Compatibility of CO gas sensitive SnO2/Pt thin film with silicon integrated circuit processing

Sensors and Actuators, B: Chemical

Volumn 64, Issue 1-3, 2000, Pages 49-53

  Sharma, Rajnish K ^a   Tang, Zhenan ^b,c   Chan, Philip C H ^a   Sin, Johnny K O ^a   Hsing, I Ming ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^c DALIAN UNIVERSITY   (China)

Author keywords

Annealing; Integration; Interconnection; Selectivity; Stability; Tin dioxide

Indexed keywords

EID: 0001841016     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00482-7     Document Type: Article

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