Three types of planar structure microspring electro-thermal actuators with insulating beam constraints

Journal of Micromechanics and Microengineering

Volumn 15, Issue 8, 2005, Pages 1527-1535

  Luo, J K ^a   Flewitt, A J ^a   Spearing, S M ^b,c   Fleck, N A ^a   Milne, W I ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b Massachusetts Institute of Technology   (United States)

^c UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC INSULATION; ELECTROSTATICS; MICROELECTRONICS; SPRINGS (COMPONENTS); TEMPERATURE DISTRIBUTION; THERMAL CONDUCTIVITY OF SOLIDS;

ELECTRO-THERMAL ACTUATORS; INSULATING BEAMS; MICROSPRING; PLANAR STRUCTURE;

ACTUATORS;

EID: 22544463693     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/8/022     Document Type: Article

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