SCOPUS 정보 검색 플랫폼

Volumn 12, Issue 10-11, 2003, Pages 2093-2098

Rapid thermal annealing study on the metal containing amorphous carbon films

Author keywords

Amorphous carbon films; Annealing; Microstructure

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CARBON; COMPRESSIVE STRESS; DEPOSITION; MICROSTRUCTURE; RAMAN SPECTROSCOPY;

FILTERED CATHODIC VACUUM ARC (FCVA);

THIN FILMS;

CARBON;

EID: 0348011382 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(03)00292-9 Document Type: Article

Times cited : (11)

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