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Volumn 42, Issue 6 B, 2003, Pages 3867-3870

Pattern transfer of self-ordered structure with diamond mold

Author keywords

Diamond mold; Fast atom beam; Nanoimprint lithography; Pattern transfer; Porous almina

Indexed keywords

ALUMINA; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; DIAMONDS; MASKS; PATTERN RECOGNITION; POLYMETHYL METHACRYLATES; SEMICONDUCTING GLASS; THIN FILMS;

EID: 0041361685     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.3867     Document Type: Conference Paper
Times cited : (25)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.