Adhesion and friction studies of microelectromechanical systems/nanoelectromechanical systems materials using a novel microtriboapparatus

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 1528-1538

  Liu, Huiwen ^a   Bhushan, Bharat ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ALCOHOLS; ATOMIC FORCE MICROSCOPY; DIAMOND LIKE CARBON FILMS; FRICTION; MONOLAYERS; NANOSTRUCTURED MATERIALS; PIEZOELECTRIC DEVICES; SENSORS; SILICON; SINGLE CRYSTALS; TRIBOLOGY;

CANTILEVER; HEXADECANE THIOL; MICROTRIBOAPPARATUS; NANOELECTROMECHANICAL SYSTEMS MATERIALS; SELF-ASSEMBLED MONOLAYERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0042530378     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1560711     Document Type: Article

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