MEMS versus MOMS from a systems point of view

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 148-156

  Jacobs Cook, A J ^a  

^a Lucas Advanced Engineering Cent   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC TRANSDUCERS;

MICROOPTOMECHANICAL SYSTEMS (MOMS);

SENSORS;

EID: 0030092318     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/035     Document Type: Review

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