Conductivity and work function ozone sensors based on indium oxide

Sensors and Actuators, B: Chemical

Volumn 49, Issue 1-2, 1998, Pages 63-67

  Doll, T ^a   Fuchs, A ^a   Eisele, I ^a   Faglia, G ^b   Groppelli, S ^b   Sberveglieri, G ^b  

^a BUNDESWEHR UNIVERSITY MUNICH   (Germany)

^b UNIVERSITY OF BRESCIA   (Italy)

Author keywords

Gas sensor; Indium oxide; Ozone; Sputtering; Work function

Indexed keywords

ALUMINA; CHEMISORPTION; ELECTRIC CONDUCTIVITY MEASUREMENT; OXIDES; OZONE; SILICON; SPUTTER DEPOSITION; THIN FILMS;

INDIUM OXIDE; OZONE SENSOR; THERMAL DESORPTION; WORK FUNCTION;

ELECTROCHEMICAL SENSORS;

EID: 0032092870     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(98)00037-9     Document Type: Article

References (11)

1. T. Takada, K. Komatsu, Proc. 4th Int. Conf. on Solid State Sensors and Actuators, Tokyo, 1987, p. 693.
2. T. Takada, K. Suzuki, M. Nakane, Highly sensitive ozone sensor, Proc. 4th IMCS, 1992, pp. 470-473.
3. P. Banda, A. Campitelli, S. Lee, W. Wlodarski, Semiconducting oxide coated surface acoustic wave for environmental gas sensing applications, Proc. 5th IMCS, 1994, pp. 54-56.
4. 3 thin films for ozone sensing, Proc. Transducers '97, 1997, pp. 573-576
5. 2 detection, Proc. Eurosensors XI, 1997, 1181-1184.
6. R. Winter, T. Doll, H. Geistlinger, I. Eisele, Temperature dependance of the work function change of thin metal oxide films, Proc. Eurosensors X, 1996.
7. K. Schierbaum, U. Weimar, R. Kowalkowski, W. Göpel, Sens. Actuators B 3 (1991) 205-214.
8. 3 films, J. Appl. Phys. 60 (11) (1986) 123-159.
9. W.M. Sachtler, G.J. Dorgelo, A.A. Holscher, The work function of gold, Surf. Sci. 5 (1966) 221-229.
10. A. Fuchs, T. Doll, M. Bogner, I. Eisele, Design and fabrication of HSGFET gas sensors, Proc. Micro System Technologies, 409-414, 1996.
11. Z. Gergintschew, P. Kornetzky, D. Schipanski, The capacitively controlled field effect transistor (CCFET) as a new low power gas sensor, Sens. Actuators B 35-B 36 (1996) 285-289.