Sensing characteristics of dc reactive sputtered WO3 thin films as an NOx gas sensor

Sensors and Actuators, B: Chemical

Volumn 62, Issue 2, 2000, Pages 102-108

  Kim, Tae Song ^a   Kim, Yong Bum ^b   Yoo, Kwang Soo ^c   Sung, Gi Suk ^b   Jung, Hyung Jin ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b RD Ctr 220 1 Suwolam ri S   (South Korea)

^c University of Seoul   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ANNEALING; CRYSTALLIZATION; NITROGEN OXIDES; SCANNING ELECTRON MICROSCOPY; SPUTTERING; SUBSTRATES; THERMAL EFFECTS; THIN FILM DEVICES; TUNGSTEN COMPOUNDS;

DC REACTIVE SPUTTERING;

CHEMICAL SENSORS;

EID: 0033907197     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00360-3     Document Type: Article

References (14)

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