Materials science: The ultrasmoothness of diamond-like carbon surfaces

Science

Volumn 309, Issue 5740, 2005, Pages 1545-1548

  Moseler, Michael ^a,b   Cumbsch, Peter ^a,c   Casiraghi, Cinzia ^d   Ferrari, Andrea C ^d   Robertson, John ^d  

^a FRAUNHOFER INSTITUTE FOR MECHANICS OF MATERIALS IWM   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

^c UNIVERSITY OF KARLSRUHE   (Germany)

^d UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; CARBON; COATING TECHNIQUES; COMPUTER SIMULATION; DIAMOND LIKE CARBON FILMS; ELECTRIC CURRENTS; POLISHING;

ATOMIC SCALE; ION DEPOSITION; NANOPATTERNING; ULTRASMOOTHNESS;

SURFACE ROUGHNESS;

CARBON; DIAMOND; METAL OXIDE; SILICON;

SCIENCE IN GENERAL;

ARTICLE; ATOMIC FORCE MICROSCOPY; ENERGY; FILM; MATERIALS; MEASUREMENT; MOLECULAR DYNAMICS; PHYSICAL PARAMETERS; PRIORITY JOURNAL; QUANTUM MECHANICS;

EID: 24644496168     PISSN: 00368075     EISSN: None     Source Type: Journal    
DOI: 10.1126/science.1114577     Document Type: Article

References (33)

1. J. Robertson, Mat. Sci. Eng. R 37, 129 (2002).
2. A. C. Ferrari, Surf. Coat. Technol. 180, 190 (2004).
3. M. Allon-Alaluf, J. Appelbaum, M. Maharizi, A. Seidman, N. Croitoru, Thin Solid Films 303, 273 (1997).
4. J. Brand, G. Beckmann, B. Blug, G. Konrath, T. Hollstein, Ind. Lubr. Tribol. 54, 291 (2002).
5. R. Hauert, Diamond Relat. Mater. 12, 583 (2003).
6. J. P. Sullivan, T. A. Friedmann, K. Hjort, MRS Bull. 26, 309 (2001).
7. A. C. Ferrari et al., Phys. Rev. B 62, 11089 (2000).
8. Y. Lifshitz, G. D. Lempert, E. Grossman, Phys. Rev. Lett. 72, 2753 (1994).
9. X. Shi, L. Cheah, J. R. Shi, S. Zun, B. K. Tay, J. Phys. C 11, 185 (1999).
10. C. Casiraghi et al., Phys. Rev. Lett. 91, 226104 (2003).
11. J. Robertson, Thin Solid Films 383, 81 (2001).
12. P. R. Coglia, J. Berkowitz, J. Hoehn, A. Xidis, L. Stover, Diamond Relat. Mater. 10, 271 (2001).
13. D. Li, M. U. Guruz, C. S. Bhatia, Appl. Phys. Lett. 81, 81 (2002).
14. T. Yamamoto, Y. Kasamatsu, H. Hyodo, Fujitsu Sci. Tech. J. 37, 201 (2001).
15. Y. Lifshitz, S. R. Kasi, J. W. Rabalais, Phys. Rev. Lett. 62, 1290 (1989).
16. J. Schwan et al., J. Appl. Phys. 79, 1416 (1996).
17. Z. W. Zhao, B. K. Tay, L. Huang, C. Q. Yu, J. Phys. D Appl. Phys. 37, 1701 (2004).
18. A. L. Barabasi, H. E. Stanley, Eds., Fractal Concepts in Surface Growth (Cambridge Univ. Press, Cambridge, 1995).
19. X. L. Peng, Z. H. Barber, T. W. Clyne, Surf. Coat. Technol. 138, 23 (2001).
20. G. Pearce, N. Marks, D. McKenzie, M. Bilek, Diamond Relat. Mater. 14, 921 (2005).
21. T. Frauenheim et al., J. Phys. Condens. Matter 14, 3015 (2002).
22. D. W. Brenner, Phys. Rev. B 42, 8458 (1990).
23. H. U. Jäger, K. Albe, J. Appl. Phys. 88, 1129 (2000).
24. M. Moseler, O. Rattunde, J. Nordiek, H. Haberland, Nucl. Instrum. Methods B 164-165, 522 (2000).
25. O. Rattunde et al., J. Appl. Phys. 90, 3226 (2001).
26. (I)).
27. C. A. Davis, G. A. J. Amaratunga, K. M. Knowles, Phys. Rev. Lett. 80, 3280 (1998).
28. S. Uhlmann, Th. Frauenheim, Y. Lifshitz, Phys. Rev. Lett. 81, 641 (1998).
29. S. F. Edwards, D. R. Wilkinson, Proc. R. Soc. London A 381, 17 (1982).
30. W. W. Mullins, J. Appl. Phys. 30, 77 (1959).
31. E. Spiller et al., Appl. Opt. 42, 4049 (2003).
32. J. Tersoff, Phys. Rev. B 39, 5566 (1988).
33. We thank B. Huber and P. Koskinen for technical assistance, M. Mrovec for fruitful discussions, and D. P. Chu for providing AFM facilities at the Epson Research Laboratory, Cambridge. This research is supported by the Fraunhofer MAVO for Multiscale Materials Modelling (MMM) and by the FOSTOMA project of the Wirtschaftsministerium Baden-Württemberg. Simulations were performed on the CEMI cluster of the Fraunhofer institutes EMI, ISE, and IWM. Funding from European Union project FAMOUS is acknowledged. A.C.F. acknowledges funding from The Royal Society.