SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Sensors and Actuators, B: Chemical

Volumn 84, Issue 1, 2002, Pages 1-5

Electrical properties of reactively sputtered WO3 thin films as ozone gas sensor

(3) Aguir, K a Lemire, C a Lollman, D B B a

a AIX MARSEILLE UNIVERSITY (France)

Author keywords

AFM; Conductivity; Electrical properties; Gas sensors; Thin films; WO3

Indexed keywords

ACTIVATION ENERGY; ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; OZONE; SPUTTER DEPOSITION; THIN FILMS; TUNGSTEN COMPOUNDS;

DEPOSITION PARAMETERS;

CHEMICAL SENSORS;

EID: 0037198101 PISSN: 09254005 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-4005(02)00003-5 Document Type: Article

Times cited : (171)

References (17)

1
- 0038845996
- H. Baltes, W. Göpel, J. Hesse (Eds.), VCH, Weinheim
- (1996) Sensors Update , vol.1 , pp. 47-120
- Göpel, W.¹ Reinhardt, G.²

2
- 0041824505
- (1996) Sens. Actuators , vol.B33 , pp. 198-202
- Meixner, H.¹ Lampe, U.²

3
- 0033533279
- (1999) Sens. Actuators , vol.B57 , pp. 1-16
- Williams, D.E.¹

4
- 0033701813
- (2000) Sens. Actuators , vol.B66 , pp. 74-76
- Wang, X.¹ Miura, N.² Yamazoe, N.³

5
- 0033361748
- (1999) Sens. Actuators , vol.B60 , pp. 57-63
- Lee, D.-S.¹ Han, S.-D.² Lee, D.-D.³

6
- 0032122155
- (1998) Thin Solid Films , vol.324 , pp. 44-51
- Manno, D.¹ Serra, A.² Di Giulio, M.³ Micocci, G.⁴ Tepore, A.⁵

7
- 0033889915
- (2000) Solar Energy Mater. Solar Cells , vol.60 , pp. 201-262
- Grnaqvist, C.G.¹

8
- 0033361404
- (1999) Sens. Actuators , vol.B60 , pp. 71-77
- Yang, J.-I.¹ Lim, H.² Han, S.-D.³

9
- 0030232427
- (1996) Sens. Actuators , vol.B35-36 , pp. 112-118
- Cantalini, C.¹ Pelino, M.² Sun, H.T.³ Faccio, M.⁴ Santucci, S.⁵ Lozzi, L.⁶ Passacantando, M.⁷

10
- 0033149651
- (1999) MRS Bull. , Issue.JUNE , pp. 18-24
- Shimizu, Y.¹ Egashira, M.²

11
- 0002321634
- (2000) Sens. Actuators , vol.64 , pp. 42-48
- Qu, W.¹ Wlodarski, W.²

12
- 84991412099
- (2001) Proceedings of the E-MRS Symposium 2001
- Lemire, C.¹ Lollman, D.B.B.² Gillet, E.³ Aguir, K.⁴

13
- 0000295920
- (1990) J. Vac. Sci. Technol. , vol.A8 , Issue.4 , pp. 3634-3638
- Xu, Z.¹ Vetelino, J.F.² Lec, R.³ Parker, D.C.⁴

14
- 0033310763
- (1999) Phys. Stat. Sol. A , vol.175 , pp. 991-1002
- Hutchins, M.G.¹ Kamel, N.A.² El-Kadry, N.³ Ramadan, A.A.⁴ Adel-Hady, K.⁵

15
- 0020114149
- (1982) J. Appl. Phys. , vol.53 , Issue.4 , pp. 3070-3075
- Kaneko, H.¹ Miyake, K.² Teramoto, Y.³

16
- 0000991788
- (1981) J. Sol. Stat. Chem. , vol.40 , pp. 270-279
- Bonnet, J.P.¹ Marucco, J.F.² Onillon, M.³ Hagenmuller, P.⁴

17
- 0033533279
- (1999) Sens. Actuators , vol.B57 , pp. 1-16
- Williams, D.E.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.