Three electrodes gas sensor based on ITO thin film

Sensors and Actuators, B: Chemical

Volumn 93, Issue 1-3, 2003, Pages 31-35

  Lee, Sang Mun ^a   Lee, Yun Su ^a   Shim, Chang Hyun ^a   Choi, Nak Jin ^a   Joo, Byung Su ^a   Song, Kap Duk ^a   Huh, Jeung Soo ^a   Lee, Duk Dong ^a  

^a Kyungpook National University   (South Korea)

Author keywords

Gas sensor; ITO thin film; Metal thermal oxidation

Indexed keywords

CATALYSTS; INDIUM COMPOUNDS; SEMICONDUCTOR MATERIALS; THIN FILMS;

METAL THERMAL OXIDATION;

CHEMICAL SENSORS;

EID: 0037675960     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00335-6     Document Type: Conference Paper

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