Micro force sensor with piezoresistive amorphous carbon strain gauge

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 75-82

  Peiner, E ^a   Tibrewala, A ^a   Bandorf, R ^b   Biehl, S ^b   Luthje H ^b   Doering, L ^c  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

^c PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Amorphous carbon; Bulk silicon micromachining; Hopping conduction; Micro force sensor; Piezoresistive gauge factor

Indexed keywords

AMMONIUM COMPOUNDS; AMORPHOUS ALLOYS; MICROMACHINING; PIEZOELECTRIC MATERIALS; POTASSIUM COMPOUNDS; SILICON; STRAIN GAGES;

AMORPHOUS CARBON; BULK SILICON MICROMACHINING; HOPPING CONDUCTION; MICRO FORCE SENSORS; PIEZORESISTIVE GAUGE FACTORS;

SENSORS;

EID: 33745951981     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.11.059     Document Type: Article

References (22)

1. Wang W., Wang Y., Bao H., Xiong B., and Bao M. Friction an wear properties in MEMS. Sensor. Actuat. A 97-98 (2002) 486-491
2. Forbes I.S., and Wilson J.I.B. Diamond and hard carbon films for microelectromechanical systems (MEMS)-a nanotribological study. Thin Solid Films 420-421 (2002) 508-514
3. Werner M.R., and Fahrner W.R. Review on materials, microsensors, systems and devices for high-temperature and harsh-environment applications. IEEE T. Ind. Electron. 48 (2001) 249-257
4. Shibata T., Kitamoto Y., Unno K., and Makino E. Micromachining of diamond films for MEMS applications. J. Microelectromech. S. 9 (2000) 47-51
5. Milne W.I. Electronic devices from diamond-like carbon. Semicond. Sci. Tech. 18 (2003) S81-S85
6. Sahli S., and Aslam D.M. Ultra-high sensitivity intra-grain poly-diamond piezoresistors. Sensor. Actuat. A 71 (1998) 193-197
7. Yamamoto A., and Tsutsumoto T. Piezoresistive effect of CVD polycrystalline diamond films. Diam. Relat. Mater. 13 (2004) 863-866
8. Tang Y., Aslam Dean.M., Wang J., and Wise Kensall.D. Technology and integration of poly-crystalline diamond piezoresistive position sensor for cochlear implant probe. Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05). Seoul, Korea (2005 June 5-9) 543-546
9. Werner M., and Locher R. Growth and application of undoped and doped diamond films. Rep. Prog. Phys. 61 (1998) 1665-1710
10. de Cesare G., Gavesi M., Palma F., and Ricco B. A novel a-Si:H mechanical stress sensor. Thin Solid Films 427 (2003) 191-195
11. Alpuim P., Chu V., and Conde J.P. Piezoresistive sensors on plastic substrates using doped microcrystalline silicon. IEEE Sensor. J. 2 (2002) 336-341
12. Bandorf R., Lüthje H., Henke C., Sick J.-H., and Küster R. Tribological behaviour of thin a-C and a-C:H films with different topographic structure under rotating and oscillating motion for dry lubrication. Surf. Coat. Tech. 188-189 (2004) 530-533
13. Lu W., and Komvopoulos K. Effect of stress-induced phase transformation on nanomechanical properties of sputtered amorphous carbon films. Appl. Phys. Lett. 82 (2003) 2437-2439
14. Tauc J., Grigorovici R., and Vancu A. Optical properties and electronic structure of amorphous germanium. Phys. Status Solidi 15 (1966) 627-637
15. Robertson J. Electronic and atomic structure of diamond-like carbon. Semicond. Sci. Tech. 18 (2003) S12-S19
16. Hastas N.A., Dimitriadis C.A., Panayiotatos Y., Tassis D.H., Logothetidis S., Papadimitriou D., Roupakas G., and Adamopoulos G. High-field transport and noise properties of sputter-deposited amorphous carbon-silicon heterostructures. Semicond. Sci. Tech. 17 (2002) 662-667
17. Perera Y., Gottmann J., Husmann A., Klotzbücher T., Kreutz E.W., and Poprawe R. PLD of hard ceramic coatings, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI. Proc. SPIE 4274 (2001) 66-77
18. Hastas N.A., Dimitriadis C.A., Panayiotatos Y., Tassis D.H., Patsalas P., and Logothetidis S. Noise characterization of sputtered amorphous carbon films. J. Appl. Phys. 88 (2000) 5482-5484
19. Maiken E.B., and Taborek T. Amorphous carbon films deposited from carbon ions extracted from a discharge in fullerene vapor. J. Appl. Phys. 87 (2000) 4223-4229
20. Grimaldi C., Ryser P., and Strässler S. Gauge factor of thick film resistors: outcomes of the variable range hopping model. J. Appl. Phys. 88 (2000) 4164-4169
21. Behrens I., Doering L., and Peiner E. Piezoresistive cantilever as portable micro force calibration standard. J. Micromech. Microeng. 13 (2003) 171-177
22. Peiner E., and Doering L. Force calibration of stylus instruments using silicon microcantilevers. Sensor. Actuat. A 123-124 (2005) 137-145