Preparation of microstructure bodies in freestanding diamond-like carbon foil prepared using plasma-based ion implantation

Diamond and Related Materials

Volumn 16, Issue 2, 2007, Pages 292-295

  Yamamoto, Ryoichi ^a   Miyashita, Kiyoshi ^a   Hayashi, Hiroshi ^b   Inoue, Kazuhisa ^b  

^a Gunma Prefectural Industrial Technology Center   (Japan)

^b Maebashi Factory   (Japan)

Author keywords

Diamond like carbon; Micro electromechanical systems (MEMS)

Indexed keywords

DIAMOND LIKE CARBON FILMS; ION IMPLANTATION; MICROELECTROMECHANICAL DEVICES; PLASMA ETCHING; SUBSTRATES; VOLTAGE CONTROL;

HEALTHCARE CHIP DEVICES; PLASMA-BASED ION IMPLANTATION (PBII); ROOM TEMPERATURE;

MICROSTRUCTURE;

EID: 33846383740     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.06.004     Document Type: Article

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