Normally closed microgrippers using a highly stressed diamond-like carbon and Ni bimorph structure

Applied Physics Letters

Volumn 85, Issue 23, 2004, Pages 5748-5750

  Luo, J K ^a   Flewitt, A J ^a   Spearing, S M ^b   Fleck, N A ^a   Milne, W I ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROCAGES; MICROGRIPPERS; MICROTWEEZERS; THICKNESS RATIO;

BIOMEDICAL ENGINEERING; CELLS; COMPRESSIVE STRENGTH; CRYSTALLINE MATERIALS; ELECTRIC POTENTIAL; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; THERMAL EXPANSION; THERMAL STRESS; THIN FILMS;

DIAMOND LIKE CARBON FILMS;

EID: 12844271611     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1833555     Document Type: Article

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