Sensing properties to dilute chlorine gas of indium oxide based thin film sensors prepared by electron beam evaporation

Sensors and Actuators, B: Chemical

Volumn 83, Issue 1-3, 2002, Pages 190-194

  Tamaki, Jun ^a   Naruo, Chizuko ^a   Yamamoto, Yoshifumi ^a   Matsuoka, Masao ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Chlorine gas sensor; Electron beam evaporation; Indium oxide; Thin film

Indexed keywords

ADSORPTION; ATOMIC FORCE MICROSCOPY; CHLORINE; ELECTRON BEAMS; EVAPORATION; INDIUM COMPOUNDS; THIN FILMS;

CHLORINE GAS SENSORS; ELECTRON BEAM EVAPORATION;

CHEMICAL SENSORS;

EID: 0037086393     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)01039-5     Document Type: Conference Paper

References (10)

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8. Chlorine gas sensing using thin films of meso-tetra (p-stearamidophenyl) porphyrin
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