ALD of high-κ Dielectrics on suspended functionalized SWNTs

Electrochemical and Solid-State Letters

Volumn 8, Issue 4, 2005, Pages

  Farmer, Damon B ^a   Gordon, Roy G ^b  

^a Div of Eng and Applied Sciences   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; CURRENT VOLTAGE CHARACTERISTICS; ION BEAMS; PHOTOLITHOGRAPHY; TRANSMISSION ELECTRON MICROSCOPY;

1,2-DICHLOROBENZENE; MULTI-WALLED CARBON NANOTUBES (MWNT); NITROANILINE; SINGLE-WALLED CARBON NANOTUBES (SWNT);

DIELECTRIC MATERIALS;

EID: 18144431777     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1862474     Document Type: Article

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