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Diamond and Related Materials

Volumn 9, Issue 3, 2000, Pages 663-667

Preparation of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition

(5) Polo, M C a Andujar J L a Hart, A b Robertson, J b Milne, W I b

a UNIVERSITY OF BARCELONA (Spain)

b UNIVERSITY OF CAMBRIDGE (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL BONDS; COMPRESSIVE STRESS; DENSITY (SPECIFIC GRAVITY); DEPOSITION; DOPING (ADDITIVES); ELECTRIC POTENTIAL; ELECTRON ENERGY LOSS SPECTROSCOPY; NITROGEN; RAMAN SPECTROSCOPY; STRESS ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND-LIKE CARBON (DLC) FILMS; FILTERED CATHODIC VACUUM ARC (FCVA) DEPOSITION;

AMORPHOUS FILMS;

EID: 0033728691 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(99)00339-8 Document Type: Article

Times cited : (173)

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