On the physics of stiction and its impact on the reliability of microstructures

Journal of Adhesion Science and Technology

Volumn 17, Issue 4, 2003, Pages 563-582

  Van Spengen, W Merlijn ^a,b   Puers, Robert ^b   De Wolf, Ingrid ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

MEMS; microsystems.; physical modeling; reliability; Stiction

Indexed keywords

ACCELERATED TESTING; CALCULATION METHODS; DEGRADATION MECHANISM; FUNDAMENTAL ANALYSIS; NORMAL OPERATIONS; PHYSICAL ASPECTS; PHYSICAL MODELING; RESTORING FORCES; STICTION FAILURE; SURFACE FORCES;

ADHESION; DEGRADATION; FAILURE MODES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; MODELS; RELIABILITY; RELIABILITY ANALYSIS; CREEP; DIELECTRIC MATERIALS; FAILURE (MECHANICAL); MICROSTRUCTURE; STATISTICAL METHODS; SURFACES;

STICTION;

ACCELERATED TESTING; STICTION FAILURE; SURFACE FORCES;

EID: 0037257399     PISSN: 01694243     EISSN: 15685616     Source Type: Journal    
DOI: 10.1163/15685610360554410     Document Type: Article

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