Preparation of indium oxide thin film by spin-coating method and its gas-sensing properties

Sensors and Actuators, B: Chemical

Volumn 46, Issue 2-3, 1998, Pages 139-145

  Chung, Wan Young ^a   Sakai, Go ^a   Shimanoe, Kengo ^a   Miura, Norio ^a   Lee, Duk Dong ^b   Yamazoe, Noboru ^a  

^a KYUSHU UNIVERSITY   (Japan)

^b Kyungpook National University   (South Korea)

Author keywords

Al2O3 substrate; Gas sensor; In2O3; Spin coating method

Indexed keywords

ACETIC ACID; ALUMINA; CELLULOSE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM COMPOUNDS; SUBSTRATES; THIN FILM DEVICES;

INDIUM OXIDE; SPIN COATING METHOD;

CHEMICAL SENSORS;

EID: 0345914958     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(98)00100-2     Document Type: Article

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