Strain-driven self-positioning of micromachined structures

Applied Physics Letters

Volumn 78, Issue 19, 2001, Pages 2852-2854

  Vaccaro, Pablo O ^a   Kubota, Kazuyoshi ^a   Aida, Tahito ^a  

^a ADVANCED TELECOMMUNICATIONS RESEARCH INSTITUTE INTERNATIONAL   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035821114     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1371525     Document Type: Article

References (9)

1. Issue on Microoptoelectromechanical Systems (MOEMS), IEEE J. Sel. Top. Quantum Electron. 5, (1999).
2. R. P. Ribas, J. L. Leclercq, J. M. Karam, B. Courtois, and P. Viktorovitch, Mater. Sci. Eng., B 51, 267 (1998).
3. Y. Uenishi, H. Tanaka, and H. Ukita, IEEE Trans. Electron Devices 41, 1778 (1994).
4. V. Ya. Prinz, V. A. Seleznev, V. A. Samoylov, and A. K. Gutakovsky, Microelectron. Eng. 30, 439 (1996).
5. V. Ya. Prinz, V. A. Seleznev, A. K. Gutakovsky, A. V. Chehovskiy, V. V. Preobrazenskii, M. A. Putyato, and L. A. Nenasheva, Proceeding of the 26th International Symposium on Compound Semiconductors, Berlin, 22-26 August 1999, p. 199.
6. H. Sutoh, Zairyo System Gaku (Uchida Rokakuho, Tokyo, 1986), pp. 111.
7. R. I. Cottam and G. A. Saunders, J. Phys. C 6, 2105 (1973).
8. P. Bhattacharya, Properties of Lattice-Matched and Strained Indium Gallium Arsenide EMIS Datareviews Series No. 8 (INSPEC, London, 1993), pp. 9.
9. J. W. Matthews and A. E. Blakeslee, J. Cryst. Growth 27, 118 (1974).