A new automotive air/fuel sensor based on TiO2-doped Nb2O5 thin film by ion-beam-enhanced deposition

Sensors and Actuators, B: Chemical

Volumn 32, Issue 3, 1996, Pages 209-213

  Zhu, Jianzhong ^a   Ren, Congxin ^b   Chen, Guoliang ^b   Yu, Chunying ^c   Wu, Jiali ^a   Mu, Haicuan ^b  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^c DALIAN INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

Air fuel sensors; Automotive sensors; Ion beam enhanced deposition; Semiconducting metal oxides

Indexed keywords

DEPOSITION; FILM PREPARATION; OXIDES; PERFORMANCE; SEMICONDUCTOR DOPING; SEMICONDUCTOR MATERIALS; THIN FILMS; TITANIUM DIOXIDE;

AIR FUEL SENSORS; AUTOMOTIVE SENSORS; ION BEAM ENHANCED DEPOSITION; NIOBIUM OXIDES; SEMICONDUCTING METAL OXIDES;

SENSORS;

EID: 0030157462     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80031-7     Document Type: Article

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