A PECVD diamond device for chemical gas sensing applications

Diamond and Related Materials

Volumn 7, Issue 11-12, 1998, Pages 1723-1726

  Gurbuz, Y ^a   Kang, W P ^a   Davidson, J L ^a   Kerns, D V ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

Applications; Diamond film; Diode; Polycrystalline

Indexed keywords

CHEMICAL SENSORS; CURRENT VOLTAGE CHARACTERISTICS; DIAMOND FILMS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REDUCTION; TEMPERATURE;

DIAMOND BASED MICROELECTRONIC GAS SENSOR; OXYGEN VACANCIES;

SEMICONDUCTING DIAMONDS;

EID: 0032288657     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00312-4     Document Type: Article

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