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Volumn 1, Issue 4, 2002, Pages 241-246

High-κ dielectrics for advanced carbon-nanotube transistors and logic gates

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CARBON NANOTUBES; CARRIER MOBILITY; FIELD EFFECT TRANSISTORS; LOGIC GATES; THIN FILMS; TRANSCONDUCTANCE;

EID: 0036974829     PISSN: 14761122     EISSN: None     Source Type: Journal    
DOI: 10.1038/nmat769     Document Type: Article
Times cited : (947)

References (39)
  • 1
    • 0035872897 scopus 로고    scopus 로고
    • High k gate dielectrics: Current status and materials properties considerations
    • Wilk, G. D., Wallace, R. M. & Anthony, J. M. High k gate dielectrics: current status and materials properties considerations. J. Appl. Phys. 89, 5243-5275 (2001).
    • (2001) J. Appl. Phys. , vol.89 , pp. 5243-5275
    • Wilk, G.D.1    Wallace, R.M.2    Anthony, J.M.3
  • 2
    • 0001221886 scopus 로고
    • Selection of thin film capacitor dielectrics
    • Harrop, P. J. & Campell, D. S. Selection of thin film capacitor dielectrics. Thin Solid Films 2, 273-292 (1968).
    • (1968) Thin Solid Films , vol.2 , pp. 273-292
    • Harrop, P.J.1    Campell, D.S.2
  • 4
    • 84886335567 scopus 로고    scopus 로고
    • Alternative gate dielectrics for microelectronics
    • Special issue, March
    • Alternative gate dielectrics for microelectronics. Mater. Res. Bull. 27 (Special issue, March 2002).
    • (2002) Mater. Res. Bull. , vol.27
  • 6
    • 0000071366 scopus 로고    scopus 로고
    • Electrical measurements of individual semiconducting single-walled nanotubes of various diameters
    • Zhou, C., Kong, J. & Dai, H. Electrical measurements of individual semiconducting single-walled nanotubes of various diameters. Appl. Phys. Lett. 76, 1597-1599 (2000).
    • (2000) Appl. Phys. Lett. , vol.76 , pp. 1597-1599
    • Zhou, C.1    Kong, J.2    Dai, H.3
  • 7
    • 0035929941 scopus 로고    scopus 로고
    • Polymer functionalization for air-stable n-type carbon nanotube field-effect transistors
    • Shim, M., Javey, A., Kam, N. W. S. & Dai, H. Polymer functionalization for air-stable n-type carbon nanotube field-effect transistors. J. Am. Chem. Soc. 123, 11512-11513 (2001).
    • (2001) J. Am. Chem. Soc. , vol.123 , pp. 11512-11513
    • Shim, M.1    Javey, A.2    Kam, N.W.S.3    Dai, H.4
  • 8
    • 0013068352 scopus 로고    scopus 로고
    • High performance electrolyte gated carbon nanotube transistors
    • Rosenblatt, S. et al. High performance electrolyte gated carbon nanotube transistors. Nano Lett. 2, 869-915 (2002).
    • (2002) Nano Lett. , vol.2 , pp. 869-915
    • Rosenblatt, S.1
  • 9
    • 79957969630 scopus 로고    scopus 로고
    • Integration of suspended carbon nanotube arrays into electronic devices and electromechanical systems
    • Franklin, N. R. et al. Integration of suspended carbon nanotube arrays into electronic devices and electromechanical systems. Appl. Phys. Lett. 81, 913-915 (2002).
    • (2002) Appl. Phys. Lett. , vol.81 , pp. 913-915
    • Franklin, N.R.1
  • 11
    • 5444249586 scopus 로고    scopus 로고
    • Scanned probe microscopy of electronic transport in carbon nanotubes
    • Bachtold, A. et al. Scanned probe microscopy of electronic transport in carbon nanotubes. Phys. Rev. Left. 84, 6082-6085 (2000).
    • (2000) Phys. Rev. Left. , vol.84 , pp. 6082-6085
    • Bachtold, A.1
  • 12
    • 0035822088 scopus 로고    scopus 로고
    • Fabry-Perot interference in a nanotube electron waveguide
    • Liang, W. et al. Fabry-Perot interference in a nanotube electron waveguide. Nature 411, 665-669 (2001).
    • (2001) Nature , vol.411 , pp. 665-669
    • Liang, W.1
  • 13
    • 39249085918 scopus 로고    scopus 로고
    • Quantum interference and ballistic transmission in nanotube electron wave-guides
    • Kong, J. et al. Quantum interference and ballistic transmission in nanotube electron wave-guides. Phys. Rev. Lett. 87, 106801 (2001).
    • (2001) Phys. Rev. Lett. , vol.87 , pp. 106801
    • Kong, J.1
  • 14
    • 0032492884 scopus 로고    scopus 로고
    • Room-temperature transistor based on a single carbon nanotube
    • Tans, S., Verschueren, A. & Dekker, C. Room-temperature transistor based on a single carbon nanotube. Nature 393, 49-52 (1998).
    • (1998) Nature , vol.393 , pp. 49-52
    • Tans, S.1    Verschueren, A.2    Dekker, C.3
  • 15
    • 0005836651 scopus 로고    scopus 로고
    • Single- and multi-wall carbon nanotube field-effect transistors
    • Martel, R., Schmidt, T., Shea, H. R., Hertel, T. & Avouris, P. Single- and multi-wall carbon nanotube field-effect transistors. Appl. Phys. Lett. 73, 2447-2449 (1998).
    • (1998) Appl. Phys. Lett. , vol.73 , pp. 2447-2449
    • Martel, R.1    Schmidt, T.2    Shea, H.R.3    Hertel, T.4    Avouris, P.5
  • 16
    • 0035834444 scopus 로고    scopus 로고
    • Logic circuits with carbon nanotube transistors
    • Bachtold, A., Hadley, P., Nakinishi, T. & Dekker, C. Logic circuits with carbon nanotube transistors. Science 294, 1317-1320 (2001).
    • (2001) Science , vol.294 , pp. 1317-1320
    • Bachtold, A.1    Hadley, P.2    Nakinishi, T.3    Dekker, C.4
  • 17
    • 79956022434 scopus 로고    scopus 로고
    • Vertical scaling of carbon nanotube field-effect transistors using top gate electrodes
    • Wind, S., Appenzeller, J., Martel, R., Derycke, V. & Avouris, P. Vertical scaling of carbon nanotube field-effect transistors using top gate electrodes. Appl. Phys. Lett. 80, 3817-3819 (2002).
    • (2002) Appl. Phys. Lett. , vol.80 , pp. 3817-3819
    • Wind, S.1    Appenzeller, J.2    Martel, R.3    Derycke, V.4    Avouris, P.5
  • 18
    • 0000901446 scopus 로고    scopus 로고
    • Carbon nanotube transistor arrays for multi-stage complementary logic and ring oscillators
    • Javey, A., Wang, Q., Ural, A., Li, Y. & Dai, H. Carbon nanotube transistor arrays for multi-stage complementary logic and ring oscillators. Nano Lett. 2, 929-932, (2002).
    • (2002) Nano Lett. , vol.2 , pp. 929-932
    • Javey, A.1    Wang, Q.2    Ural, A.3    Li, Y.4    Dai, H.5
  • 19
    • 0037156103 scopus 로고    scopus 로고
    • Atomic layer deposition: From precursors to thin film structures
    • Leskela, M. & Ritala, M. Atomic layer deposition: from precursors to thin film structures. Thin Solid Films 409, 138-146 (2002).
    • (2002) Thin Solid Films , vol.409 , pp. 138-146
    • Leskela, M.1    Ritala, M.2
  • 20
    • 0032578904 scopus 로고    scopus 로고
    • Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers
    • Kong, J., Soh, H., Cassell, A., Quate, C. F. & Dai, H. Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers. Nature 395, 878-881 (1998).
    • (1998) Nature , vol.395 , pp. 878-881
    • Kong, J.1    Soh, H.2    Cassell, A.3    Quate, C.F.4    Dai, H.5
  • 23
    • 85029187254 scopus 로고    scopus 로고
    • Assessment of silicon MOS and carbon nanotube FET performance limits using a general theory of ballistic transistors
    • submitted
    • Guo, J. & Lundstrom, M. Assessment of silicon MOS and carbon nanotube FET performance limits using a general theory of ballistic transistors. IEDM Tech. Dig. (submitted).
    • IEDM Tech. Dig.
    • Guo, J.1    Lundstrom, M.2
  • 24
    • 79956043573 scopus 로고    scopus 로고
    • Metal-insulator-semiconductor electrostatics of carbon nanotubes
    • Guo, J., Goasguen, S., Lundstrom, M. & Datta, S. Metal-insulator-semiconductor electrostatics of carbon nanotubes. Appl. Phys. Lett. 81, 1486-1488 (2002).
    • (2002) Appl. Phys. Lett. , vol.81 , pp. 1486-1488
    • Guo, J.1    Goasguen, S.2    Lundstrom, M.3    Datta, S.4
  • 25
    • 0035718181 scopus 로고    scopus 로고
    • Carbon nanotube field effect transistors for logic applications
    • Martel, R., Wong, H. S. F., Chan, K. & Avouris, F. Carbon nanotube field effect transistors for logic applications, IEDM Tech. Dig. 159-162 (2001).
    • (2001) IEDM Tech. Dig. , pp. 159-162
    • Martel, R.1    Wong, H.S.F.2    Chan, K.3    Avouris, F.4
  • 26
    • 24444464007 scopus 로고    scopus 로고
    • An enhanced 130 nm generation logic technology featuring 60 nm transistors optimized for high performance and low power at 0.7-1.4 C
    • Thompson, S. et al. An enhanced 130 nm generation logic technology featuring 60 nm transistors optimized for high performance and low power at 0.7-1.4 C. IEDM Tech. Dig. 256-269, (2001).
    • (2001) IEDM Tech. Dig. , pp. 256-269
    • Thompson, S.1
  • 29
    • 0037120521 scopus 로고    scopus 로고
    • Field-modulated carrier transport in carbon nanotube transistors
    • Appenzeller, I. et al. Field-modulated carrier transport in carbon nanotube transistors. Phys. Rev. Lett. 89, 126801 (2002).
    • (2002) Phys. Rev. Lett. , vol.89 , pp. 126801
    • Appenzeller, I.1
  • 31
    • 79956000382 scopus 로고    scopus 로고
    • Controlling doping and carrier injection in carbon nanotube transistors
    • Derycke, V., Martel, R., Appenzeller, J. & Avouris, P. Controlling doping and carrier injection in carbon nanotube transistors, Appl. Phys. Lett. 80, 2773-2775 (2002).
    • (2002) Appl. Phys. Lett. , vol.80 , pp. 2773-2775
    • Derycke, V.1    Martel, R.2    Appenzeller, J.3    Avouris, P.4
  • 32
    • 0033190130 scopus 로고    scopus 로고
    • 2 and Si-O-N gate dielectrics for sub-50 nm CMOS
    • 2 and Si-O-N gate dielectrics for sub-50 nm CMOS. Microelectron. Eng. 48, 25-30 (1999).
    • (1999) Microelectron. Eng. , vol.48 , pp. 25-30
    • Green, M.L.1
  • 33
    • 0000058676 scopus 로고    scopus 로고
    • Alkaline metal doped n-type semiconducting nanotubes as quantum dots
    • Kong, I., Zhou, C., Yenilmez, E. & Dai, H. Alkaline metal doped n-type semiconducting nanotubes as quantum dots. Appl. Phys. Lett. 77, 3977-3979 (2000).
    • (2000) Appl. Phys. Lett. , vol.77 , pp. 3977-3979
    • Kong, I.1    Zhou, C.2    Yenilmez, E.3    Dai, H.4
  • 34
    • 0141769693 scopus 로고    scopus 로고
    • Carbon nanotube inter- and intramolecular logic gates
    • Derycke, V., Martel, R., Appenzeller, J. & Avouris, P. Carbon nanotube inter- and intramolecular logic gates. Nano. Lett. 1, 453-456 (2001).
    • (2001) Nano. Lett. , vol.1 , pp. 453-456
    • Derycke, V.1    Martel, R.2    Appenzeller, J.3    Avouris, P.4
  • 35
    • 0000680281 scopus 로고    scopus 로고
    • Nonvolatile molecular memory elements based on ambipolar nanotube field effect transistors
    • Radosavljevic, M., Freitag, M., Thadani, K. V. & Johnson, A. T. Nonvolatile molecular memory elements based on ambipolar nanotube field effect transistors. Nano Lett. 2, 761-764 (2002).
    • (2002) Nano Lett. , vol.2 , pp. 761-764
    • Radosavljevic, M.1    Freitag, M.2    Thadani, K.V.3    Johnson, A.T.4
  • 36
    • 0034629474 scopus 로고    scopus 로고
    • Extreme oxygen sensitivity of electronic properties of carbon nanotubes
    • Collins, P. G., Bradley, K., Ishigami, M. & Zettl, A. Extreme oxygen sensitivity of electronic properties of carbon nanotubes. Science 287, 1801-1804 (2000).
    • (2000) Science , vol.287 , pp. 1801-1804
    • Collins, P.G.1    Bradley, K.2    Ishigami, M.3    Zettl, A.4
  • 37
    • 0034247521 scopus 로고    scopus 로고
    • Electronic properties of oxidized carbon nanotubes
    • Jhi, S.-H., Louie, S. G. & Cohen, M. L. Electronic properties of oxidized carbon nanotubes. Phys. Rev. Lett. 85, 1710-1713 (2000).
    • (2000) Phys. Rev. Lett. , vol.85 , pp. 1710-1713
    • Jhi, S.-H.1    Louie, S.G.2    Cohen, M.L.3
  • 38
    • 0037009625 scopus 로고    scopus 로고
    • Carbon nanotubes as Schottky barrier transistors
    • Heinze, S. et al. Carbon nanotubes as Schottky barrier transistors. Phys. Rev. Lett. 89, 106801 (2002).
    • (2002) Phys. Rev. Lett. , vol.89 , pp. 106801
    • Heinze, S.1
  • 39
    • 0035936217 scopus 로고    scopus 로고
    • Growth of single-walled carbon nanotubes from discrete catalytic nanoparticles of various sizes
    • Li, Y. et al. Growth of single-walled carbon nanotubes from discrete catalytic nanoparticles of various sizes. J. Phys. Chem. 105, 11424-11431 (2001).
    • (2001) J. Phys. Chem. , vol.105 , pp. 11424-11431
    • Li, Y.1


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