Zn-Sn-Sb-O thin film sensor for ppm-level NO2 detection

Sensors and Actuators, B: Chemical

Volumn 77, Issue 1-2, 2001, Pages 12-15

  Yamada, Yasushi ^a   Yamashita, Katsuji ^a   Masuoka, Yumi ^a   Seno, Yoshiki ^a  

^a Rd Management Section   (Japan)

Author keywords

Gas sensor; Nitrogen dioxide; Thin film

Indexed keywords

ALUMINA; COMPOSITION EFFECTS; NITROGEN OXIDES; SPUTTER DEPOSITION; SUBSTRATES; THIN FILM DEVICES; ZINC COMPOUNDS;

CONSTITUENT METAL TARGETS;

CHEMICAL SENSORS;

EID: 0035876001     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00665-7     Document Type: Article

References (4)

1. 2 sensor
2. 2 concentrations in air
3. 2 sensors based on nanosized thin film of titanium-tungsten oxides
4. 4 thin film