Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure

Sensors and Actuators, A: Physical

Volumn 132, Issue 1 SPEC. ISS., 2006, Pages 346-353

  Luo, J K ^a   Huang, R ^a   He, J H ^a   Fu, Y Q ^a   Flewitt, A J ^a   Spearing, S M ^b   Fleck, N A ^a   Milne, W I ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Bilayer; DLC; Microcage; Microgripper; Thermal actuator; Trilayer

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; THERMAL EFFECTS; THERMAL EXPANSION;

MICROCAGES; MICROGRIPPER; THERMAL ACTUATORS;

MICROACTUATORS;

EID: 33751095166     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.03.004     Document Type: Article

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