Piezoresistive gauge factor of hydrogenated amorphous carbon films

Journal of Micromechanics and Microengineering

Volumn 16, Issue 6, 2006, Pages

  Tibrewala, A ^a   Peiner, E ^a   Bandorf, R ^b   Biehl, S ^b   Luthje H ^b  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTRIC CONDUCTIVITY; HYDROGENATION; MICROMACHINING; PIEZOELECTRICITY; SENSORS; STRAIN GAGES;

AMORPHOUS CARBON FILMS; FRENKEL-POOLE MECHANISM;

AMORPHOUS FILMS;

EID: 34247604678     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/6/S12     Document Type: Article

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