An integrated gas sensor technology using surface micro-machining

Sensors and Actuators, B: Chemical

Volumn 82, Issue 2-3, 2002, Pages 277-283

  Chan, Philip C H ^a   Yan, Gui Zhen ^a,b   Sheng, Lie Yi ^a,c   Sharma, Rajnish K ^a   Tang, Zhenan ^a,d   Sin, Johnny K O ^a   Hsing, I Ming ^a   Wang, Yangyuan ^b  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b PEKING UNIVERSITY   (China)

^c FREE UNIVERSITY OF BRUSSELS   (Belgium)

^d DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Carbon monoxide sensor; Gas sensor; Integrated sensor; Micro hotplate; Surface micro machine

Indexed keywords

CARBON MONOXIDE; ETCHING; MICROMACHINING; POLYSILICON;

INTEGRATED GAS SENSORS; MICRO-HOTPLATES (MHP);

CHEMICAL SENSORS;

EID: 0037185902     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)01064-4     Document Type: Article

References (5)

1. A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering
2. Design and analysis of a micro-hotplate for integrated gas sensor applications
3. Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing
4. An improved TMAH etching silicon method without attacking exposed aluminum