Sol-gel prepared In 2O 3 thin films for ozone sensing

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 573-576

  Wlodarski, Wojtek ^a   Sun, Hong Tao ^a   Gurlo, Alexander ^a   Gopel, Wolfgang ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

INDIUM OXIDE THIN FILMS; OZONE SENSORS;

ANNEALING; FILM PREPARATION; OZONE; SEMICONDUCTING INDIUM COMPOUNDS; SOL-GELS; SUBSTRATES; THERMAL EFFECTS; THIN FILM DEVICES;

CHEMICAL SENSORS;

EID: 0030658613     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)