Absolute-humidity sensing independent of the ambient temperature

Sensors and Actuators, A: Physical

Volumn 55, Issue 1, 1996, Pages 7-11

  Kimura, Mitsuteru ^a  

^a TOHOKU GAKUIN UNIVERSITY   (Japan)

Author keywords

Air bridges; Humidity sensors; Microheaters; Micromachining; Thermal conductivity

Indexed keywords

HUMIDITY CONTROL; MATHEMATICAL MODELS; MICROMACHINING; THERMAL CONDUCTIVITY OF GASES;

MICROAIR BRIDGE HEATER; SILICON MICROMACHINING TECHNIQUE; THERMAL HUMIDITY SENSORS;

SILICON SENSORS;

EID: 0030182309     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01242-3     Document Type: Article

References (3)

1. M. Kimura, J. Manaka, S. Satoh, S. Takano, N. Igarashi and K. Nagai, Application of the air-bridge microheater to gas detection, Sensors and Actuators B, 24-25 (1995) 857-860.
2. M. Kimura, J. Manaka, S. Satoh, S. Takano, N. Igarashi and K. Nagai, A new type humidity sensor using micro-air-bridge heater, Proc. Micro System Tech. '94, Berlin, Germany, 1994, pp. 455-461.
3. K. Makita, Viscosity and thermal conductivity, Baifukan, Tokyo, 1975, Ch. 5., pp. 70-153.