Comparison of sol-gel and ion beam deposited MoO3 thin film gas sensors for selective ammonia detection

Sensors and Actuators, B: Chemical

Volumn 93, Issue 1-3, 2003, Pages 25-30

  Prasad, A K ^a   Kubinski, D J ^b   Gouma, P I ^a  

^a STONY BROOK UNIVERSITY   (United States)

^b FORD RESEARCH LABORATORY   (United States)

Author keywords

Microstructure; MoO3 sensor; Oxide polymorphism; Processing; Selectivity

Indexed keywords

AMMONIA; ELECTRON MICROSCOPY; ION BEAMS; MICROANALYSIS; MICROSTRUCTURE; MOLYBDENUM COMPOUNDS; SOL-GELS; THIN FILMS;

OXIDE POLYMORPHISM;

CHEMICAL SENSORS;

EID: 0038787985     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00336-8     Document Type: Conference Paper

References (16)

1. Nanto H., Minami T., Takata S. Zinc-oxide thin-film ammonia gas sensors with high-sensitivity and excellent selectivity. J. Appl. Phys. 60(2):1986;482-484.
2. Moos R., Muller R., Plog C., Knezevic A., Leye H., Irion E., Braun T., Marquardt K., Binder K. Selective ammonia exhaust gas sensor for automotive applications. Sens. Actuators B. 83:2002;181-189.
3. 3. Sens. Actuators B. 77(1-2):2001;100-110.
4. Moseley P.T., Williams D.E. A selective ammonia sensor. Sens. Actuators B. 1(1-6):1990;113-115.
5. Takao Y., Miyazaki K., Shimizu Y., Egashira M. High ammonia sensitive semiconductor gas sensors with double-layer structure and interface electrodes. J. Electrochem. Soc. 141(4):1994;1028-1034.
6. Uneus L., Tobias P., Salomonsson P., Lundstrom I., Spetz A.L. Schottky diodes with thin catalytic gate metals for potential use as ammonia sensors for exhaust gases. Sens. Mater. 11(5):1999;305-318.
7. 3 sensors based on ZnO-In thin-films. Sens. Actuators B. 25(1-3):1995;588-590.
8. 3. Sens. Actuators B. 19(1-3):1994;434-436.
9. Kurzweil P., Maunz W., Plog C. Impedance of zeolite-based gas sensors. Sens. Actuators B. 25(1-3):1995;653-656.
10. 3 detection. Sens. Actuators B. 36(1-3):1996;320-324.
11. Comini E., Faglia G., Sberveglieri G., Cantalini C., Passacantando M., Santucci S., Li Y., Wlodarski W., Qu W. Carbon monoxide response of molybdenum oxide thin films deposited by different techniques. Sens. Actuators B. 68(1-3):2000;168-174.
12. 3 gas sensors. Sens. Actuators B. 64(1-3):2000;193-197.
13. Ferroni M., Guidi V., Martinelli G., Nelli P., Sacerdoti M., Sberveglieri G. Characterization of a molybdenum oxide sputtered thin film as a gas sensor. Thin Solid Films. 307(1-2):1997;148-151.
14. 2 thin films and their electronic properties. Sens. Actuators B. 66(1-3):2000;164-166.
15. Gregory O.J., Luo Q., Bienkiewicz J.M., Erwin B.M., Crisman E.E. An apparent n to p transition in reactively sputtered indium-tin-oxide high temperature strain gages. Thin Solid Films. 405(1-2):2002;263-269.
16. Yamada H., Miller G.R. Point-defects in reduced strontium-titanate. J. Solid State Chem. 6(1):1973;169-177.