Piezoresistive sensors on plastic substrates using doped microcrystalline silicon

IEEE Sensors Journal

Volumn 2, Issue 4, 2002, Pages 336-340

  Alpuim, Pedro ^a,b   Chu, Virginia ^a   Conde, João Pedro ^c  

^a INESC   (Portugal)

^b UNIVERSITY OF MINHO   (Portugal)

^c INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; CRYSTALLIZATION; DOPING (ADDITIVES); POLYETHYLENE TEREPHTHALATES; STRAIN;

MICROCRYSTALLINE SILICON;

PIEZOELECTRIC DEVICES;

EID: 0012778385     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2002.804037     Document Type: Article

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