Gas-sensing properties of indium-doped SnO2 thin films with variations in indium concentration

Sensors and Actuators, B: Chemical

Volumn 89, Issue 1-2, 2003, Pages 173-179

  Salehi, A ^a   Gholizade, M ^a  

^a K N TOOSI UNIVERSITY OF TECHNOLOGY   (Iran)

Author keywords

CVD; Gas sensing films; InCl3; Indium doping; SEM; SnCl4; SnO2; XRD

Indexed keywords

CRYSTALLOGRAPHY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; THIN FILMS; TIN COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

GAS SENSING FILMS;

CHEMICAL SENSORS;

EID: 0037332616     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(02)00460-4     Document Type: Article

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