Freestanding CVD diamond elaborated by pulsed-microwave-plasma for ZnO/diamond SAW devices

Diamond and Related Materials

Volumn 13, Issue 4-8, 2004, Pages 581-584

  Lamara, T ^a   Belmahi, M ^a   Elmazria, O ^a   Le Brizoual, L ^a   Bougdira, J ^a   Remy M ^a   Alnot, P ^a  

^a UNIVERSITÉ DE LORRAINE   (France)

Author keywords

Diamond film; Plasma CVD; Surface acoustic wave devices; Surface roughness; Zinc Oxide

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM NITRIDE; METHANE; NUCLEATION; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; ZINC OXIDE;

GAS MIXTURES; INTER-DIGITAL TRANSDUCERS (IDT); PIEZOELECTRIC FILMS;

DIAMONDS;

DIAMOND;

EID: 2442610775     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.10.075     Document Type: Article

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