Tin dioxide sol-gel derived thin films deposited on porous silicon

Sensors and Actuators, B: Chemical

Volumn 43, Issue 1-3, 1997, Pages 114-120

  Cobianu, Cornel ^a   Savaniu, Cristian ^a   Buiu, Octavian ^a   Dascalu, Dan ^a   Zaharescu, Maria ^b   Parlog, Constanta ^b   Van Den Berg, Albert ^c   Pecz, Bela ^d  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b INSTITUTE OF PHYSICAL CHEMISTRY   (Romania)

^c UNIVERSITY OF TWENTE   (Netherlands)

^d RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

Porous silicon; Sol gel; Tin dioxide

Indexed keywords

CHEMICAL BONDS; CHEMICAL SENSORS; DEPOSITION; FILM PREPARATION; INFRARED SPECTROSCOPY; POROUS SILICON; SOL-GELS; TIN COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY SPECTROSCOPY;

CONSOLIDATION TREATMENTS; ENERGY DISPERSIVE X RAY SPECTROSCOPY; TIN ETHOXIDE PRECURSOR;

THIN FILM DEVICES;

EID: 0031224614     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)00196-2     Document Type: Article

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