Diamond as an active sensor material

Diamond and Related Materials

Volumn 8, Issue 8-9, 1999, Pages 1741-1747

  Davidson, J L ^a   Kang, W P ^a   Gurbuz, Y ^a   Holmes, K C ^a   Davis, L G ^a   Wisitsora at, A ^a   Kerns, D V ^a   Eidson, R L ^b   Henderson, T ^b  

^a VANDERBILT UNIVERSITY   (United States)

^b Physitron Inc   (United States)

Author keywords

Applications; Diamond films; Electrical properties; Micromachining

Indexed keywords

CARRIER MOBILITY; CHEMICAL VAPOR DEPOSITION; ELECTRIC BREAKDOWN OF SOLIDS; ELECTROCHEMICAL SENSORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; THERMAL CONDUCTIVITY OF SOLIDS;

DIAMOND BASED CHEMICAL GAS SENSOR; DIAMOND PRESSURE MICROSENSOR;

DIAMOND FILMS;

EID: 0032594127     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(99)00082-5     Document Type: Article

References (11)

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