Oxide materials for development of integrated gas sensors - A comprehensive review

Critical Reviews in Solid State and Materials Sciences

Volumn 29, Issue 3-4, 2004, Pages 111-188

  Eranna, G ^a   Joshi, B C ^a   Runthala, D P ^a   Gupta, R P ^a  

^a CENTRAL ELECTRONICS ENGINEERING RESEARCH INSTITUTE   (India)

Author keywords

Gas sensing materials; Integrated micro gas sensors; Metal oxide gas sensors; Sensor response time; Silicon gas sensors

Indexed keywords

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; ETCHING; GRAIN GROWTH; GRAIN SIZE AND SHAPE; MICROMACHINING; PARAMETER ESTIMATION; POLYCRYSTALLINE MATERIALS; RELIABILITY; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SYNTHESIS (CHEMICAL); THERMAL EFFECTS;

GAS SENSING MATERIALS; INTEGRATED GAS SENSORS; INTEGRATED MICRO GAS SENSORS; ION-SENSITIVE FIELD EFFECT TRANSISTOR (ISFET); LOW-POWER DISSIPATION; METAL OXIDE GAS SENSORS; SENSOR RESPONSE TIME; SILICON GAS SENSORS;

MOS DEVICES;

EID: 13244295856     PISSN: 10408436     EISSN: None     Source Type: Journal    
DOI: 10.1080/10408430490888977     Document Type: Article

References (287)

1. A. Mandeles and C. Christofides, Physics, Chemistry and Technology of Solid State Gas Sensor Devices (John Wiley & Sons, Inc., New York, 1993).
2. D. M. Wilson and S. P. DeWeerth, Signal Processing for Improving Gas Sensor Response Time, Sensors and Actuators B41, 63-70 (1997).
3. J. S. G. D. Santos-Alves and R. F. Patier, The Environmental Control of Atmospheric Pollution. The Framework Directive and Its Development. The New European Approach, Sensors and Actuators B59, 69-74 (1999).
4. 2 Sensor, Sensors and Actuators B34, 388-395 (1996).
5. T. Doll, J. Lechner, I. Eisele, K.-D. Schierbaum, and W. Göpel, Ozone Detection in the ppb Range with Work Function Sensors Operating at Room Temperature, Sensors and Actuators B34, 506-510 (1996).
6. C.-N. Xu, K. Miyazaki, and T. Watanabe, Humidity Sensors using Manganese Oxides, Sensors and Actuators B46, 87-96 (1998).
7. J. Clements, N. Boden, T. D. Gibson, R. C. Chandler, J. N. Hulbert, and E. A. Ruck-Keene, Novel, Self-Organizing Materials for Use in Gas Sensor Arrays: Beating the Humidity Problem, Sensors and Actuators B47, 37-42 (1998).
8. C. N. R. Rao, A. R. Raju, and K. Vijayamohanan, Gas-Sensor Materials, in New Materials (S. K. Joshi, T. Tsuruta, C. N. R. Rao, and S. Nagakura, Eds., Narosa, New Delhi, 1992, and the references therein).
9. P. Althainz, J. Goschnick, S. Ehrmann, and H. J. Ache, Multisensor Microsystem for Contaminants in Air, Sensors and Actuators B33, 72-76 (1996).
10. S. Middelhock and S. A. Audet, Silicon Sensors, Academic Press, London, 1989, and the references therein.
11. P. Bergveld, Development of an Ion-Sensitive Solid-State Device for Neurophysiological Measurements, IEEE Trans. Biomed. Eng., BME-17, 70-71 (1970).
12. I. Lundstrom, S. Shivaraman, C. Svensson, and L. Lundkvist, Hydrogen-Sensitive MOS Field-Effect Transistor, Appl. Phys. Lett. 26, 55-57 (1975).
13. S.-J. Jung and H. Yanagida, The Characterization of a CuO/ZnO Heterocontact-Type Gas Sensor having Selectivity for CO Gas, Sensors and Actuators B37, 55-60 (1996).
14. 2 Capture from High Temperature Gases, J. Electrochem. Soc. 145, 1344-1346 (1998).
15. 2-Sensing Layers, Sensors and Actuators B57, 39-46 (1999).
16. A. Fuchs, M. Bögner, T. Doll, and I. Eisele, Room Temperature Ozone Sensing with KI Layers Integrated in HSGFET Gas Sensors, Sensors and Actuators B48, 296-299 (1998).
17. 3 Thin-Film Sensitive Coating, Sensors and Actuators B41, 31-36 (1997).
18. 4, Sensors and Actuators B46, 1-7 (1998).
19. S. V. Ryabtsev, A. V. Shaposhnick, A. N. Lukin, and E. P. Domashevskaya, Application of Semiconductor Gas Sensors for Medical Diagnostics, Sensors and Actuators B59, 26-29 (1999).
20. H. Zhu, T.-C. Lo, R. Lenigk, and R. Renneberg, Fabrication of a Novel Oxygen Sensor with CMOS Compatible Processes, Sensors and Actuators B46, 155-159 (1998).
21. 2 Thin Film Gas Sensors for Fire-Alarm Systems, Sensors and Actuators B54, 191-196 (1999) and the references therein.
22. 4, Sensors and Actuators A61, 298-302 (1997).
23. M. Madou, Fundamentals of Microfabrication (CRC Press, Boca Raton, 1997, and the references therein).
24. G. Faglia, E. Comini, A. Cristalli, G. Sbereglieri, and L. Dori, Very Low Power Consumption Micromachined CO Sensors, Sensors and Actuators B55, 140-146 (1999).
25. 2 Thin Film Gas Sensors (TFGS), Sensors and Actuators B54, 202-209 (1999).
26. 2 Detection, Sensors and Actuators B58, 552-555 (1999).
27. W.-Y. Chung, G. Sakai, K. Shimanoe, N. Miura, D.-D. Lee, and N. Yamazoe, Preparation of Indium Oxide Thin Film by Spin-Coating Method and Its Gas-Sensing Properties, Sensors and Actuators B46, 139-145 (1998).
28. S. Jonda, M. Fleischer, and H. Meixner, Temperature Control of Semiconductor Metal-Oxide Gas Sensors by Means of Fuzzy Logic, Sensors and Actuators B34, 396-400 (1996).
29. T. Rantala, V. Lantto, and T. Rantala, Computational Approaches to the Chemical Sensitivity of Semiconducting Tin Dioxide, Sensors and Actuators B47, 59-64 (1998).
30. J. Mizsei, How can Sensitive Semiconductor Gas Sensors be Made? Sensors and Actuators B23, 173-176 (1995).
31. S. Marco, A. Pardo, F. A. M. Davide, C. D. Natale, A. D'Amico, A. Hierlemann, J. Mitrovics, M. Schweizer, U. Weimar, and W. Göpel, Different Strategies for the Identification of Gas Sensing Systems, Sensors and Actuators, B34, 213-223 (1996).
32. H. Kobayashi, Four Essential Points in Developing Automotive Sensors, Sensors and Actuators A57, 53-63 (1996).
33. H. Geistlinger, Chemisorption Effects on the Thin-Film Conductivity, Surface Science 277, 429-441 (1992).
34. S. Strässler and A. Reis, Simple Models for N-Type Metal Oxide Gas Sensors, Sensors and Actuators 4, 465-472 (1983).
35. J. Getino, L. Aris, J. I. Robla, M. C. Horrillo, I. Sayago, M. J. Fernández, J. Rodrigo, and J. Gutiérrez, Environmental Applications of Gas Sensor Arrays: Combustion Atmospheres and Contaminated Soils, Sensors and Actuators B59, 249-254 (1999).
36. Y. Xu, X. Zhou, and O. T. Sorensen, Oxygen Sensors Based on Semiconducting Metal Oxides: An Overview, Sensors and Actuators B65, 2-4 (2000).
37. A. A. Tomchenko, G. P. Harmer, B. T. Marquis, and J. W. Allen, Semiconducting Metal Oxide Sensor Array for the Selective Detection of Combustion Gases, Sensors and Actuators B93, 126-134 (2003).
38. M. L. Post, J. J. Tunney, D. Yang, X. Du, and D. L. Singleton, Material Chemistry of Perovskite Compounds as Chemical Sensors, Sensors and Actuators B59, 190-194 (1999).
39. 2 Gas Sensor Using Coloration Reactions in Porous Glass, Sensors and Actuators B56, 247-253 (1999).
40. A. Galdikas, S. Kačiulis, G. Mattogno, A. Mironas, D. Senuliene, and A. Šetkus, Stability and Oxidation of the Sandwich Type Gas Sensors based on Thin Metal Films, Sensors and Actuators B48, 376-382 (1998).
41. V. G. Litovchenko, T. I. Gorbanyuk, A. A. Efremov, A. A. Evtukh, and D. Schipanski, Investigation of MIS Gas Sensitive Structures with Pd and Pd/Cu Metal Layers, Sensors and Actuators 74, 233-236 (1999).
42. R. K. Nahar, Study of the Performance Degradation of Thin Film Aluminum Oxide Sensor at High Humidity, Sensors and Actuators B63, 49-54 (2000).
43. T. Seiyama and S. Kagawa, Study on a Detector for Gaseous Components using Semiconductive Thin Films, Analytical Chemistry 38, 1069-1073 (1966).
44. V. E. Henrich and P. A. Cox, The Surface Science of Metal Oxides (Cambridge University Press, 1994, and the references therein).
45. B. Patissier, Humidity Sensors for Automotive, Appliances and Consumer Applications, Sensors and Actuators B59, 231-234 (1999).
46. 3 Humidity Sensor, International Journal of Electronics 52, 557-567 (1982).
47. 3 Sensor for Low Humidity Content: Characterization by Impedance Spectroscopy, Sensors and Actuators B32, 1-5 (1996).
48. 2/Si Sensor for Low and Medium Humidity Ranges, Sensors and Actuators B23, 177-180 (1995).
49. 3+, Sensors and Actuators B64, 54-58 (2000).
50. 3 Sesquioxide, Sensors and Actuators B35-36, 241-243 (1996).
51. 3: A Suitable System for Selective Carbon Monoxide Detection, J. Electrochem. Soc. 145, 1039-1044 (1998).
52. 2 Thick and Thin Films, Sensors and Actuators B4, 393-399 (1991).
53. S. V. Manorama, N. Izu, W. Shin, I. Matsubara, and N. Murayama, On the Platinum Sensitization of Nanosized Cerium Dioxide Oxygen Sensors, Sensors and Actuators B89, 299-304 (2003).
54. 3/CuO Ceramics, Sensors and Actuators B65, 128-132 (2000).
55. 2 Sol-gel Thin Films, Sensors and Actuators B66, 46-48 (2000).
56. 2 Materials, Sensors and Actuators B92, 167-170 (2003).
57. M. Egashira, Y. Shimizu, and Y. Takao, Trimethylamine Sensor based on Semiconductive Metal Oxides for Detection of Fish Freshness, Sensors and Actuators B1, 108-112 (1990).
58. P. T. Moseley and D. E. Williams, A Selective Ammonia Sensor, Sensors and Actuators B1, 113-115 (1990).
59. 2 Thin Films, Sensors and Actuators B83, 160-163 (2002).
60. D. P. Runthala, R. P. Gupta, P. D. Vyas, G. Eranna, R. Paris, and D. Schipanski, A Material for Room Temperature FET Sensor to Detect Ammonia and Hydrocarbon Gases, Indian Journal of Engineering & Materials Sciences 7, 336-339 (2000).
61. 3 to Selectively Detect Nitrogen Monoxide, J. Electrochem. Soc. 143, 1908-1914 (1996).
62. M. Frietsch, F. Zudock, J. Goschnick, and M. Bruns, CuO Catalytic Membrane as Selectivity Trimmer for Metal Oxide Gas Sensors, Sensors and Actuators B65, 379-381 (2000).
63. 2/CuO Heterocontacts, J. Electrochem. Soc. 142, 2754-2757 (1995).
64. 2 Gas Sensitivity of the CuO/ZnO Heterocontact Made by Quenched CuO Ceramics, J. Electrochem. Soc. 145, 632-638 (1998).
65. 3 Thin Film Sensors for Enhancement of the Sensitivity and Selectivity, Sensors and Actuators B35-36, 290-296 (1996).
66. Z. Gergintschew, H. Förster, J. Kositza, and D. Schipanski, Two-Dimensional Numerical Simulation of Semiconductor Gas Sensors, Sensors and Actuators B26-27, 170-173 (1995).
67. M. Fleischer and H. Meixner, Fast Gas Sensors based on Metal Oxides which are Stable at High Temperatures, Sensors and Actuators B43, 1-10 (1997).
68. 3 Thin Film Sensors with Rh, Ru and Ir Clusters, Sensors and Actuators B66, 80-84 (2000).
69. 3 Studied by XPS and Conductivity Measurements, Sensors and Actuators B48, 373-375 (1998).
70. 3 Thick Films, Sensors and Actuators B48, 318-321 (1998).
71. 3 Thin Films, Sensors and Actuators B34, 373-377 (1996).
72. 3 Thin Films, Sensors and Actuators B65, 176-180 (2000).
73. T. Doll, A. Fuchs, I. Eisele, G. Faglia, S. Groppelli, and G. Sberveglieri, Conductivity and Work Function Ozone Sensors Based on Indium Oxide, Sensors and Actuators B49, 63-67 (1998).
74. 3, Sensors and Actuators B47, 92-99, (1998, and the references therein).
75. T. Takada, K. Suzuki, and M. Nakane, Highly Sensitive Ozone Sensor 4th ICMS, Tokyo, 470-473 (1992).
76. T. Doll, A. Fuchs, I. Eisele, G. Faglia, S. Groppelli, and G. Sberveglieri, Room Temperature Ozone Sensing with Conductivity and Work Function Sensors based on Indium Oxide, Tech. Digest Transducers '97, Chicago, June 16-19, 577-580 (1997).
77. 3 Thin Films for Ozone Sensing, Tech. Digest Transducers '97, Chicago, June 16-19, pp. 573-576 (1997).
78. 3 Thin Film Gas Sensors Prepared by Sol-gel and Vacuum Thermal Evaporation Techniques, Sensors and Actuators B65, 101-104 (2000).
79. H. Yamaura, T. Jinkawa, J. Tamaki, K. Moriya, N. Miura, and N. Yamazoe, Indium Oxide-based Gas Sensor for Selective Detection of CO, Sensors and Actuators B35-36, 325-332 (1996).
80. S.-M. Lee, Y.-S. Lee, C.-H. Shim, N.-J. Choi, B.-S. Joo, K.-D. Song, J.-S. Huh, and D.-D. Lee, Three Electrode Gas Sensor based on ITO Thin Film, Sensors and Actuators B93, 31-35 (2003).
81. J. Tamaki, C. Naruo, Y. Yamamoto, and M. Matsuoka, Sensing Properties to Dilute Chlorine Gas of Indium Oxide based Thin Film Sensors Prepared by Electron Beam Evaporation, Sensors and Actuators B83, 190-194 (2002).
82. 3-based Semiconductor Thick Films, Sensors and Actuators B66, 59-62 (2000).
83. E. Comini, A. Cristalli, G. Faglia, and G. Sberveglieri, Light Enhanced Gas Sensing Properties of Indium Oxide and Tin Dioxide Sensors, Sensors and Actuators B65, 260-263 (2000).
84. J. Hu, F. Zhu, J. Zhang, and H. Gong, A Room Temperature Indium Tin Oxide/Quartz Crystal Microbalance Gas Sensor for Nitric Oxide, Sensors and Actuators B93, 175-180 (2003).
85. H. Yamaura, K. Moriya, N. Miura, and N. Yamazoe, Mechanism of Sensitivity Promotion in CO Sensor using Indium Oxide and Cobalt Oxide, Sensors and Actuators B65, 39-41 (2000).
86. B. P. J. d. L. Costello, R. J. Ewen, N. M. Ratcliffe, and P. S. Sivanand, Thick Film Organic Vapour Sensors based on Binary Mixtures of Metal Oxides, Sensors and Actuators B92, 159-166 (2003).
87. R. M. Geatches, A. V. Chadwick, and J. D. Wright, Single Crystal Metal Oxide Gas Sensors, Sensors and Actuators B4, 467-472 (1991).
88. 3 Thin Films Prepared by LPD, Sensors and Actuators B82, 40-47 (2002).
89. 3 Thin Films for Humidity Sensors, Sensors and Actuators B92, 326-330 (2003).
90. 3 Ceramic Gas Sensor, IEEE Trans. Compon. Hybrids Manuf. Technol. CHMT-5 (4), 522-527 (1982).
91. E. Comini, V. Guidi, C. Frigeri, I. Riccò, and G. Sberveglieri, CO Sensing Properties of Titanium and Iron Oxide Nanosized Thin Films, Sensors and Actuators B77, 16-21 (2001).
92. 3 Ethanol Sensors, Sensors and Actuators B65, 361-365 (2000).
93. 2 Solid Solution System, Sensors and Actuators B63, 129-134 (2000).
94. 3 Detection, Sensors and Actuators B35-36, 320-324 (1996).
95. 2 Detection, Sensors and Actuators B48, 285-288 (1998).
96. 3 Gas Sensors, Sensors and Actuators B64, 193-197 (2000).
97. 2 Thin Film Gas Sensors for Selective Ammonia Detection, Sensors and Actuators B93, 25-30 (2003).
98. A. Taurino, M. Catalano, P. Siciliano, E. Comini, and G. Sberveglieri, Structural and Electrical Characterisation of Molybdenum-Titanium Mixed Oxides for Ethanol Sensing Deposited by RF Sputtering, Sensors and Actuators B92, 286-291 (2003).
99. 3 Sol-gel Gas Sensors, Sensors and Actuators, B83, 276-280 (2002, and the references therein).
100. A. Neubecker, T. Pompl, T. Doll, W. Hansch, and I. Eisele, Ozone-Enhanced Molecular Beam Deposition of Nickel Oxide (NiO) for Sensor Applications, Thin Solid Films 310, 19-23 (1997).
101. 3 Gases, Sensors and Actuators B60, 138-147 (1999).
102. 5 Semiconducting Oxide in the Presence of Interferent Species Such as Oxygen and Humidity, Sensors and Actuators B45, 107-114 (1997).
103. 3 Gases, Sensors and Actuators B43, 60-64 (1997).
104. 5 Thin Film by Ion-Beam-Enhanced Deposition, Sensors and Actuators B32, 209-213 (1996).
105. 5 System for an Ethanol Vapour Sensor: A Correlation between Microstructure and Sensor Performance, Sensors and Actuators B72, 180-183 (2001).
106. M. Kimura, Absolute-Humidity Sensing Independent of the Ambient Temperature, Sensors and Actuators A55, 7-11 (1996).
107. x Conductance-Modulation Carbon Monoxide Sensor, J. Electrochem. Soc. 126, 627-633 (1979).
108. L. N. Yannopoulos, A p-Type Semiconductor Thick Film Gas Sensor, Sensors and Actuators 12, 263-273 (1987).
109. C. Fujimoto, Y. Hayakawa, and A. Ono, Evaluation of the Efficiency of Deodorants by Semiconductor Gas Sensors, Sensors and Actuators B32, 191-194 (1996).
110. 2 and CO in Solid State Commercial Sensors, Sensors and Actuators B58, 469-473 (1999).
111. X. Vilanova, E. Llobet, R. Alcubilla, J. E. Sueiras, and X. Correig, Analysis of the Conductance Transient in Thick-Film Tin Oxide Gas Sensors, Sensors and Actuators B31, 175-180 (1996).
112. Z. Tang, S. K. H. Fung, D. T. W. Wong, P. C. H. Chan, J. K. O. Sin, and P. W. Cheung, An Integrated Gas Sensor based on Tin Oxide Thin-film and Improved Micro-hot Plate, Sensors and Actuators B46, 174-179 (1998).
113. 2-Based Sensor-Array Performance, Sensors and Actuators B23, 187-191 (1995).
114. 2 Detection by Tin Dioxide Gas Sensors, Sensors and Actuators B43, 147-153 (1997).
115. P. Romppainen, V. Lantto, and S. Leppävuori, Effect of Water Vapour on the CO Response behaviour of Tin Dioxide Sensors in Constant Temperature and Temperature-Pulsed Modes of Operation, Sensors and Actuators B1, 73-78 (1990).
116. 2-based Thick Film Sensors, Sensors and Actuators B43, 45-51 (1997).
117. 2, Surface Science 86, 335-344 (1979).
118. 2 Detection: A Chemical Interpretation of the Increase in Sensitivity Obtained after a Primary Detection, Sensors and Actuators B45, 175-181 (1997).
119. 2 Gas Detection Devices, Sensors and Actuators B43, 126-131 (1997).
120. 2 Thin Films, J. Electrochem. Soc. 143, 1334-1338 (1996).
121. 2 in Gases, Sensors and Actuators 17, 377-384 (1989).
122. D. J. Yoo, J. Tamaki, S. J. Park, N. Miura, and N. Yamazoe, Effects of Thickness and Calcination Temperature on Tin Dioxide Sol-Derived Thin-Film Sensor, J. Electrochem. Soc. 142, L105-L107 (1995).
123. Z. Tang, G. Jiang, P. C. H. Chan, J. K. O. Sin, and S. S. Lau, Theory and Experiments on R.F. Sputtered Tin Oxide Thin-Films for Gas Sensing Applications, Sensors and Actuators B43, 161-164 (1997).
124. K.-D. Schierbaum, Engineering of Oxide Surfaces and Metal/Oxide Interfaces for Chemical Sensors: Recent Trends, Sensors and Actuators B24-25, 239-247 (1995).
125. H. Ogawa, A. Abe, M. Nishikawa, and S. Hayakawa, Electrical Properties of Tin Oxide Ultrafine Particle Films, J. Electrochem. Soc. 128, 2020-2025 (1981).
126. 2 Thick-film Planar Resistor, Sensors and Actuators B21, 159-163 (1994).
127. x Sensor, IEEE Trans. Elec Devices ED-26, 1875-1880 (1979).
128. S. Chang, Anal. Chem. Symp. Ser. 17, 78-83 (1983).
129. 2 Film for Work Function Sensors, Sensors and Actuators B78, 69-72 (2001).
130. 2 Thin Films by Reactive Sputtering on the Sensitivity to Urban Pollutants, Sensors and Actuators B45, 193-198 (1997).
131. S. Matsushima, N. Miura, and N. Yamazoe, Chem. Lett. 2001-2004 (1987).
132. 2, Sensors and Actuators B52, 30-37 (1998).
133. 2-based Ceramic Gas Sensors, Sensors and Actuators B41, 163-167 (1997).
134. D.-D. Lee, B.-K. Sohn, and D.-S. Ma, Low Power Thick Film CO Gas Sensors, Sensors and Actuators 12, 441-447 (1987).
135. 2 Gas Sensors, Sensors and Actuators B60, 64-70 (1999).
136. G. S. V. Coles, G. Williams, and B. Smith, The Effect of Oxygen Partial Pressure on the Response of Tin (IV) Oxide Based Gas Sensors, J. Phys. D: Appl. Phys. 24, 633-641 (1991).
137. L. Sangaletti, L. E. Depero, A. Dieguez, G. Marca, J. R. Morante, A. Romano-Rodriguez, and G. Sberveglieri, Microstructure and Morphology of Tin Dioxide Multilayer Thin Film Gas Sensor, Sensors and Actuators B44, 268-274 (1997).
138. 2 Gas Sensors, Sensors and Actuators B65, 91-93 (2000).
139. M. Egashira, Y. Shimizu, Y. Takao, and S. Sako, Variations in I-V Characteristics of Oxide Semiconductors Induced by Oxidizing Gases, Sensors and Actuators B35-36, 62-67 (1996).
140. 2 Concentrations in Air, Sensors and Actuators B43, 154-160 (1997).
141. 2 Subjected to Surface Chemical Modification with Ethoxysilanes, Sensors and Actuators B62, 211-219 (2000).
142. A. Friedberger, P. Kreisl, E. Rose, G. Müller, G. KÜhner, J. Wöllenstein, and H. Böttner, Micromechanical Fabrication of Robust Low-power Metal Oxide Gas Sensors, Sensors and Actuators B93, 345-349 (2003).
143. x Sensors Fabricated by a Reactive Ion-Assisted Deposition with/without an Activator Layer, Sensors and Actuators B40, 21-27 (1997).
144. 2/Ultrathin Pt Sandwich Structure, Sensors and Actuators B32, 87-92 (1996).
145. 2 Gate Electrode for CO Gas Sensing Applications, Sensors and Actuators B64, 163-168 (2000).
146. 2/Pt Thin Film with Silicon Integrated Circuit Processing, Sensors and Actuators B64, 49-53 (2000).
147. P. C. H. Chan, G.-Z. Yan, L.-Y. Sheng, R. K. Sharma, Z. Tang, J. K. O. Sin, I.-M. Hsing, and Y. Wang, An Integrated Gas Sensor Technology using Surface Micro-machining, Sensors and Actuators B82, 277-283 (2002).
148. H. Lorenz, M. Peschke, H. Riess, and I. Eisele, Technology and Application of Suspended Gate Field Effect Transistors for Gas Detection, Micro System Technologies 90 (H. Reichl Ed.), Springer Verlag, 1990, p. 651.
149. 2-x Thin Film with Added Pt Fabricated by the Dipping Method, Sensors and Actuators 20, 301-305 (1989).
150. F.-J. Schmitte and G. Wiegleb, Conductivity Behaviour of Thickfilm Tin Dioxide Gas Sensors, Sensors and Actuators B4, 473-477 (1991).
151. Y. Matsuuray, N. Murakami, and K. Ihokura, Anal. Chem. Symp. Ser. 17, 24-28 (1983).
152. 2 Gas Sensors, Sensors and Actuators 83, 69-74 (1991).
153. N. Yamazoe, Y. Kurokawa, and T. Seiyama, Anal. Chem. Symp. Ser. 17, 34-40 (1983).
154. 2, Sensors and Actuators B4, 87-94 (1991).
155. 2 Films by Superficial Metallic Films, Sensors and Actuators B58, 295-301 (1999).
156. 2-based Devices, Sensors and Actuators 18, 71-113 (1989).
157. 2 Thin Film Gas Sensors, Sensors and Actuators B43, 140-146 (1997).
158. 2 with Neural Signal Evaluation, Sensors and Actuators B35-36, 353-357 (1996).
159. C. Cobianu, C. Savaniu, O. Buiu, D. Dascalu, M. Zaharescu, C. Parlog, A. van den Berg, and B. Pecz, Tin Dioxide Sol-gel Derived Thin Films Deposited on Porous Silicon, Sensors and Actuators B43, 114-120 (1997).
160. 2 Thin Film Gas Sensor by Thorium, Sensors and Actuators B62, 117-120 (2000).
161. R. S. Niranjan, S. R. Sainkar, K. Vijayamohanan, and I. S. Mulla, Ruthenium: Tin Oxide Thin Film as a Highly Selective Hydrocarbon Sensor, Sensors and Actuators B82, 82-88 (2002).
162. R. K. Sharma, P. C. H. Chan, Z. Tang, G. Yan, I.-M. Hsing, and J. K. O. Sin, Sensitive, Selective and Stable Tin Dioxide Thin-films for Carbon Monoxide and Hydrogen Sensing in Integrated Gas Sensor Array Applications, Sensors and Actuators B72, 160-166 (2001).
163. 2 Thin Films with Variations in Indium Concentration, Sensors and Actuators B89, 173-179 (2003).
164. 2-based Gas Sensors: Vacancy Defects and Pd Additive Effects, Sensors and Actuators B1, 97-102 (1990).
165. 2 Thin Film Gas Sensor, J. Appl. Phy. 53, 2785-2787 (1982).
166. 4, Sensors and Actuators B61, 39-42 (1999).
167. 2 (Pd) for CO Detection, Sensors and Actuators B59, 260-264 (1999).
168. 2 Films with Pd and PdO Deposites, Sensors and Actuators 17, 355-359 (1989).
169. 2-based CO Gas Sensors Modified by Sulfuric Acid Treatment, Sensors and Actuators B62, 220-225 (2000).
170. x and CO, Sensors and Actuators B26-27, 19-23 (1995).
171. R. Rella, A. Serra, P. Siciliano, L. Vasanelli, G. De, A. Licciulli, and A. Quirini, Tin Oxide-based Gas Sensors Prepared by the Sol-gel Process, Sensors and Actuators B44, 462-467 (1997).
172. T. Oyabu, T. Osawa, and T. Kurobe, Sensing Characteristics of Tin Oxide Thick Film Gas Sensor, J. Appl. Phy. 53, 7125-7130 (1982).
173. 2 Thin Films: Analysis of the Metal Aggregate Size Effect, Sensors and Actuators B59, 210-215 (1999).
174. 2 Thin Films Doped with Pd/Pt Aggregates and used as Polluting Gas Sensors, Sensors and Actuators B62, 43-48 (2000).
175. N. Y. Shishkin, I. M. Zharsky, V. G. Lugin, and V. G. Zarapin, Air Sensitive Tin Dioxide Thin Films by Magnetron Sputtering and Thermal Oxidation Technique, Sensors and Actuators B48, 403-408 (1998).
176. 2 Sensors, Sensors and Actuators B97, 67-73 (2004).
177. K. Nomura, Y. Ujihira, S. S. Sharma, A. Fueda, and T. Murakami, Gas Sensitivity of Metal Oxide Mixed Tin Oxide Films Prepared by Spray Pyrolysis, Journal of Material Science 24, 937-941 (1989).
178. 2 Doped with Nb, V, Ti, or Mo, J. Electrochem. Soc. 125,
179. 2: Pt Thin Films used as Gas Sensors, Sensors and Actuators B45, 49-53 (1997).
180. 2 Hetero-Contact, Sensors and Actuators B61, 59-67 (1999).
181. 2-based Sensors, Sensors and Actuators B60, 208-215 (1999).
182. B. P. J. d. L. Costello, R. J. Ewen, P. R. H. Jones, N. M. Ratcliffe, and R. K. M. Wat, A Study of the Catalytic and Vapour-sensing Properties of Zinc Oxide and Tin Oxide in Relation to 1-butanol and Dimethyldisulphide, Sensors and Actuators B61, 199-207 (1999).
183. S. Saito, M. Miyayama, K. Koumoto, and H. Yanagida, Gas Sensing Characteristics of Porous ZnO and Pt/ZnO Ceramics, J. Am. Ceram. Soc. 68, 40-43 (1985).
184. 3 Based CO Sensor: Laser-Raman, Temperature Programmed Desorption and X-Ray Photoelectron Spectroscopic Studies, Sensors and Actuators B56, 98-105 (1999).
185. G. Williams and G. S. V. Coles, The Semistor: A New Concept in Selective Methane Detection, Sensors and Actuators B57, 108-114 (1999).
186. 2 Ceramic Sensors, Sensors and Actuators B48, 387-391 (1998).
187. 2 Solid Solutions for Gas Sensors, Sensors and Actuators B47, 194-204 (1998).
188. 2 on Gas Sensing Characteristics of Sputtered ZnO Thin Film Chemical Sensor, Sensors and Actuators B35-36, 384-387 (1996).
189. 2-based Thin Films, Sensors and Actuators B65, 111-113 (2000).
190. G. Sberveglieri, Recent Developments in Semiconducting Thin-Film Gas Sensors, Sensors and Actuators B23, 103-109 (1995).
191. 3-gas Sensors for Butane, Sensors and Actuators B92, 186-190 (2003).
192. 2 Detection, Sensors and Actuators E77, 12-15 (2001).
193. 2 Thick Film by Coating Lanthanum Oxide, Sensors and Actuators B62, 61-66 (2000).
194. x/Diamond, Sensors and Actuators B56, 151-154 (1999).
195. W. Hellmich, G. Müller, Ch. Bosch-v. Braunmühl, T. Doll, and I. Eisele, Field-Effect-Induced Gas Sensitivity Changes in Metal Oxides, Sensors and Actuators B43, 132-139 (1997).
196. 2 Sensor Device Featuring a JFET-Like Transducer Mechanism, Sensors and Actuators B47, 213-217 (1998).
197. 2-x Thin Films as Oxygen Sensor, Sensors and Actuators B66, 28-30 (2000).
198. 2 Thin Films Prepared by Supersonic Beams and their Application in a Sensor Array for the Discrimination of VOC, Sensors and Actuators B92, 292-302 (2003).
199. 2 Films Doped with Pt and Nb, Sensors and Actuators B64, 169-174 (2000).
200. 2 Oxygen Gas Sensor, Sensors and Actuators B45, 209-215 (1997).
201. 2 Thin Film Derived from Precursor, Sensors and Actuators B62, 55-60 (2000).
202. G. Sberveglieri, E. Comini, G. Faglia, M. Z. Atashbar, and W. Wlodarski, Titanium Dioxide Thin Films Prepared for Alcohol Microsensor Applications, Sensors and Actuators B66, 139-141 (2000).
203. 2 Thin Films and their Electronic Properties, Sensors and Actuators B66, 164-166 (2000).
204. 2 Oxygen Sensors, Sensors and Actuators B1, 103-107 (1990).
205. N. Yamamoto, S. Tonomura, T. Matsuoka, and H. Tsubomura, A Study on a Palladium - Titanium Oxide Schottky Diode as a Detector for Gaseous Components, Surface Sci. 92, 400-406 (1980).
206. 2, Sensors and Actuators B35-36, 381-383 (1996).
207. 2 Sensors Prepared by Coprecipitation and Precipitation Method, Sensors and Actuators B65, 331-335 (2000).
208. M. Ferroni, V. Guidi, G. Martinelli, P. Nelli, and G. Sberveglieri, Gas-Sensing Applications of W-Ti-O-Based Nano sized Thin Films Prepared by R.F. Reactive Sputtering, Sensors and Actuators B44, 499-502 (1991).
209. N. O. Savage, S. A. Akbar, and P. K. Dutta, Titanium Dioxide based High Temperature Carbon Monoxide Selective Sensor, Sensors and Actuators B72, 239-248 (2001).
210. 3 Thin Film, Sensors and Actuators B35-36, 112-118 (1996).
211. T. L. Royster, Jr., D. Chatterjee, G. R. Paz-Pujalt, and C. A. Marrese, Fabrication and Evaluation of Thin-film Solid-state Sensors for Hydrogen Sulfide Detection, Sensors and Actuators B53, 155-162 (1998).
212. L. J. LeGore, K. Snow, J. D. Galipeau, and J. F. Vetelino, The Optimization of a Tungsten Trioxide Film for Application in a Surface Acoustic Wave Gas Sensor, Sensors and Actuators B35-36, 164-169 (1996).
213. 2S-Sensitive Tungsten Oxide Films, Sensors and Actuators B31, 167-174 (1996).
214. 2S Sensors, Sensors and Actuators B1, 116-120 (1990).
215. W. Qu and W. Wlodarski, A Thin-film Sensing Element for Ozone, Humidity and Temperature, Sensors and Actuators B64, 42-48 (2000).
216. 3 Thick-Film Gas Sensors, Sensors and Actuators B46, 8-14 (1998).
217. 2 Gas Dependent on Process Condition, Sensors and Actuators B60, 49-56 (1999).
218. x Gas Sensor, Sensors and Actuators B62, 102-108 (2000).
219. 3 Thin Films Prepared by Sol-gel, Thermal Evaporation and R. F. Sputtering Techniques, Sensors and Actuators B64, 182-188 (2000).
220. 3 Element, Solid Sensors and Actuators B65, 163-165 (2000).
221. D.-S. Lee, J.-W. Lim, S.-M. Lee, J.-S. Huh, and D.-D. Lee, Fabrication and Characterization of Micro-gas Sensor for Nitrogen Oxides Gas Detection, Sensors and Actuators B64, 31-36 (2000).
222. 3 Thin Films as Ozone Gas Sensor, Sensors and Actuators B84, 1-5 (2002).
223. 3 Thin Films for Integrated Gas Sensor Applications, J. Electrochem. Soc. 145, 1346-1350 (1998).
224. 3-based Powder Sensor for the Detection of NO Gas in Air, Sensors and Actuators B89, 68-75 (2003).
225. 2 Gas Sensor Application, Sensors and Actuators B66, 171-173 (2000).
226. 3 and NO Detection, Sensors and Actuators B66, 74-76 (2000).
227. 3 Semiconductor Material, Solid-State Electronics 45, 639-644 (2001).
228. 2, Sensors and Actuators B45, 141-146 (1997).
229. 2, Sensors and Actuators B65, 125-127 (2000).
230. E. Pierson and J. M. Streydio, in High Tech Ceramics, P. Vincenzini, Ed. Elsevier, Amsterdam, 2173-2178 (1987).
231. U. Lampe and J. Müller, Thin-Film Oxygen Sensors Made of Reactively Sputtered ZnO, Sensors and Actuators 18, 269-284 (1989).
232. B. Bott, T. A. Jones, and B. Mann, The Detection and Measurement of CO using ZnO Single Crystals, Sensors and Actuators 5, 65-73 (1984).
233. 2O Plasma Etched ZnO Thin Films, Sensors and Actuators B92, 81-89 (2003).
234. A. R. Raju and C. N. R. Rao, Gas-sensing Characteristics of ZnO and Copper-impregnated ZnO, Sensors and Actuators B3, 305-310 (1991).
235. R. Lambrich, W. Hagen, and J. Logois, Anal. Chem. Symp. Ser. 17, 73-74 (1983).
236. 2 Sensing at 300 K using M/ZnO Systems, Sensors and Actuators 19, 119-124 (1989).
237. P. Van Geloven, J. Moons, M. Honore, and J. Roggen, Tin (IV) Oxide Gas Sensors: Thick-film versus Metallo-organic based Sensors, Sensors and Actuators 17, 361-368 (1989).
238. x Sensor, Sensors and Actuators B66, 119-121 (2000).
239. J. Xu, Y. Shun, Q. Pan, and J. Qin, Sensing Characteristics of Double Layer Film of ZnO, Sensors and Actuators B66, 161-163 (2000).
240. H. Nanto, T. Minami, and S. Takata, Zinc-oxide Thin-film Ammonia Gas Sensors with High Sensitivity and Excellent Selectivity, J. Appl. Phys. 60, 482-484 (1986).
241. S. Pizzini, N. Buttá, D. Narducci, and M. Palladino, Thick Film ZnO Resistive Gas Sensors: Analysis of their Kinetic Behavior, J. Electrochem. Soc. 136, 1945-1948 (1989).
242. +-Doped and Undoped ZnO Whiskers, Sensors and Actuators 18, 349-360 (1989).
243. 6 Thick-film Prepared by Dip-coating Method, Sensors and Actuators B66, 70-73 (2000).
244. Y. Toyoshima, M. Miyayama, H. Yanagida, and K. Koumoto, Effect of Relative Humidity on Current-Voltage Characteristics of Li-Doped CuO/ZnO Junction, Jpn. J. Appl. Phys. 22, 1933 (1983).
245. P. Mitra and H. S. Maiti, A Wet-chemical Process to form Palladium Oxide Sensitiser Layer on Thin Film Zinc Oxide based LPG Sensor, Sensors and Actuators B97, 49-58 (2004).
246. A. D. Brailsford, M. Yussouff, and E. M. Logothetis, Steady State Model of Electrochemical Gas Sensors with Multiple Reactions, Sensors and Actuators B35-36, 392-397 (1996).
247. x in Exhausts, Sensors and Actuators 835-36, 409-418 (1996).
248. N. Miura, T. Raisen, G. Lu, and N. Yamazoe, Highly Selective CO Sensor using Stabilized Zirconia and a Couple of Oxide Electrodes, Sensors and Actuators B47, 84-91 (1998).
249. N. Hara and D. D. Macdonald, Oxygen Response of Yttria-Stabilized Zirconia Sensors in Gaseous and Aqueous Systems, J. Electrochem. Soc. 144, 4158-4160 (1997).
250. A. D. Brailsford, M. Yussouff, and E. M. Logothetis, A First-principles Model of the Zirconia Oxygen Sensor, Sensors and Actuators B44, 321-326 (1997).
251. 3 Thick Film Humidity Sensors, Sensors and Actuators B26-27, 99-102 (1995).
252. Z.-G. Zhou, Z.-L. Tang, and Z.-T. Zhang, Studies on Grain-boundary Chemistry of Perovskite Ceramics as CO Gas Sensors, Sensors and Actuators B93, 356-361 (2003).
253. 5 Element at Elevated Temperature, Sensors and Actuators B56, 59-64 (1999).
254. W. M. Sears, The Gas-sensing Properties of Sintered Bismuth Iron Molybdate Catalyst, Sensors and Actuators 19, 351-370 (1989).
255. c Cuprates, Sensors and Actuators B56, 65-72 (1999).
256. 4 Semiconductor Material, Sensors and Actuators B61, 138-142 (1999).
257. 6.8, Sensors and Actuators B61, 208-212 (1999).
258. H. Obayashi, Y. Sahurai, and T. Gejo, J. Solid State Chem. 17, 299-303 (1976).
259. 3 Nano-crystalline Thin-film as a Gate Electrode, Sensors and Actuators B64, 83-87 (2000).
260. H.-T. Sun, M.-T. Wu, P. Li, and X. Yao, Porosity Control of Humidity-Sensitive Ceramics and Theoretical Model of Humidity Sensitive Characteristics, Sensors and Actuators 19, 61-70 (1989).
261. 2 Gas Sensors, Sensors and Actuators B59, 235-241 (1999).
262. 2 Nano-sized Powders and Electrical Responses of the Related Thick Films, Sensors and Actuators B59, 203-209 (1999).
263. x Sensor Combined with NASICON and Pb-Ru-based Pyrochlore-type Oxide Electrode, Sensors and Actuators B65, 141-143 (2000).
264. 4: A Material for Liquefied Petroleum Gas Sensing, Sensors and Actuators B89, 62-67 (2003).
265. G. S. V. Coles, S. E. Bond, and G. Williams, Selectivity Studies and Oxygen Dependence of Tin (IV) Oxide-based Gas Sensors, Sensors and Actuators B4, 485-491 (1991).
266. 2/Si Substrate, Sensors and Actuators A63, 223-226 (1997).
267. I. Kosacki and H. U. Anderson, Nano Structured Oxide Thin Films for Gas Sensors, Sensors and Actuators B48, 263-269 (1998).
268. 3+d Materials for Gas Sensors, Sensors and Actuators B56, 198-205 (1999).
269. 4 Ceramic Thin Films as Innovative Humidity Sensors, Sensors and Actuators B62, 165-170 (2000).
270. N. Imanaka, Y. Hirota, and G.-y. Adachi, Selective Nitrogen Dioxide Gas Sensor Based on Rare Earth Cuprate Semiconductors, J. Electrochem. Soc. 142, 1950-1951 (1995).
271. R. P. Gupta, Z. Gergintschew, D. Schipanski, and P. D. Vyas, YBCO-FET Room Temperature Ammonia Sensor, Sensors and Actuators B63, 35-41 (2000).
272. 4 Semiconductors, Sensors and Actuators B65, 64-67 (2000).
273. W. Göpel, Chemical Sensor Technologies: Empirical Art and Systematic Research, in Sensors; Chemical and Biochemical Sensors, Vol. 2 (W. Göpel, J. Hesse, and J. N. Zemel, Eds.). VCH Verlagsgesellschaft, Weinheim 61-118 (1991).
274. B. J. Hosticka, CMOS Sensor Systems, Sensors and Actuators A66, 335-341 (1998).
275. H. Kobayashi, Four Essential Points in Developing Automotive Sensors, Sensors and Actuators A57, 53-63 (1996).
276. G. H. Kroetz, M. H. Eickhoff, and H. Moeller, Silicon Compatible Materials for Harsh Environment Sensors, Sensors and Actuators A74, 182-189 (1999).
277. N. Jaffrezic-Renault, A. Senillou, C. Martelet, K. Wan, and J. M. Chovelon, ISFET Microsensors for the Detection of Pollutants in Liquid Media, Sensors and Actuators B59, 154-164 (1999).
278. M. Jaegle and K. Steiner, Gas-Sensitive GaAs-MESFETs, Sensors and Actuators B34, 543-547 (1996).
279. I. Lundström, Why Bother About Gas-Sensitive Field-Effect Devices? Sensors and Actuators A56, 75-82 (1996).
280. B. Flietner, T. Doll, J. Lechner, M. Leu, and I. Eisele, Reliable Hybrid GasFETs for Work-Function Measurements with Arbitrary Materials, Sensors and Actuators B22, 109-113 (1994).
281. E. Llobet, X. Vilanova, J. Brezmes, J. E. Sueiras, and X. Correig, Transient Response of Thick-Film Tin Oxide Gas-Sensors to Multicomponent Gas Mixtures, Sensors and Actuators B47, 104-112 (1998).
282. 12 Type for High Temperature Acoustic Piezo-Sensors, Sensors and Actuators A78, 88-91 (1999).
283. W. Kern and C. A. Deckert, Chemical Etching in Thin Film Processes (J. L. Vossen and W. Kern Eds.) (Academic Press, New York, 1978, and the references therein).
284. P. H. Holloway and R. L. Long, Jr., On Chemical Cleaning for Thermocompression Bonding, IEEE Trans. Parts. Hybrids Packag PHP-11, 83-88 (1975).
285. J. L. Vossen and W. Kern, Thin Film Processes-II (Academic Press, Boston, 1991, and the references therein).
286. S. D. Senturia, Simulation and Design of Microsystems: A 10-Year Perspective, Sensors and Actuators A67, 1-7 (1998).
287. H. Debeda, L. Dulau, P. Dondon, F. Menil, C. Lucat, and P. Massok, Development of a Reliable Methane Detector, Sensors and Actuators B44, 248-256 (1997).