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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 6 B, 2003, Pages 3867-3870

Pattern transfer of self-ordered structure with diamond mold

(5) Ono, Takahito a Konoma, Chihiro a Miyashita, Hidetoshi a Kanamori, Yoshiaki a Esashi, Masayoshi a

a TOHOKU UNIVERSITY (Japan)

Author keywords

Diamond mold; Fast atom beam; Nanoimprint lithography; Pattern transfer; Porous almina

Indexed keywords

ALUMINA; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; DIAMONDS; MASKS; PATTERN RECOGNITION; POLYMETHYL METHACRYLATES; SEMICONDUCTING GLASS; THIN FILMS;

PATTERN TRANSFER;

PHOTOLITHOGRAPHY;

EID: 0041361685 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.42.3867 Document Type: Conference Paper

Times cited : (25)

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