A thin-film sensing element for ozone, humidity and temperature

Sensors and Actuators, B: Chemical

Volumn 64, Issue 1-3, 2000, Pages 42-48

  Qu, Wenmin ^a,b   Wlodarski, Wojtek ^a  

^a RMIT UNIVERSITY   (Australia)

^b Institute for Semiconductor and Microsystems Technolog (IHM)   (Germany)

Author keywords

Humidity; Ozone; Platinum; Temperature; Thin film sensor; Tungsten oxide

Indexed keywords

EID: 0002321634     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00481-5     Document Type: Article

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