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Volumn 42, Issue 6 B, 2003, Pages 3867-3870
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Pattern transfer of self-ordered structure with diamond mold
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Author keywords
Diamond mold; Fast atom beam; Nanoimprint lithography; Pattern transfer; Porous almina
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Indexed keywords
ALUMINA;
CHEMICAL VAPOR DEPOSITION;
CRYSTAL STRUCTURE;
DIAMONDS;
MASKS;
PATTERN RECOGNITION;
POLYMETHYL METHACRYLATES;
SEMICONDUCTING GLASS;
THIN FILMS;
PATTERN TRANSFER;
PHOTOLITHOGRAPHY;
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EID: 0041361685
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.42.3867 Document Type: Conference Paper |
Times cited : (25)
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References (16)
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