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Volumn 127, Issue 3, 2005, Pages 537-547

Tribological study of microbearings for MEMS applications

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTROPLATING; HYDROCARBONS; LITHOGRAPHY; MORPHOLOGY; X RAY ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 22344449820     PISSN: 07424787     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1924428     Document Type: Article
Times cited : (20)

References (24)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.