nature 472 (7341) (2011) 41.
- (2011) Nature , vol.472 , Issue.7341 , pp. 41
- Schwierz, F.¹

18
- 78650034452
- A.C. Seabaugh, Q. Zhang, Proc. IEEE 98 (12) (2010) 2095.
- (2010) Proc. IEEE , vol.98 , Issue.12 , pp. 2095
- Seabaugh, A.C.¹ Zhang, Q.²

19
- 81555207228
- A.M. Ionescu, H. Riel, Nature 479 (7373) (2011) 329.
- (2011) Nature , vol.479 , Issue.7373 , pp. 329
- Ionescu, A.M.¹ Riel, H.²

20
- 29244461475
- J. Appenzeller, Y.M. Lin, J. Knoch, Z.H. Chen, P. Avouris, IEEE Trans. Electron Devices 52 (12) (2005) 2568.
- (2005) IEEE Trans. Electron Devices , vol.52 , Issue.12 , pp. 2568
- Appenzeller, J.¹ Lin, Y.M.² Knoch, J.³ Chen, Z.H.⁴ Avouris, P.⁵

21
- 19744366972
- J. Appenzeller, Y.M. Lin, J. Knoch, P. Avouris, Phys. Rev. Lett. 93 (19) (2004) 196805.
- (2004) Phys. Rev. Lett. , vol.93 , Issue.19 , pp. 196805
- Appenzeller, J.¹ Lin, Y.M.² Knoch, J.³ Avouris, P.⁴

22
- 84885315792
- San Francisco, CA, U.S.A
- G. Zhang, X. Wang, X. Li, Y. Lu, A. Javey, H. Dai, 2006 IEEE Int. Electron Devices Meet. Tech. Dig., San Francisco, CA, U.S.A., 2006, p. 160.
- (2006) 2006 IEEE Int. Electron Devices Meet. Tech. Dig. , pp. 160
- Zhang, G.¹ Wang, X.² Li, X.³ Lu, Y.⁴ Javey, A.⁵ Dai, H.⁶

23
- 57049126461
- Q. Zhang, T. Fang, H.L. Xing, A. Seabaugh, D. Jena, IEEE Electron Device Lett. 29 (12) (2008) 1344.
- (2008) IEEE Electron Device Lett. , vol.29 , Issue.12 , pp. 1344
- Zhang, Q.¹ Fang, T.² Xing, H.L.³ Seabaugh, A.⁴ Jena, D.⁵

24
- 34547334459
- M.Y. Han, B. Özyilmaz, Y. Zhang, P. Kim, Phys. Rev. Lett. 98 (20) (2007) 206805.
- (2007) Phys. Rev. Lett. , vol.98 , Issue.20 , pp. 206805
- Han, M.Y.¹ Özyilmaz, B.² Zhang, Y.³ Kim, P.⁴

25
- 35248891921
- Y.G. Semenov, K.W. Kim, J.M. Zavada, Appl. Phys. Lett. 91 (15) (2007) 153105.
- (2007) Appl. Phys. Lett. , vol.91 , Issue.15 , pp. 153105
- Semenov, Y.G.¹ Kim, K.W.² Zavada, J.M.³

26
- 54049083519
- G.K. Fedder, R.T. Howe, T.-J.K. Liu, E.P. Quevy, Proc. IEEE 96 (2) (2008) 306.
- (2008) Proc. IEEE , vol.96 , Issue.2 , pp. 306
- Fedder, G.K.¹ Howe, R.T.² Liu, T.-J.K.³ Quevy, E.P.⁴

27
- 59649089945
- S.K. Banerjee, L.F. Register, E. Tutuc, D. Reddy, A.H. MacDonald, IEEE Electron Device Lett. 30 (2) (2009) 158.
- (2009) IEEE Electron Device Lett. , vol.30 , Issue.2 , pp. 158
- Banerjee, S.K.¹ Register, L.F.² Tutuc, E.³ Reddy, D.⁴ MacDonald, A.H.⁵

28
- 84869067214
- L.F. Register, X. Mou, D. Reddy, W. Jung, I. Sodemann, D. Pesin, A. Hassibi, A.H. MacDonald, S.K. Banerjee, ECS Trans. 45 (4) (2012) 3.
- (2012) ECS Trans. , vol.45 , Issue.4 , pp. 3
- Register, L.F.¹ Mou, X.² Reddy, D.³ Jung, W.⁴ Sodemann, I.⁵ Pesin, D.⁶ Hassibi, A.⁷ MacDonald, A.H.⁸ Banerjee, S.K.⁹

29
- 78649353099
- G. Bourianoff, M. Brillouet, R.K. Cavin, T. Hiramoto, J.A. Hutchby, A.M. Ionescu, K. Uchida, Proc. IEEE 98 (12) (2010) 1986.
- (2010) Proc. IEEE , vol.98 , Issue.12 , pp. 1986
- Bourianoff, G.¹ Brillouet, M.² Cavin, R.K.³ Hiramoto, T.⁴ Hutchby, J.A.⁵ Ionescu, A.M.⁶ Uchida, K.⁷

30
- 0032492884
- S.J. Tans, A.R.M. Verschueren, C. Dekker, Nature 393 (6680) (1998) 49.
- (1998) Nature , vol.393 , Issue.6680 , pp. 49
- Tans, S.J.¹ Verschueren, A.R.M.² Dekker, C.³

31
- 0005836651
- R. Martel, T. Schmidt, H.R. Shea, T. Hertel, P. Avouris, Appl. Phys. Lett. 73 (17) (1998) 2447.
- (1998) Appl. Phys. Lett. , vol.73 , Issue.17 , pp. 2447
- Martel, R.¹ Schmidt, T.² Shea, H.R.³ Hertel, T.⁴ Avouris, P.⁵

32
- 0035834444
- A. Bachtold, P. Hadley, T. Nakanishi, C. Dekker, Science 294 (5545) (2001) 1317.
- (2001) Science , vol.294 , Issue.5545 , pp. 1317
- Bachtold, A.¹ Hadley, P.² Nakanishi, T.³ Dekker, C.⁴

33
- 0000901446
- A. Javey, Q. Wang, A. Ural, Y.M. Li, H.J. Dai, Nano Lett. 2 (9) (2002) 929.
- (2002) Nano Lett. , vol.2 , Issue.9 , pp. 929
- Javey, A.¹ Wang, Q.² Ural, A.³ Li, Y.M.⁴ Dai, H.J.⁵

34
- 79956022434
- S.J. Wind, J. Appenzeller, R. Martel, V. Derycke, P. Avouris, Appl. Phys. Lett. 80 (20) (2002) 3817.
- (2002) Appl. Phys. Lett. , vol.80 , Issue.20 , pp. 3817
- Wind, S.J.¹ Appenzeller, J.² Martel, R.³ Derycke, V.⁴ Avouris, P.⁵

35
- 0036974829
- A. Javey, H. Kim, M. Brink, Q. Wang, A. Ural, J. Guo, P. McIntyre, P. McEuen, M. Lundstrom, H.J. Dai, Nat. Mater. 1 (4) (2002) 241.
- (2002) Nat. Mater. , vol.1 , Issue.4 , pp. 241
- Javey, A.¹ Kim, H.² Brink, M.³ Wang, Q.⁴ Ural, A.⁵ Guo, J.⁶ McIntyre, P.⁷ McEuen, P.⁸ Lundstrom, M.⁹ Dai, H.J.¹⁰

36
- 34247341802
- S.K. Kim, Y. Xuan, P.D. Ye, S. Mohammadi, J.H. Back, M. Shim, Appl. Phys. Lett. 90 (16) (2007).
- (2007) Appl. Phys. Lett. , vol.90 , Issue.16
- Kim, S.K.¹ Xuan, Y.² Ye, P.D.³ Mohammadi, S.⁴ Back, J.H.⁵ Shim, M.⁶

37
- 4143096759
- A. Javey, J. Guo, D.B. Farmer, Q. Wang, E. Yenilmez, R.G. Gordon, M. Lundstrom, H.J. Dai, Nano Lett. 4 (7) (2004) 1319.
- (2004) Nano Lett. , vol.4 , Issue.7 , pp. 1319
- Javey, A.¹ Guo, J.² Farmer, D.B.³ Wang, Q.⁴ Yenilmez, E.⁵ Gordon, R.G.⁶ Lundstrom, M.⁷ Dai, H.J.⁸

38
- 33845909042
- Q. Cao, M.-G. Xia, M. Shim, J.A. Rogers, Adv. Funct. Mater. 16 (18) (2006) 2355.
- (2006) Adv. Funct. Mater. , vol.16 , Issue.18 , pp. 2355
- Cao, Q.¹ Xia, M.-G.² Shim, M.³ Rogers, J.A.⁴

39
- 34948858511
- P. Avouris, Z. Chen, V. Perebeinos, Nat. Nanotechnol. 2 (10) (2007) 605.
- (2007) Nat. Nanotechnol. , vol.2 , Issue.10 , pp. 605
- Avouris, P.¹ Chen, Z.² Perebeinos, V.³

40
- 39549093276
- J. Appenzeller, Proc. IEEE 96 (2) (2008) 201.
- (2008) Proc. IEEE , vol.96 , Issue.2 , pp. 201
- Appenzeller, J.¹

41
- 0037013929
- A. Hirsch, Angew. Chem. Int. Ed. 41 (11) (2002) 1853.
- (2002) Angew. Chem. Int. Ed. , vol.41 , Issue.11 , pp. 1853
- Hirsch, A.¹

42
- 0036311229
- J.L. Bahr, J.M. Tour, J. Mater. Chem. 12 (7) (2002) 1952.
- (2002) J. Mater. Chem. , vol.12 , Issue.7 , pp. 1952
- Bahr, J.L.¹ Tour, J.M.²

43
- 13144266761
- S. Banerjee, T. Hemraj-Benny, S.S. Wong, Adv. Mater. 17 (1) (2005) 17.
- (2005) Adv. Mater. , vol.17 , Issue.1 , pp. 17
- Banerjee, S.¹ Hemraj-Benny, T.² Wong, S.S.³

44
- 0032474758
- S.S. Wong, E. Joselevich, A.T. Woolley, C.L. Cheung, C.M. Lieber, Nature 394 (6688) (1998) 52.
- (1998) Nature , vol.394 , Issue.6688 , pp. 52
- Wong, S.S.¹ Joselevich, E.² Woolley, A.T.³ Cheung, C.L.⁴ Lieber, C.M.⁵

45
- 18144431777
- D.B. Farmer, R.G. Gordon, Electrochem. Solid-State Lett. 8 (4) (2005) G89.
- (2005) Electrochem. Solid-State Lett. , vol.8 , Issue.4
- Farmer, D.B.¹ Gordon, R.G.²

46
- 33646402623
- D.B. Farmer, R.G. Gordon, Nano Lett. 6 (4) (2006) 699.
- (2006) Nano Lett. , vol.6 , Issue.4 , pp. 699
- Farmer, D.B.¹ Gordon, R.G.²

47
- 39549121990
- Z. Chen, D. Farmer, S. Xu, R. Gordon, P. Avouris, J. Appenzeller, IEEE Electron Device Lett. 29 (2) (2008) 183.
- (2008) IEEE Electron Device Lett. , vol.29 , Issue.2 , pp. 183
- Chen, Z.¹ Farmer, D.² Xu, S.³ Gordon, R.⁴ Avouris, P.⁵ Appenzeller, J.⁶

48
- 67649191764
- A.S. Cavanagh, C.A. Wilson, A.W. Weimer, S.M. George, Nanotechnology 20 (25) (2009) 255602.
- (2009) Nanotechnology , vol.20 , Issue.25 , pp. 255602
- Cavanagh, A.S.¹ Wilson, C.A.² Weimer, A.W.³ George, S.M.⁴

49
- 33645411647
- Y.R. Lu, S. Bangsaruntip, X.R. Wang, L. Zhang, Y. Nishi, H.J. Dai, J. Am. Chem. Soc. 128 (11) (2006) 3518.
- (2006) J. Am. Chem. Soc. , vol.128 , Issue.11 , pp. 3518
- Lu, Y.R.¹ Bangsaruntip, S.² Wang, X.R.³ Zhang, L.⁴ Nishi, Y.⁵ Dai, H.J.⁶

50
- 7444220645
- K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, Y. Zhang, S.V. Dubonos, I.V. Grigorieva, A.A. Firsov, Science 306 (5696) (2004) 666.
- (2004) Science , vol.306 , Issue.5696 , pp. 666
- Novoselov, K.S.¹ Geim, A.K.² Morozov, S.V.³ Jiang, D.⁴ Zhang, Y.⁵ Dubonos, S.V.⁶ Grigorieva, I.V.⁷ Firsov, A.A.⁸

51
- 36149007340
- P.R. Wallace, Phys. Rev. 71 (9) (1947) 622.
- (1947) Phys. Rev. , vol.71 , Issue.9 , pp. 622
- Wallace, P.R.¹

52
- 67649225738
- A.K. Geim, Science 324 (5934) (2009) 1530.
- (2009) Science , vol.324 , Issue.5934 , pp. 1530
- Geim, A.K.¹

53
- 40749140712
- S.V. Morozov, K.S. Novoselov, M.I. Katsnelson, F. Schedin, D.C. Elias, J.A. Jaszczak, A.K. Geim, Phys. Rev. Lett. 100 (1) (2008) 016602.
- (2008) Phys. Rev. Lett. , vol.100 , Issue.1 , pp. 016602
- Morozov, S.V.¹ Novoselov, K.S.² Katsnelson, M.I.³ Schedin, F.⁴ Elias, D.C.⁵ Jaszczak, J.A.⁶ Geim, A.K.⁷

54
- 43049170468
- K.I. Bolotin, K.J. Sikes, Z. Jiang, M. Klima, G. Fudenberg, J. Hone, P. Kim, H.L. Stormer, Solid State Commun. 146 (9-10) (2008) 351.
- (2008) Solid State Commun. , vol.146 , Issue.9-10 , pp. 351
- Bolotin, K.I.¹ Sikes, K.J.² Jiang, Z.³ Klima, M.⁴ Fudenberg, G.⁵ Hone, J.⁶ Kim, P.⁷ Stormer, H.L.⁸

55
- 41849125958
- J.-H. Chen, C. Jang, S. Xiao, M. Ishigami, M.S. Fuhrer, Nat. Nanotechnol. 3 (4) (2008) 206.
- (2008) Nat. Nanotechnol. , vol.3 , Issue.4 , pp. 206
- Chen, J.-H.¹ Jang, C.² Xiao, S.³ Ishigami, M.⁴ Fuhrer, M.S.⁵

56
- 37249020423
- Y.W. Tan, Y. Zhang, K. Bolotin, Y. Zhao, S. Adam, E.H. Hwang, S. Das Sarma, H.L. Stormer, P. Kim, Phys. Rev. Lett. 99 (24) (2007) 246803.
- (2007) Phys. Rev. Lett. , vol.99 , Issue.24 , pp. 246803
- Tan, Y.W.¹ Zhang, Y.² Bolotin, K.³ Zhao, Y.⁴ Adam, S.⁵ Hwang, E.H.⁶ Das Sarma, S.⁷ Stormer, H.L.⁸ Kim, P.⁹

57
- 64649085838
- X. Hong, A. Posadas, K. Zou, C.H. Ahn, J. Zhu, Phys. Rev. Lett. 102 (13) (2009) 136808.
- (2009) Phys. Rev. Lett. , vol.102 , Issue.13 , pp. 136808
- Hong, X.¹ Posadas, A.² Zou, K.³ Ahn, C.H.⁴ Zhu, J.⁵

58
- 34547841212
- M.C. Lemme, T.J. Echtermeyer, M. Baus, H. Kurz, IEEE Electron Device Lett. 28 (4) (2007) 282.
- (2007) IEEE Electron Device Lett. , vol.28 , Issue.4 , pp. 282
- Lemme, M.C.¹ Echtermeyer, T.J.² Baus, M.³ Kurz, H.⁴

59
- 45749119968
- Z.H. Ni, H.M. Wang, Y. Ma, J. Kasim, Y.H. Wu, Z.X. Shen, ACS Nano 2 (5) (2008) 1033.
- (2008) ACS Nano , vol.2 , Issue.5 , pp. 1033
- Ni, Z.H.¹ Wang, H.M.² Ma, Y.³ Kasim, J.⁴ Wu, Y.H.⁵ Shen, Z.X.⁶

60
- 79959806001
- H. Xu, Z. Zhang, H. Xu, Z. Wang, S. Wang, L.-M. Peng, ACS Nano 5 (6) (2011) 5031.
- (2011) ACS Nano , vol.5 , Issue.6 , pp. 5031
- Xu, H.¹ Zhang, Z.² Xu, H.³ Wang, Z.⁴ Wang, S.⁵ Peng, L.-M.⁶

61
- 34547314459
- B. Huard, J.A. Sulpizio, N. Stander, K. Todd, B. Yang, D. Goldhaber-Gordon, Phys. Rev. Lett. 98 (23) (2007) 236803.
- (2007) Phys. Rev. Lett. , vol.98 , Issue.23 , pp. 236803
- Huard, B.¹ Sulpizio, J.A.² Stander, N.³ Todd, K.⁴ Yang, B.⁵ Goldhaber-Gordon, D.⁶

62
- 77957906580
- Y. Zheng, G.-X. Ni, C.-T. Toh, C.-Y. Tan, K. Yao, B. Özyilmaz, Phys. Rev. Lett. 105 (16) (2010) 166602.
- (2010) Phys. Rev. Lett. , vol.105 , Issue.16 , pp. 166602
- Zheng, Y.¹ Ni, G.-X.² Toh, C.-T.³ Tan, C.-Y.⁴ Yao, K.⁵ Özyilmaz, B.⁶

63
- 60349109113
- S. Kim, J. Nah, I. Jo, D. Shahrjerdi, L. Colombo, Z. Yao, E. Tutuc, S.K. Banerjee, Appl. Phys. Lett. 94 (6) (2009) 062107.
- (2009) Appl. Phys. Lett. , vol.94 , Issue.6 , pp. 062107
- Kim, S.¹ Nah, J.² Jo, I.³ Shahrjerdi, D.⁴ Colombo, L.⁵ Yao, Z.⁶ Tutuc, E.⁷ Banerjee, S.K.⁸

64
- 38049080981
- Y. Xuan, Y.Q. Wu, T. Shen, M. Qi, M.A. Capano, J.A. Cooper, P.D. Ye, Appl. Phys. Lett. 92 (1) (2008) 013101.
- (2008) Appl. Phys. Lett. , vol.92 , Issue.1 , pp. 013101
- Xuan, Y.¹ Wu, Y.Q.² Shen, T.³ Qi, M.⁴ Capano, M.A.⁵ Cooper, J.A.⁶ Ye, P.D.⁷

65
- 44349165054
- B. Lee, S.-Y. Park, H.-C. Kim, K. Cho, E.M. Vogel, M.J. Kim, R.M. Wallace, J. Kim, Appl. Phys. Lett. 92 (20) (2008) 203102.
- (2008) Appl. Phys. Lett. , vol.92 , Issue.20 , pp. 203102
- Lee, B.¹ Park, S.-Y.² Kim, H.-C.³ Cho, K.⁴ Vogel, E.M.⁵ Kim, M.J.⁶ Wallace, R.M.⁷ Kim, J.⁸

66
- 77954347445
- F. Speck, M. Ostler, J. Roehrl, K.V. Emtsev, M. Hundhausen, L. Ley, T. Seyller, Phys. Status Solidi C 7 (2) (2010) 398.
- (2010) Phys. Status Solidi C , vol.7 , Issue.2 , pp. 398
- Speck, F.¹ Ostler, M.² Roehrl, J.³ Emtsev, K.V.⁴ Hundhausen, M.⁵ Ley, L.⁶ Seyller, T.⁷

67
- 46049105319
- X. Wang, S.M. Tabakman, H. Dai, J. Am. Chem. Soc. 130 (26) (2008) 8152.
- (2008) J. Am. Chem. Soc. , vol.130 , Issue.26 , pp. 8152
- Wang, X.¹ Tabakman, S.M.² Dai, H.³

68
- 77957156573
- K. Zou, X. Hong, D. Keefer, J. Zhu, Phys. Rev. Lett. 105 (12) (2010) 126601.
- (2010) Phys. Rev. Lett. , vol.105 , Issue.12 , pp. 126601
- Zou, K.¹ Hong, X.² Keefer, D.³ Zhu, J.⁴

69
- 67649304648
- J.S. Moon, D. Curtis, M. Hu, D. Wong, C. McGuire, P.M. Campbell, G. Jernigan, J.L. Tedesco, B. VanMil, R. Myers-Ward, C. Eddy, D.K. Gaskill, IEEE Electron Device Lett. 30 (6) (2009) 650.
- (2009) IEEE Electron Device Lett. , vol.30 , Issue.6 , pp. 650
- Moon, J.S.¹ Curtis, D.² Hu, M.³ Wong, D.⁴ McGuire, C.⁵ Campbell, P.M.⁶ Jernigan, G.⁷ Tedesco, J.L.⁸ Vanmil, B.⁹ Myers-Ward, R.¹⁰ Eddy, C.¹¹ Gaskill, D.K.¹²

70
- 79959782276
- J.M.P. Alaboson, Q.H. Wang, J.D. Emery, A.L. Lipson, M.J. Bedzyk, J.W. Elam, M.J. Pellin, M.C. Hersam, ACS Nano 5 (6) (2011) 5223.
- (2011) ACS Nano , vol.5 , Issue.6 , pp. 5223
- Alaboson, J.M.P.¹ Wang, Q.H.² Emery, J.D.³ Lipson, A.L.⁴ Bedzyk, M.J.⁵ Elam, J.W.⁶ Pellin, M.J.⁷ Hersam, M.C.⁸

71
- 71949095395
- D.B. Farmer, H.Y. Chiu, Y.M. Lin, K.A. Jenkins, F.N. Xia, P. Avouris, Nano Lett. 9 (12) (2009) 4474.
- (2009) Nano Lett. , vol.9 , Issue.12 , pp. 4474
- Farmer, D.B.¹ Chiu, H.Y.² Lin, Y.M.³ Jenkins, K.A.⁴ Xia, F.N.⁵ Avouris, P.⁶

72
- 57349090160
- I. Meric, M.Y. Han, A.F. Young, B. Ozyilmaz, P. Kim, K.L. Shepard, Nat. Nanotechnol. 3 (11) (2008) 654.
- (2008) Nat. Nanotechnol. , vol.3 , Issue.11 , pp. 654
- Meric, I.¹ Han, M.Y.² Young, A.F.³ Ozyilmaz, B.⁴ Kim, P.⁵ Shepard, K.L.⁶

73
- 70349678974
- A. Pirkle, R.M. Wallace, L. Colombo, Appl. Phys. Lett. 95 (13) (2009) 133106.
- (2009) Appl. Phys. Lett. , vol.95 , Issue.13 , pp. 133106
- Pirkle, A.¹ Wallace, R.M.² Colombo, L.³

74
- 80052794686
- M.J. Hollander, M. LaBella, Z.R. Hughes, M. Zhu, K.A. Trumbull, R. Cavalero, D.W. Snyder, X. Wang, E. Hwang, S. Datta, J.A. Robinson, Nano Lett. 11 (9) (2011) 3601.
- (2011) Nano Lett. , vol.11 , Issue.9 , pp. 3601
- Hollander, M.J.¹ Labella, M.² Hughes, Z.R.³ Zhu, M.⁴ Trumbull, K.A.⁵ Cavalero, R.⁶ Snyder, D.W.⁷ Wang, X.⁸ Hwang, E.⁹ Datta, S.¹⁰ Robinson, J.A.¹¹

75
- 34547820166
- J.R. Williams, L. DiCarlo, C.M. Marcus, Science 317 (5838) (2007) 638.
- (2007) Science , vol.317 , Issue.5838 , pp. 638
- Williams, J.R.¹ Dicarlo, L.² Marcus, C.M.³

76
- 60349097486
- Y.-M. Lin, K.A. Jenkins, A. Valdes-Garcia, J.P. Small, D.B. Farmer, P. Avouris, Nano Lett. 9 (1) (2008) 422.
- (2008) Nano Lett. , vol.9 , Issue.1 , pp. 422
- Lin, Y.-M.¹ Jenkins, K.A.² Valdes-Garcia, A.³ Small, J.P.⁴ Farmer, D.B.⁵ Avouris, P.⁶

77
- 68749097028
- G. Lee, B. Lee, J. Kim, K. Cho, J. Phys. Chem. C 113 (32) (2009) 14225.
- (2009) J. Phys. Chem. C , vol.113 , Issue.32 , pp. 14225
- Lee, G.¹ Lee, B.² Kim, J.³ Cho, K.⁴

78
- 84859136830
- S. Jandhyala, G. Mordi, B. Lee, G. Lee, C. Floresca, P.-R. Cha, J. Ahn, R.M. Wallace, Y.J. Chabal, M.J. Kim, L. Colombo, K. Cho, J. Kim, ACS Nano 6 (3) (2012) 2722.
- (2012) ACS Nano , vol.6 , Issue.3 , pp. 2722
- Jandhyala, S.¹ Mordi, G.² Lee, B.³ Lee, G.⁴ Floresca, C.⁵ Cha, P.-R.⁶ Ahn, J.⁷ Wallace, R.M.⁸ Chabal, Y.J.⁹ Kim, M.J.¹⁰ Colombo, L.¹¹ Cho, K.¹² Kim, J.¹³

79
- 77955746511
- B. Lee, G. Mordi, M.J. Kim, Y.J. Chabal, E.M. Vogel, R.M. Wallace, K.J. Cho, L. Colombo, J. Kim, Appl. Phys. Lett. 97 (4) (2010) 043107.
- (2010) Appl. Phys. Lett. , vol.97 , Issue.4 , pp. 043107
- Lee, B.¹ Mordi, G.² Kim, M.J.³ Chabal, Y.J.⁴ Vogel, E.M.⁵ Wallace, R.M.⁶ Cho, K.J.⁷ Colombo, L.⁸ Kim, J.⁹

80
- 84860430696
- Jeju, Korea
- S. Jandhyala, G. Mordi, B. Lee, J. Kim, Pro. IEEE Nanotechnol. Mater. Devices Conf., Jeju, Korea, 2011, p. 94.
- (2011) Pro. IEEE Nanotechnol. Mater. Devices Conf. , pp. 94
- Jandhyala, S.¹ Mordi, G.² Lee, B.³ Kim, J.⁴

81
- 79953036299
- O.M. Nayfeh, T. Marr, M. Dubey, IEEE Electron Device Lett. 32 (4) (2011) 473.
- (2011) IEEE Electron Device Lett. , vol.32 , Issue.4 , pp. 473
- Nayfeh, O.M.¹ Marr, T.² Dubey, M.³

82
- 80052099451
- O.M. Nayfeh, IEEE Trans. Electron Devices 58 (9) (2011) 2847.
- (2011) IEEE Trans. Electron Devices , vol.58 , Issue.9 , pp. 2847
- Nayfeh, O.M.¹

83
- 77951044011
- L. Liao, J. Bai, Y. Qu, Y.-c. Lin, Y. Li, Y. Huang, X. Duan, Proc. Natl. Acad. Sci. U. S. A. 107 (15) (2010) 6711.
- (2010) Proc. Natl. Acad. Sci. U. S. A. , vol.107 , Issue.15 , pp. 6711
- Liao, L.¹ Bai, J.² Qu, Y.³ Lin, Y.-C.⁴ Li, Y.⁵ Huang, Y.⁶ Duan, X.⁷

84
- 77957908617
- C.R. Dean, A.F. Young, I. Meric, C. Lee, L. Wang, S. Sorgenfrei, K. Watanabe, T. Taniguchi, P. Kim, K.L. Shepard, J. Hone, Nat. Nanotechnol. 5 (10) (2010) 722.
- (2010) Nat. Nanotechnol. , vol.5 , Issue.10 , pp. 722
- Dean, C.R.¹ Young, A.F.² Meric, I.³ Lee, C.⁴ Wang, L.⁵ Sorgenfrei, S.⁶ Watanabe, K.⁷ Taniguchi, T.⁸ Kim, P.⁹ Shepard, K.L.¹⁰ Hone, J.¹¹

85
- 80052023775
- W. Han, T. Taychatanapat, A. Hsu, K. Watanabe, T. Taniguchi, P. Jarillo-Herrero, T. Palacios, IEEE Electron Device Lett. 32 (9) (2011) 1209.
- (2011) IEEE Electron Device Lett. , vol.32 , Issue.9 , pp. 1209
- Han, W.¹ Taychatanapat, T.² Hsu, A.³ Watanabe, K.⁴ Taniguchi, T.⁵ Jarillo-Herrero, P.⁶ Palacios, T.⁷

86
- 84885327970
- Washington, DC, U.S.A
- S.-J. Han, A. Valdes-Garcia, A.A. Bol, A.D. Franklin, D. Farmer, E. Kratschmer, K.A. Jenkins, W. Haensch, 2011 IEEE Int. Electron Devices Meet. Tech. Dig., Washington, DC, U.S.A., 2011, p. 19.
- (2011) 2011 IEEE Int. Electron Devices Meet. Tech. Dig. , pp. 19
- Han, S.-J.¹ Valdes-Garcia, A.² Bol, A.A.³ Franklin, A.D.⁴ Farmer, D.⁵ Kratschmer, E.⁶ Jenkins, K.A.⁷ Haensch, W.⁸

87
- 70350726176
- T. Shen, J.J. Gu, M. Xu, Y.Q. Wu, M.L. Bolen, M.A. Capano, L.W. Engel, P.D. Ye, Appl. Phys. Lett. 95 (17) (2009) 172105.
- (2009) Appl. Phys. Lett. , vol.95 , Issue.17 , pp. 172105
- Shen, T.¹ Gu, J.J.² Xu, M.³ Wu, Y.Q.⁴ Bolen, M.L.⁵ Capano, M.A.⁶ Engel, L.W.⁷ Ye, P.D.⁸

88
- 66749119012
- X.S. Li, W.W. Cai, J.H. An, S. Kim, J. Nah, D.X. Yang, R. Piner, A. Velamakanni, I. Jung, E. Tutuc, S.K. Banerjee, L. Colombo, R.S. Ruoff, Science 324 (5932) (2009) 1312.
- (2009) Science , vol.324 , Issue.5932 , pp. 1312
- Li, X.S.¹ Cai, W.W.² An, J.H.³ Kim, S.⁴ Nah, J.⁵ Yang, D.X.⁶ Piner, R.⁷ Velamakanni, A.⁸ Jung, I.⁹ Tutuc, E.¹⁰ Banerjee, S.K.¹¹ Colombo, L.¹² Ruoff, R.S.¹³

89
- 67651251394
- G. Liu, W. Stillman, S. Rumyantsev, Q. Shao, M. Shur, A.A. Balandin, Appl. Phys. Lett. 95 (3) (2009) 033103.
- (2009) Appl. Phys. Lett. , vol.95 , Issue.3 , pp. 033103
- Liu, G.¹ Stillman, W.² Rumyantsev, S.³ Shao, Q.⁴ Shur, M.⁵ Balandin, A.A.⁶

90
- 79959781416
- O. Habibpour, S. Cherednichenko, J. Vukusic, J. Stake, IEEE Electron Device Lett. 32 (7) (2011) 871.
- (2011) IEEE Electron Device Lett. , vol.32 , Issue.7 , pp. 871
- Habibpour, O.¹ Cherednichenko, S.² Vukusic, J.³ Stake, J.⁴

91
- 79960831055
- B.-C. Huang, M. Zhang, Y. Wang, J. Woo, Appl. Phys. Lett. 99 (3) (2011) 032107.
- (2011) Appl. Phys. Lett. , vol.99 , Issue.3 , pp. 032107
- Huang, B.-C.¹ Zhang, M.² Wang, Y.³ Woo, J.⁴

92
- 38549085884
- J.B. Oostinga, H.B. Heersche, X. Liu, A.F. Morpurgo, L.M.K. Vandersypen, Nat. Mater. 7 (2) (2008) 151.
- (2008) Nat. Mater. , vol.7 , Issue.2 , pp. 151
- Oostinga, J.B.¹ Heersche, H.B.² Liu, X.³ Morpurgo, A.F.⁴ Vandersypen, L.M.K.⁵

93
- 77950084994
- J.S. Moon, D. Curtis, S. Bui, M. Hu, D.K. Gaskill, J.L. Tedesco, P. Asbeck, G.G. Jernigan, B.L. VanMil, R.L. Myers-Ward, C.R. Eddy, P.M. Campbell, X. Weng, IEEE Electron Device Lett. 31 (4) (2010) 260.
- (2010) IEEE Electron Device Lett. , vol.31 , Issue.4 , pp. 260
- Moon, J.S.¹ Curtis, D.² Bui, S.³ Hu, M.⁴ Gaskill, D.K.⁵ Tedesco, J.L.⁶ Asbeck, P.⁷ Jernigan, G.G.⁸ Vanmil, B.L.⁹ Myers-Ward, R.L.¹⁰ Eddy, C.R.¹¹ Campbell, P.M.¹² Weng, X.¹³

94
- 71549129533
- Z. Wen, L. Tian-mo, Physica B 405 (2) (2010) 564.
- (2010) Physica B , vol.405 , Issue.2 , pp. 564
- Wen, Z.¹ Tian-Mo, L.²

95
- 48649091358
- J. Kedzierski, H. Pei-Lan, P. Healey, P.W. Wyatt, C.L. Keast, M. Sprinkle, C. Berger, W.A. de Heer, IEEE Trans. Electron Devices 55 (8) (2008) 2078.
- (2008) IEEE Trans. Electron Devices , vol.55 , Issue.8 , pp. 2078
- Kedzierski, J.¹ Pei-Lan, H.² Healey, P.³ Wyatt, P.W.⁴ Keast, C.L.⁵ Sprinkle, M.⁶ Berger, C.⁷ De Heer, W.A.⁸

96
- 34547344548
- G. Gu, S. Nie, R.M. Feenstra, R.P. Devaty, W.J. Choyke, W.K. Chan, M.G. Kane, Appl. Phys. Lett. 90 (25) (2007) 253507.
- (2007) Appl. Phys. Lett. , vol.90 , Issue.25 , pp. 253507
- Gu, G.¹ Nie, S.² Feenstra, R.M.³ Devaty, R.P.⁴ Choyke, W.J.⁵ Chan, W.K.⁶ Kane, M.G.⁷

97
- 84869013248
- S. Jandhyala, G. Mordi, B. Lee, J. Kim, ECS Trans. 45 (4) (2012) 39.
- (2012) ECS Trans. , vol.45 , Issue.4 , pp. 39
- Jandhyala, S.¹ Mordi, G.² Lee, B.³ Kim, J.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.