The optimization of a tungsten trioxide film for application in a surface acoustic wave gas sensor

Sensors and Actuators, B: Chemical

Volumn 35, Issue 1-3, 1996, Pages 164-169

  LeGore, L J ^a   Snow, K ^b   Galipeau, J D ^c   Vetelino, J F ^a  

^a UNIVERSITY OF MAINE   (United States)

^b Membrane Technology & Research Inc   (United States)

^c Andersen Laboratories Inc   (United States)

Author keywords

Surface acoustic wave gas sensor; Thin films; Tungsten trioxide

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ANNEALING; CHEMICAL SENSORS; DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; MAGNETRON SPUTTERING; QUARTZ; THERMAL CYCLING; THERMAL EFFECTS; THIN FILMS; TUNGSTEN COMPOUNDS;

TUNGSTEN TRIOXIDE;

METALLIC FILMS;

EID: 0030234956     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80048-2     Document Type: Article

References (14)

1. See for example, A. D'Amico and E. Verona, SAW sensors, Sensors and Actuators, 17 (1989) 55-66 and refs. therein.
2. J. Ricco and S.J. Martin, Thin metal film characterization and chemical sensors: monitoring electronic conductivity, mass loading and mechanical properties with surface acoustic wave devices, Thin Solid Films, 206 (1991) 94-101.
3. J. Ricco, S.J. Martin and T.E. Zipperian, Surface acoustic wave gas sensor based on film conductivity changes, Sensors and Actuators, 8 (1985) 319-333.
4. 2S using a acoustic wave gas sensor, Proc. 1990 Int. Meet. Chemical Sensors, Cleveland, OH, USA, 1990, pp. 354-357.
5. D.J. Smith, J.F. Vetelino, R.S. Falconer and E.L. Whitman, Stability, sensitivity and selectivity of tungsten trioxide films for sensing applications, Sensors and Actuators B, 13-14 (1993) 264-268.
6. J.D. Galipeau, R.S. Falconer, J.F. Vetelino, J.J. Caron, E.L. Whitman, M.G. Schweyer and J.C. Andle, Theory, design and operation of a surface acoustic wave hydrogen sulfide microsensor, Sensors and Actuators B, 24-25 (1995) 49-53.
7. B.A. Auld, Acoustic Fields and Waves in Solids, Vol. II, Wiley, New York, 1973.
8. J.J. Caron, J.C. Andle and J.F. Vetelino, Surface acoustic wave substrates for gas sensing applications, Proc. IEEE 1995 Ultrason. Symp., Seattle, WA, USA, 1995, pp. 461-465.
9. M. Ohring, The Materials Science of Thin Films, Academic Press, San Diego, CA, 1992.
10. 2S surface acoustic wave sensor, IEEE Trans. UFFC, 34 (1987) 156.
11. L.J. LeGore, unpublished.
12. 3 gas-sensing films, Thin Solid Films, 256 (1995) 247-252.
13. A. Agrawal and H. Habibi, Effect of heat treatment on the structure, composition and electrochromic properties of evaporated tungsten oxide films: I, Thin Solid Films, 169 (1989) 257-270.
14. 2 thin-film gas sensors due to gold diffusion, Sensors and Actuators , 2 (1981/82) 139-147.