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Volumn 54, Issue 3, 1999, Pages 202-209

Processes development for low cost and low power consuming SnO2 thin film gas sensors (TFGS)

Author keywords

[No Author keywords available]

Indexed keywords

COSTS; ELECTRIC POWER SUPPLIES TO APPARATUS; PROCESS ENGINEERING; PYROLYSIS; THIN FILM DEVICES; TIN COMPOUNDS;

EID: 0032690222     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00017-9     Document Type: Article
Times cited : (42)

References (18)
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    • (1995) Proc. of 20th. Int. Conf on Microelectronics , vol.2 , pp. 585-588
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    • Chemical deposition of inorganic films
    • New York: Academic Press
    • Chopra K.L., Das S. Chemical deposition of inorganic films. Physics of Thin Films. 12:1982;168-232 Academic Press, New York.
    • (1982) Physics of Thin Films , vol.12 , pp. 168-232
    • Chopra, K.L.1    Das, S.2
  • 8
    • 0025493712 scopus 로고
    • Growth and characterization of tin oxide films prepared by CVD
    • Sanon S., Rup R., Mansingh A. Growth and characterization of tin oxide films prepared by CVD. Thin Solid Films. 190:1990;287-301.
    • (1990) Thin Solid Films , vol.190 , pp. 287-301
    • Sanon, S.1    Rup, R.2    Mansingh, A.3
  • 9
    • 0025594813 scopus 로고
    • 2 films: Dependence on the oxidising agent in the starting material
    • 2 films: dependence on the oxidising agent in the starting material. Thin Solid Films. 193-194:1990;973-980.
    • (1990) Thin Solid Films , vol.193-194 , pp. 973-980
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  • 10
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    • Chemical spray technology adopted to thin film semiconductor growth
    • P. Vincenzim. Amsterdam: Elsevier
    • de Xivry O., Streydio J.M., Berote G. Chemical spray technology adopted to thin film semiconductor growth. Vincenzim P. High Techn. Ceramics. 1987;1709-1719 Elsevier, Amsterdam.
    • (1987) High Techn. Ceramics , pp. 1709-1719
    • De Xivry, O.1    Streydio, J.M.2    Berote, G.3
  • 13
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    • Gas sensitivity of metal oxide mixed tin oxide films prepared by spray pyrolysis
    • Nomura K., Ujihira Y., Sharma S.S., Fueda A., Murakami T. Gas sensitivity of metal oxide mixed tin oxide films prepared by spray pyrolysis. J. Mater. Sci. 24:1989;937-941.
    • (1989) J. Mater. Sci. , vol.24 , pp. 937-941
    • Nomura, K.1    Ujihira, Y.2    Sharma, S.S.3    Fueda, A.4    Murakami, T.5
  • 14
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    • Influence of surface parameters and doping on the sensitivity and the response time of tin oxide resistive sensors
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.