MoO3-based sputtered thin films for fast NO2 detection

Sensors and Actuators, B: Chemical

Volumn 48, Issue 1-3, 1998, Pages 285-288

  Ferroni, Matteo ^a   Guidi, Vincenzo ^a   Martinelli, Giuliano ^a   Sacerdoti, Michele ^a   Nelli, Paolo ^b   Sberveglieri, Giorgio ^b  

^a UNIVERSITY OF FERRARA   (Italy)

^b UNIVERSITY OF BRESCIA   (Italy)

Author keywords

Molybdenum oxide; NO2; Sputtering; Thin film

Indexed keywords

CHARACTERIZATION; CHEMICAL SENSORS; CRYSTAL STRUCTURE; ELECTRON MICROSCOPY; MATERIALS TESTING; MOLYBDENUM COMPOUNDS; SEMICONDUCTOR MATERIALS; SPUTTERING; X RAY DIFFRACTION;

MOLYBDENUM TRIOXIDE; NITROGEN DIOXIDE; RESPONSE TIME; SENSING BEHAVIOR; SENSITIVITY;

THIN FILMS;

EID: 0032067169     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(98)00057-4     Document Type: Article

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