Surface micromachined diamond microswitch

Diamond and Related Materials

Volumn 9, Issue 3, 2000, Pages 970-974

  Ertl, S ^a   Adamschik, M ^a   Schmid, P ^a   Gluche, P ^b   Floter A ^b   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

^b GFD mbh   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ELECTRIC CONDUCTIVITY OF SOLIDS; FRACTURE TOUGHNESS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL EXPANSION;

DIAMOND MICROSWITCHES;

DIAMONDS;

EID: 0033729442     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00292-7     Document Type: Article

References (9)

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