Surface modifications of Ga2O3 thin film sensors with Rh, Ru and Ir clusters

Sensors and Actuators, B: Chemical

Volumn 66, Issue 1, 2000, Pages 80-84

  Lang, A C ^a   Fleischer, M ^a   Meixner, H ^a  

^a SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; IONIC CONDUCTION IN SOLIDS; IRIDIUM; PYROLYSIS; RHODIUM; RUTHENIUM; SEMICONDUCTING GALLIUM COMPOUNDS; SENSITIVITY ANALYSIS; SURFACE TREATMENT; THIN FILM DEVICES;

THIN FILM SENSORS;

CHEMICAL SENSORS;

EID: 0033724338     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00347-0     Document Type: Article

References (1)

1. Frank J., Fleischer M., Meixner H. Sensors and Actuators B. 34:1996;373-377.