Room temperature ozone sensing with conductivity and work function sensors based on indium oxide

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 577-580

  Doll, T ^a   Fuchs, A ^a   Eisele, I ^a   Faglia, G ^a   Groppelli, S ^a   Sberveglieri, G ^a  

^a BUNDESWEHR UNIVERSITY MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; CHEMISORPTION; DESORPTION; ELECTRIC CONDUCTIVITY MEASUREMENT; OZONE; SEMICONDUCTING INDIUM COMPOUNDS; SUBSTRATES; THERMAL EFFECTS; THIN FILM DEVICES;

ROOM TEMPERATURE OZONE SENSING; WORK FUNCTION SENSORS;

CHEMICAL SENSORS;

EID: 0030652976     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)