Laser micromachining of sputtered DLC films

Applied Surface Science

Volumn 252, Issue 13 SPEC. ISS., 2006, Pages 4914-4918

  Fu, Y Q ^a   Luo, J K ^a   Flewitt, A J ^a   Ong, S E ^b   Zhang, S ^b   Milne, W I ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

DLC; Laser micromachining; Microcantilever

Indexed keywords

CANTILEVER BEAMS; LASER APPLICATIONS; MICROSTRUCTURE; REACTIVE ION ETCHING; SPUTTERING; THIN FILMS;

DLC; LASER MICROMACHINING; MICROCANTILEVER; SUBSTRATE HEATING;

MICROMACHINING;

EID: 33646547654     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.06.054     Document Type: Article

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